JP4695925B2 - シールド集積回路プローブ - Google Patents
シールド集積回路プローブ Download PDFInfo
- Publication number
- JP4695925B2 JP4695925B2 JP2005174467A JP2005174467A JP4695925B2 JP 4695925 B2 JP4695925 B2 JP 4695925B2 JP 2005174467 A JP2005174467 A JP 2005174467A JP 2005174467 A JP2005174467 A JP 2005174467A JP 4695925 B2 JP4695925 B2 JP 4695925B2
- Authority
- JP
- Japan
- Prior art keywords
- housing
- connector assembly
- contact
- spring
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0441—Details
- G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0483—Sockets for unleaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measuring Leads Or Probes (AREA)
- Details Of Connecting Devices For Male And Female Coupling (AREA)
- Connecting Device With Holders (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/870,108 US6937045B2 (en) | 2002-07-18 | 2004-06-17 | Shielded integrated circuit probe |
| US10/870,108 | 2004-06-17 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006004932A JP2006004932A (ja) | 2006-01-05 |
| JP2006004932A5 JP2006004932A5 (https=) | 2010-07-29 |
| JP4695925B2 true JP4695925B2 (ja) | 2011-06-08 |
Family
ID=34937506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005174467A Expired - Fee Related JP4695925B2 (ja) | 2004-06-17 | 2005-06-15 | シールド集積回路プローブ |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6937045B2 (https=) |
| EP (1) | EP1607749B1 (https=) |
| JP (1) | JP4695925B2 (https=) |
| DE (1) | DE602005006667D1 (https=) |
Families Citing this family (65)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6232789B1 (en) | 1997-05-28 | 2001-05-15 | Cascade Microtech, Inc. | Probe holder for low current measurements |
| US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
| US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
| US6578264B1 (en) | 1999-06-04 | 2003-06-17 | Cascade Microtech, Inc. | Method for constructing a membrane probe using a depression |
| US6838890B2 (en) | 2000-02-25 | 2005-01-04 | Cascade Microtech, Inc. | Membrane probing system |
| DE10143173A1 (de) | 2000-12-04 | 2002-06-06 | Cascade Microtech Inc | Wafersonde |
| US7355420B2 (en) | 2001-08-21 | 2008-04-08 | Cascade Microtech, Inc. | Membrane probing system |
| EP1509776A4 (en) | 2002-05-23 | 2010-08-18 | Cascade Microtech Inc | PROBE TO TEST ANY TESTING EQUIPMENT |
| US6724205B1 (en) | 2002-11-13 | 2004-04-20 | Cascade Microtech, Inc. | Probe for combined signals |
| US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
| CN2682641Y (zh) * | 2003-11-20 | 2005-03-02 | 上海莫仕连接器有限公司 | 压接式导电端子 |
| WO2005065258A2 (en) | 2003-12-24 | 2005-07-21 | Cascade Microtech, Inc. | Active wafer probe |
| KR101157449B1 (ko) | 2004-07-07 | 2012-06-22 | 캐스케이드 마이크로테크 인코포레이티드 | 멤브레인 서스펜디드 프로브를 구비한 프로브 헤드 |
| KR20070058522A (ko) | 2004-09-13 | 2007-06-08 | 캐스케이드 마이크로테크 인코포레이티드 | 양측 프루빙 구조 |
| WO2006062911A1 (en) * | 2004-12-08 | 2006-06-15 | K & S Interconnect, Inc. | Test socket and method for making |
| US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
| US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
| JP4304189B2 (ja) * | 2005-04-20 | 2009-07-29 | エスペック株式会社 | Icソケット |
| JP4757531B2 (ja) * | 2005-04-28 | 2011-08-24 | 日本発條株式会社 | 導電性接触子ホルダおよび導電性接触子ユニット |
