JP4721101B2 - 圧電デバイス並びに圧電デバイスの製造方法、及び電子機器 - Google Patents

圧電デバイス並びに圧電デバイスの製造方法、及び電子機器 Download PDF

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JP4721101B2
JP4721101B2 JP2005147595A JP2005147595A JP4721101B2 JP 4721101 B2 JP4721101 B2 JP 4721101B2 JP 2005147595 A JP2005147595 A JP 2005147595A JP 2005147595 A JP2005147595 A JP 2005147595A JP 4721101 B2 JP4721101 B2 JP 4721101B2
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piezoelectric device
element piece
substrate
package base
opening
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JP2006325052A5 (https=
JP2006325052A (ja
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健彦 進藤
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Seiko Epson Corp
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Seiko Epson Corp
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  • Oscillators With Electromechanical Resonators (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2005147595A 2005-05-20 2005-05-20 圧電デバイス並びに圧電デバイスの製造方法、及び電子機器 Expired - Fee Related JP4721101B2 (ja)

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JP2005147595A JP4721101B2 (ja) 2005-05-20 2005-05-20 圧電デバイス並びに圧電デバイスの製造方法、及び電子機器

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JP2005147595A JP4721101B2 (ja) 2005-05-20 2005-05-20 圧電デバイス並びに圧電デバイスの製造方法、及び電子機器

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JP2006325052A JP2006325052A (ja) 2006-11-30
JP2006325052A5 JP2006325052A5 (https=) 2008-05-29
JP4721101B2 true JP4721101B2 (ja) 2011-07-13

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JP2005147595A Expired - Fee Related JP4721101B2 (ja) 2005-05-20 2005-05-20 圧電デバイス並びに圧電デバイスの製造方法、及び電子機器

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Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2785450B1 (fr) * 1998-10-30 2003-07-04 Thomson Csf Module de composants superposes dans un meme boitier
JP3444420B2 (ja) * 2001-03-26 2003-09-08 セイコーエプソン株式会社 弾性表面波装置及びその製造方法
JP2003229720A (ja) * 2002-02-04 2003-08-15 Seiko Epson Corp 圧電発振器の製造方法及び圧電発振器
JP3826875B2 (ja) * 2002-10-29 2006-09-27 セイコーエプソン株式会社 圧電デバイスおよびその製造方法

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