JP4693813B2 - ノズルプレートの製造方法 - Google Patents
ノズルプレートの製造方法 Download PDFInfo
- Publication number
- JP4693813B2 JP4693813B2 JP2007154875A JP2007154875A JP4693813B2 JP 4693813 B2 JP4693813 B2 JP 4693813B2 JP 2007154875 A JP2007154875 A JP 2007154875A JP 2007154875 A JP2007154875 A JP 2007154875A JP 4693813 B2 JP4693813 B2 JP 4693813B2
- Authority
- JP
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- Prior art keywords
- repellent film
- water repellent
- nozzle
- hole
- current density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000004519 manufacturing process Methods 0.000 title claims description 35
- 239000005871 repellent Substances 0.000 claims description 118
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 84
- 230000002940 repellent Effects 0.000 claims description 83
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 82
- 239000011347 resin Substances 0.000 claims description 62
- 229920005989 resin Polymers 0.000 claims description 62
- 229910052759 nickel Inorganic materials 0.000 claims description 41
- 238000009713 electroplating Methods 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 13
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000004323 axial length Effects 0.000 description 33
- 239000000976 ink Substances 0.000 description 30
- 239000000758 substrate Substances 0.000 description 23
- 230000002093 peripheral effect Effects 0.000 description 12
- 238000007747 plating Methods 0.000 description 9
- 230000005764 inhibitory process Effects 0.000 description 8
- 230000005499 meniscus Effects 0.000 description 8
- 230000002265 prevention Effects 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 230000032258 transport Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1606—Coating the nozzle area or the ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1625—Manufacturing processes electroforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Nozzles (AREA)
Description
1 基板(導電性板状部材)
1a 吐出面(第1の面)
1b 裏面(第2の面)
2 ノズル孔
2c 吐出口(一方の開口)
3 撥水膜
3a 貫通孔
3b 拡径部
3c ストレート部
6 ニッケル膜
x 拡径部の軸方向長さ
Claims (4)
- 液体を吐出するノズル孔が形成されたノズルプレートの製造方法であって、
前記ノズルプレートとなる非透光性の導電性板状部材に、これを厚み方向に貫通する前記ノズル孔を形成するノズル孔形成工程と、
前記ノズル孔の吐出口となる一方の開口が形成された前記導電性板状部材の第1の面を光硬化性樹脂で被覆すると共に、前記ノズル孔内の前記一方の開口に連続した領域を前記光硬化性樹脂で充填する光硬化性樹脂充填工程と、
前記ノズル孔の他方の開口が形成された前記導電性板状部材の第2の面から前記第1の面に向かう方向の光を前記導電性板状部材に照射することによって、前記ノズル孔内と、前記第2の面から前記第1の面に向かう方向に沿って前記一方の開口と重なる前記ノズル孔外の範囲内とにある前記光硬化性樹脂が硬化した硬化樹脂部を形成する硬化工程と、
前記硬化工程後に、前記光硬化性樹脂の未硬化部を除去する未硬化部除去工程と、
前記未硬化部除去工程後に、前記硬化樹脂部をマスクとして、電解メッキによって前記第1の面に撥水膜を形成する撥水膜形成工程と、
前記撥水膜形成工程後に、前記硬化樹脂部を除去する硬化樹脂部除去工程とを備えており、
前記撥水膜形成工程において、前記ノズル孔に連通するように前記撥水膜に形成される貫通孔が、前記ノズル孔に連続しており且つ前記吐出口と同じ径を有するストレート部と、前記ストレート部を挟んで前記ノズル孔とは反対側にあって前記ストレート部から離れるに連れて拡径した拡径部とから構成されるように、前記電解メッキの電流密度を調整すると共に、第1の電流密度を経て前記第1の電流密度よりも低い0.5A/dm 2 以上2A/dm 2 以下の第2の電流密度により前記撥水膜を形成することを特徴とするノズルプレートの製造方法。 - 前記導電性板状部材がステンレス鋼からなり、
前記撥水膜形成工程の前に、前記導電性板状部材の前記第1の面に前記撥水膜よりも薄いニッケル膜を形成するニッケル膜形成工程を含み、
前記撥水膜形成工程において、前記ニッケル膜上に前記撥水膜を形成することを特徴とする請求項1に記載のノズルプレートの製造方法。 - 前記ニッケル膜形成工程において、前記ニッケル膜を電解メッキによって形成することを特徴とする請求項2に記載のノズルプレートの製造方法。