| FR2887034A1 (fr) * | 2005-06-08 | 2006-12-15 | Wan Chuan Chou | Sonde integree et procede de transmission d'un signal au travers |
| US7449899B2 (en) | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
| EP1932003A2 (en) | 2005-06-13 | 2008-06-18 | Cascade Microtech, Inc. | Wideband active-passive differential signal probe |
| US7154286B1 (en) * | 2005-06-30 | 2006-12-26 | Interconnect Devices, Inc. | Dual tapered spring probe |
| TWM289241U (en) * | 2005-10-07 | 2006-04-01 | Lotes Co Ltd | Electric connector |
| TWI280372B (en) * | 2006-02-08 | 2007-05-01 | Wistron Corp | Test apparatus for holding signal terminals |
| US7609077B2 (en) | 2006-06-09 | 2009-10-27 | Cascade Microtech, Inc. | Differential signal probe with integral balun |
| US7443186B2 (en) | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
| US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
| US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
| US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
| US7362118B2 (en) * | 2006-08-25 | 2008-04-22 | Interconnect Devices, Inc. | Probe with contact ring |
| KR100769891B1 (ko) * | 2007-01-25 | 2007-10-24 | 리노공업주식회사 | 검사용 탐침 장치 및 이를 이용한 검사용 소켓 |
| US7479794B2 (en) * | 2007-02-28 | 2009-01-20 | Sv Probe Pte Ltd | Spring loaded probe pin assembly |
| US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
| JP5008582B2 (ja) * | 2008-02-04 | 2012-08-22 | 株式会社ヨコオ | コンタクトプローブ |
| US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
| US8410806B2 (en) | 2008-11-21 | 2013-04-02 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
| JP4900843B2 (ja) | 2008-12-26 | 2012-03-21 | 山一電機株式会社 | 半導体装置用電気接続装置及びそれに使用されるコンタクト |
| US7874880B2 (en) * | 2009-02-26 | 2011-01-25 | Ironwood Electronics, Inc. | Adapter apparatus with sleeve spring contacts |
| JP5197754B2 (ja) * | 2009-11-13 | 2013-05-15 | テスト ツーリング ソリューションズ グループ ピイ ティ イー リミテッド | プローブピン |
| JP5162621B2 (ja) | 2010-05-07 | 2013-03-13 | 日本発條株式会社 | 温度調節装置、冷却装置、及び温度調節装置の製造方法 |
| TWI416134B (zh) * | 2010-08-11 | 2013-11-21 | Chipsip Technology Co Ltd | 測試裝置 |
| DE202011001670U1 (de) * | 2011-01-18 | 2011-03-31 | Ingun Prüfmittelbau Gmbh | Hochfrequenz-Prüfstift Vorrichtung |
| CN102608429A (zh) * | 2011-01-19 | 2012-07-25 | 昆山万正电路板有限公司 | 平面变压器电感测试模具 |
| TW201231977A (en) * | 2011-01-20 | 2012-08-01 | Pleader Yamaichi Co Ltd | Structure of high-frequency vertical spring plate probe card |
| US9373900B2 (en) | 2011-07-19 | 2016-06-21 | Nhk Spring Co., Ltd. | Contact structure unit |
| EP2765427B1 (en) * | 2011-10-07 | 2016-12-07 | NHK Spring Co., Ltd. | Probe unit |
| TWI449918B (zh) * | 2012-03-16 | 2014-08-21 | Choice Sun Technology Co Ltd | 測試用探針裝置 |
| KR101439342B1 (ko) | 2013-04-18 | 2014-09-16 | 주식회사 아이에스시 | 포고핀용 탐침부재 |
| KR101439343B1 (ko) * | 2013-04-18 | 2014-09-16 | 주식회사 아이에스시 | 포고핀용 탐침부재 |
| TWI510788B (zh) * | 2014-01-13 | 2015-12-01 | Taiwan Elite Nano Technology Corp | 探針結構及其製造方法 |
| KR200473045Y1 (ko) * | 2014-01-17 | 2014-06-27 | (주)에스피에스 | 이중접점스위치 및 이중접점스위치를 갖는 마그네틱 커넥터 |
| US10274515B1 (en) * | 2015-08-07 | 2019-04-30 | Johnstech International Corporation | Waveguide integrated testing |
| US20170146568A1 (en) * | 2015-11-19 | 2017-05-25 | WinWay Tech. Co., Ltd. | Electronic test equipment |
