JP4714022B2 - 工具用表面被覆高硬度材料 - Google Patents
工具用表面被覆高硬度材料 Download PDFInfo
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- 238000000576 coating method Methods 0.000 title claims description 95
- 239000011248 coating agent Substances 0.000 title claims description 94
- 239000000463 material Substances 0.000 title claims description 70
- 239000000758 substrate Substances 0.000 claims description 20
- 238000003754 machining Methods 0.000 claims description 19
- 239000013078 crystal Substances 0.000 claims description 14
- 229910000760 Hardened steel Inorganic materials 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- 239000011230 binding agent Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 238000002441 X-ray diffraction Methods 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 150000004767 nitrides Chemical group 0.000 claims description 4
- 230000000737 periodic effect Effects 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 4
- 229910052582 BN Inorganic materials 0.000 claims description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- -1 aluminum compound Chemical class 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims description 2
- 239000006104 solid solution Substances 0.000 claims description 2
- 229910052723 transition metal Inorganic materials 0.000 claims description 2
- 239000010408 film Substances 0.000 description 146
- 238000005520 cutting process Methods 0.000 description 120
- 238000012360 testing method Methods 0.000 description 35
- 230000035882 stress Effects 0.000 description 32
- 239000010410 layer Substances 0.000 description 20
- 239000010936 titanium Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 11
- 230000007423 decrease Effects 0.000 description 10
- 239000002344 surface layer Substances 0.000 description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000007733 ion plating Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 150000001768 cations Chemical class 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- JXOOCQBAIRXOGG-UHFFFAOYSA-N [B].[B].[B].[B].[B].[B].[B].[B].[B].[B].[B].[B].[Al] Chemical compound [B].[B].[B].[B].[B].[B].[B].[B].[B].[B].[B].[B].[Al] JXOOCQBAIRXOGG-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910010038 TiAl Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000005476 size effect Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/04—Cutting-off tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/18—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing
- B23B27/20—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing with diamond bits or cutting inserts
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
- C04B41/5062—Borides, Nitrides or Silicides
- C04B41/5068—Titanium nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2222/00—Materials of tools or workpieces composed of metals, alloys or metal matrices
- B23B2222/28—Details of hard metal, i.e. cemented carbide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
- B23B2224/32—Titanium carbide nitride (TiCN)
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2226/00—Materials of tools or workpieces not comprising a metal
- B23B2226/12—Boron nitride
- B23B2226/125—Boron nitride cubic [CBN]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2226/00—Materials of tools or workpieces not comprising a metal