- 前記撥水膜形成工程において、前記吐出面と平行に延在すると共に前記ストレート部が開口した第3の面、及び、前記第3の面から前記貫通孔の中心軸に沿って離隔し且つ前記第3の面と平行に延在すると共に前記拡径部が開口した第4の面を有するように、前記撥水膜を形成することを特徴とする請求項1〜3のいずれか一項に記載のノズルプレートの製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007154875A JP4693813B2 (ja) | 2007-06-12 | 2007-06-12 | ノズルプレートの製造方法 |
CN2008101094513A CN101323206B (zh) | 2007-06-12 | 2008-06-12 | 喷嘴板及制造喷嘴板的方法 |
US12/138,390 US20080309717A1 (en) | 2007-06-12 | 2008-06-12 | Nozzle plate and the method of manufacturing the same |
US13/154,332 US8551351B2 (en) | 2007-06-12 | 2011-06-06 | Method of manufacturing nozzle plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007154875A JP4693813B2 (ja) | 2007-06-12 | 2007-06-12 | ノズルプレートの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008307694A JP2008307694A (ja) | 2008-12-25 |
JP4693813B2 true JP4693813B2 (ja) | 2011-06-01 |
Family
ID=40131878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007154875A Active JP4693813B2 (ja) | 2007-06-12 | 2007-06-12 | ノズルプレートの製造方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US20080309717A1 (ja) |
JP (1) | JP4693813B2 (ja) |
CN (1) | CN101323206B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BR112013021797B1 (pt) | 2011-02-28 | 2020-12-29 | Nitto Denko Corporation | filtro permeável a gás fornecido com repelência de óleo |
US9630411B2 (en) | 2011-04-27 | 2017-04-25 | Koninklijke Philips N.V. | Method of improving the yield of a nozzle plate fabrication process |
CN104204050B (zh) * | 2012-04-06 | 2019-01-29 | 日东电工株式会社 | 赋予了拒油性的透气片 |
CN103866291B (zh) * | 2012-12-18 | 2017-02-08 | 中微半导体设备(上海)有限公司 | 一种耐腐蚀的气体喷淋头及其制作方法 |
US10189253B2 (en) * | 2016-09-28 | 2019-01-29 | Canon Kabushiki Kaisha | Liquid ejection head and method for producing the same |
JP7001099B2 (ja) | 2017-09-20 | 2022-01-19 | コニカミノルタ株式会社 | インクジェットヘッドの製造方法、インクジェットヘッド及びインクジェット記録装置 |
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JP3169032B2 (ja) * | 1993-02-25 | 2001-05-21 | セイコーエプソン株式会社 | ノズルプレートとその表面処理方法 |
US6109728A (en) * | 1995-09-14 | 2000-08-29 | Ricoh Company, Ltd. | Ink jet printing head and its production method |
JPH11302895A (ja) | 1998-04-20 | 1999-11-02 | Japan Steel Works Ltd:The | 筒体内面のめっき方法及び内面をめっき施工された筒体 |
JP4015274B2 (ja) | 1998-05-19 | 2007-11-28 | シチズンホールディングス株式会社 | インクジェットヘッド用ノズル板の製造方法 |
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US6592206B1 (en) * | 1999-10-22 | 2003-07-15 | Toshiba Tec Kabushiki Kaisha | Print head and manufacturing method thereof |
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KR100552660B1 (ko) * | 2001-08-09 | 2006-02-20 | 삼성전자주식회사 | 버블 젯 방식의 잉크 젯 프린트 헤드 |
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-
2007
- 2007-06-12 JP JP2007154875A patent/JP4693813B2/ja active Active
-
2008
- 2008-06-12 US US12/138,390 patent/US20080309717A1/en not_active Abandoned
- 2008-06-12 CN CN2008101094513A patent/CN101323206B/zh not_active Expired - Fee Related
-
2011
- 2011-06-06 US US13/154,332 patent/US8551351B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US8551351B2 (en) | 2013-10-08 |
CN101323206B (zh) | 2010-12-15 |
JP2008307694A (ja) | 2008-12-25 |
CN101323206A (zh) | 2008-12-17 |
US20080309717A1 (en) | 2008-12-18 |
US20110236590A1 (en) | 2011-09-29 |
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