| TWI579568B (zh) * | 2016-04-12 | 2017-04-21 | 致茂電子股份有限公司 | 具下壓頭與承載座基板卡固機構之電子元件檢測設備 |
| KR101954086B1 (ko) * | 2017-11-07 | 2019-03-06 | 리노공업주식회사 | 검사 프로브 조립체 및 검사 소켓 |
| DE102018123995A1 (de) * | 2018-09-28 | 2020-04-02 | Knorr-Bremse Systeme für Nutzfahrzeuge GmbH | Kontaktiereinrichtung zum elektrischen Kontaktieren einer Leiterplatte mit einem Spulenkörper für ein Magnetventil für eine Bremseinrichtung für ein Fahrzeug, Magnetventil mit einer Kontaktiereinrichtung und Verfahren zum Herstellen einer Kontaktiereinrichtung |
| KR102202295B1 (ko) * | 2019-08-29 | 2021-01-13 | 주식회사 피에스개발 | 테스트 소켓용 이형 스프링 어셈블리 및 이를 갖는 테스트 소켓 |
| US11121511B1 (en) * | 2020-03-16 | 2021-09-14 | TE Connectivity Services Gmbh | Electrical connector with shielding gasket |
| JP7602112B2 (ja) * | 2020-11-17 | 2024-12-18 | 山一電機株式会社 | 検査用ソケット |
| CN113447679B (zh) * | 2021-08-30 | 2021-12-07 | 杭州长川科技股份有限公司 | 用于电子元件的测试装置及测试系统 |
| CN115882286A (zh) * | 2021-09-27 | 2023-03-31 | 史密斯互连美洲公司 | 用于同轴测试插座和印刷电路板接口的系统和方法 |
| TWI806575B (zh) * | 2022-04-27 | 2023-06-21 | 中華精測科技股份有限公司 | 探針插座結構的製作方法 |
| US12476227B2 (en) | 2022-08-19 | 2025-11-18 | Google Llc | Socket to support high performance multi-die ASICs |
| CN117750742A (zh) * | 2022-09-13 | 2024-03-22 | 锐捷网络股份有限公司 | 屏蔽式连接结构及散热器 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH627282A5 (en) * | 1978-05-02 | 1981-12-31 | Feinmetall Gmbh | Spring-loaded contact module for measuring and test purposes |
| DE3340431C2 (de) * | 1983-11-09 | 1985-12-19 | Feinmetall Gmbh, 7033 Herrenberg | Gefederter Kontaktstift für Prüfzwecke |
| JPS6427170A (en) * | 1987-07-22 | 1989-01-30 | Nippon Denshi Zairyo Kk | Electromagnetically shielded socket for probe card |
| JPS6430458A (en) * | 1987-07-22 | 1989-02-01 | Mitsubishi Electric Corp | Three-phase ac phase controller |
| DE3832410C2 (de) * | 1987-10-09 | 1994-07-28 | Feinmetall Gmbh | Kontaktvorrichtung |
| JPH09260000A (ja) * | 1996-03-22 | 1997-10-03 | Toudai Musen Kk | コンタクトプローブおよびコンタクトプローブ取付用ソケット |
| JP3243201B2 (ja) * | 1997-05-09 | 2002-01-07 | 株式会社ヨコオ | スプリングコネクタおよび該スプリングコネクタを用いた装置 |
| JP4124520B2 (ja) * | 1998-07-30 | 2008-07-23 | 日本発条株式会社 | 導電性接触子のホルダ及びその製造方法 |
| JP3742742B2 (ja) * | 2000-03-15 | 2006-02-08 | 株式会社エンプラス | 電気部品用ソケット |
| JP2001326048A (ja) * | 2000-05-19 | 2001-11-22 | S Ii R:Kk | Ic用ソケット |
| JP2002107408A (ja) * | 2000-09-28 | 2002-04-10 | Toshiba Corp | Bga用高周波ソケット |
| US6844749B2 (en) * | 2002-07-18 | 2005-01-18 | Aries Electronics, Inc. | Integrated circuit test probe |
-
2004
- 2004-06-17 US US10/870,108 patent/US6937045B2/en not_active Expired - Fee Related
-
2005
- 2005-06-15 JP JP2005174467A patent/JP4695925B2/ja not_active Expired - Fee Related
- 2005-06-16 DE DE602005006667T patent/DE602005006667D1/de not_active Expired - Lifetime
- 2005-06-16 EP EP05013012A patent/EP1607749B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1607749A2 (en) | 2005-12-21 |
| US6937045B2 (en) | 2005-08-30 |
| JP2006004932A (ja) | 2006-01-05 |
| EP1607749A3 (en) | 2006-05-31 |
| EP1607749B1 (en) | 2008-05-14 |
| US20040232934A1 (en) | 2004-11-25 |
| DE602005006667D1 (de) | 2008-06-26 |
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