- B23B2226/31—Diamond
- B23B2226/315—Diamond polycrystalline [PCD]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
- B23B2228/105—Coatings with specified thickness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
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- Mechanical Engineering (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Ceramic Products (AREA)
- Drilling Tools (AREA)
Description
表1に記載されているチップを用いて、油穴が加工されている被削材を10分間切削して断続切削試験(断続度50%)を実施した。被削材は、焼入れ鋼であるSCr420H(JIS規格)を硬度HRc60に調整したものを用いた。なお、断続度とは被削材の送り方向において、切削する部分の長さに対する空転部分の長さの割合を意味する。本切削試験の断続度50%では、被削材の切削される長さに対して半分の長さが断続切削であったという意味である。本発明の材料は、断続切削と連続切削が混在する被削材の切削に好適である。被削材全体にスプライン溝などがある場合は、断続度100%となる。
切削速度:200m/min
送り :0.15mm/rev
切り込み:0.2mm
切削方式:乾式
このようにして得られた結果を表2に示す。逃げ面摩耗と切削された面の面粗度を合わせて考慮し評価した結果が評価の欄に記載されている。このうち◎が最もよく、以下○、△、×と順次評価は悪くなる。この表示は、以下の切削試験においても同様である。この結果から、中間層と耐摩耗層と最表面層とを合わせた被覆膜の厚さが1μmを越えるものおよび被覆膜のないものは、×または△の評価であった。ここで表中に示した面粗さRzは、被削材の表面を表面粗さ計で測定した粗さ曲線から基準長さを切り取り、その部分の山頂線と谷底線との間隔を粗さ曲線の縦方向に測定し、これをミクロン単位(1μm=0.001mm)で表したものを言い、JIS(日本工業規格)B0601に定められている。(以下の実施例においても同じ)。
表1に記載されているチップを用いて、油穴が加工されている被削材を10分間切削して断続切削試験(断続度50%)した。被削材は、焼入れ鋼であるSCr420H(JIS規格)を硬度HRc60に調整したもので、切削試験1と同じ形状をしたものを用いた。切削試験の条件は以下の通りである。
切削速度:200m/min
送り :0.04mm/rev
切り込み:0.1mm
切削方式:乾式
表1に記載されているチップを用いて、被削材を20分間切削して連続切削試験した。被削材は、焼入れ鋼であるSCr420H(JIS規格)を硬度HRc60に調整したものを用いた。切削試験の条件は以下の通りである。
切削速度:200m/min
送り :0.04mm/rev
切り込み:0.05mm
切削方式:乾式
表1に記載されているチップを用いて、切削試験1と同様に切削試験した。ここでは、同じ試料No.のチップで0.02mm/revと0.15mm/revの2種類の送り量を採用して、被削材を20分間連続切削して比較した。被削材は、焼入れ鋼であるSCr420H(JIS規格)を硬度HRc60に調整したものを用いた。切削試験の条件は以下の通りである。
切削速度:200m/min
送り :表5に記載の通り。
切り込み:0.2mm
切削方式:乾式
この切削試験では、溝入れ加工による切削試験を行った。表1に記載されているチップを用いて、被削材に120個の溝を加工して性能評価した。被削材は、焼入れ鋼であるSCr420H(JIS規格)を硬度HRc63に調整したものを用いた。切削試験の条件は以下の通りである。
切削速度:200m/min
送り :0.02mm/rev
溝の深さ:0.8mm
切削方式:乾式
この切削試験では、切削試験5と同様に溝入れ加工により評価した。表1に記載されているチップを用いて、被削材に120個の溝を加工して性能評価した。被削材は、送り方向にスプライン溝を有す断続度100%の形状で、焼入れ鋼であるSCr420H(JIS規格)を硬度HRc63に調整したものを用いた。
切削速度:150m/min
送り :0.02mm/rev
溝の深さ:0.8mm
切削方式:乾式
ここでは、表8に記載されているチップを用いて、10分間の切削試験をした。被削材は、切削試験1で使用したものと同一の断続切削テスト用のものである。切削試験の条件は以下の通りである。
切削速度:200m/min
送り :0.1mm/rev
切り込み:0.2mm
切削方式:乾式
このようにして得られた結果を表9に示す。膜厚が0.5μm未満、回折強度I(200)/I(111)が3以下、平均粒径が150nm以下の試料No.41、42のものが特に優れていた。
[図2]プランジカットにおける、切削断面積を説明する概念図である。
[図3]図2のA−A断面図であって、本発明の切削工具を用いて、被削材をプランジカットしている状態を模式的に示した図である。
[図4]バイアス電圧と残留応力の関係を示すグラフである。
2 被覆膜
3 被削材
4 丸み
5 切粉
6 溝壁
7 1回転前の基材位置
F 送り
Claims (8)
- 立方晶窒化硼素焼結体(以下CBN焼結体)を基材として、
前記基材の表面に、(Ti 1-X Al X )N、0.3≦X≦0.6で表される組成を有する被覆膜を厚さ0.1μm以上1μm未満で有し、
前記被覆膜のX線回折における(111)面の回折強度をI(111)、(200)面の回折強度をI(200)としたとき、0≦I(200)/I(111)≦3であることを特徴とする工具用表面被覆高硬度材料。 - 前記被覆膜が(Ti1-XAlX)N、0.3≦X≦0.45で表される組成を有することを特徴とする請求項1に記載の工具用表面被覆高硬度材料。
- 前記被覆膜を構成する結晶の平均粒径が50nm以上150nm未満であることを特徴とする請求項1又は2のいずれかに記載の工具用表面被覆高硬度材料。
- 前記被覆膜に含まれるTiの一部を、Si、BならびにTiを除く周期律表4a、5aおよび6a族遷移金属元素の中から選択される少なくとも1種の元素に置換し、置換された元素の被覆膜中の含有量が原子%で10%未満であることを特徴とする請求項1〜3のいずれかに記載の工具用表面被覆高硬度材料。
- 前記工具用表面被覆高硬度材料の用途が溝入れ工具であることを特徴とする請求項1〜4のいずれかに記載の工具用表面被覆高硬度材料。
- 基材が立方晶窒化硼素(CBN)粉末30〜90体積%と残部結合材からなる焼結体であって、残部結合材が周期律表第4a、5aおよび6a族元素の窒化物、炭化物、硼化物、酸化物ならびにこれらの固溶体からなる群の中から選択された少なくとも一種と、アルミニウム化合物と不可避不純物からなることを特徴とする請求項1〜5のいずれかに記載の工具用表面被覆高硬度材料。
- 前記被覆膜の合計の膜厚が0.1μm以上0.5μm未満であることを特徴とする請求項1〜6のいずれかに記載の工具用表面被覆高硬度材料。
- 前記工具用表面被覆高硬度材料の用途が、焼入れ鋼の高精度加工用工具であることを特徴とする請求項1〜7のいずれかに記載の工具用表面被覆高硬度材料。ここで高精度加工とは送り量0.08mm/rev以下の加工のことである。
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