JP4686321B2 - Iii族窒化物マルチチャンネルヘテロ接合インターデジタル整流器 - Google Patents
Iii族窒化物マルチチャンネルヘテロ接合インターデジタル整流器 Download PDFInfo
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- JP4686321B2 JP4686321B2 JP2005288548A JP2005288548A JP4686321B2 JP 4686321 B2 JP4686321 B2 JP 4686321B2 JP 2005288548 A JP2005288548 A JP 2005288548A JP 2005288548 A JP2005288548 A JP 2005288548A JP 4686321 B2 JP4686321 B2 JP 4686321B2
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- 239000004065 semiconductor Substances 0.000 claims description 48
- 239000010410 layer Substances 0.000 claims description 29
- 150000004767 nitrides Chemical class 0.000 claims description 28
- 230000004888 barrier function Effects 0.000 claims description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 14
- 229910002704 AlGaN Inorganic materials 0.000 claims description 11
- 239000011241 protective layer Substances 0.000 claims description 11
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 229910052594 sapphire Inorganic materials 0.000 claims description 2
- 239000010980 sapphire Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000000137 annealing Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910008599 TiW Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/201—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
- H01L29/205—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys in different semiconductor regions, e.g. heterojunctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Description
22 オーミック電極
28 基板
30 バッファ層
32、33 ヘテロ接合
34 保護層
36 フィールドプレート
Claims (23)
- 第1の障壁層及び第1の抵抗層を有する第1のIII族窒化物ヘテロ接合と、
該第1のIII族窒化物ヘテロ接合上に配置され、第2の障壁層及び第2の抵抗層を有する第2のIII族窒化物ヘテロ接合と、
該第2のIII族窒化物ヘテロ接合と直接ショットキーコンタクトした第1電極と、
前記第2のIII族窒化物ヘテロ接合と直接オーミックコンタクトし、前記第1電極から離隔された第2電極と、を有する電力半導体装置。 - 前記それぞれのヘテロ接合は、InAlGaNの合金からなる第1のIII族窒化物半導体と、異なるInAlGaNの合金からなる第2のIII族窒化物半導体と、を有することを特徴とする請求項1に記載の電力半導体装置。
- 前記第1の半導体はAlGaNからなり、前記第2の半導体はGaNからなることを特徴とする請求項2に記載の電力半導体装置。
- 前記第2の半導体はドーピングされていないことを特徴とする請求項2に記載の半導体装置。
- バッファ層と基板とをさらに有し、前記バッファ層は、前記第1のIII族窒化物ヘテロ接合と前記基板との間に配置されていることを特徴とする請求項1に記載の電力半導体装置。
- 前記バッファ層はAlNからなることを特徴とする請求項5に記載の電力半導体装置。
- 前記基板はSi、SiC、又は、サファイアからなることを特徴とする請求項5に記載の電力半導体装置。
- III族窒化物の材料からなる基板を有することを特徴とする請求項1に記載の電力半導体装置。
- 前記基板は、GaNからなることを特徴とする請求項8に記載の電力半導体装置。
- 前記第1のIII族窒化物ヘテロ接合は、InAlGaNの合金からなる第1のIII族窒化物半導層と、前記第1のIII族窒化物半導層下に配置され、異なるInAlGaNの合金からなるドーピングされていない第2のIII族窒化物半導層と、前記第2のIII族窒化物半導層下に配置されたバッファ層と、を有することを特徴とする請求項1に記載の電力半導体装置。
- 前記バッファ層はAlNからなることを特徴とする請求項10に記載の電力半導体装置。
- 前記ドーピングされていない第2のIII族窒化物半導体は、GaNからなることを特徴とする請求項10に記載の電力半導体装置。
- 前記第1のIII族窒化物半導体はAlGaNからなることを特徴とする請求項12に記載の電力半導体装置。
- 前記第2のIII族窒化物ヘテロ接合上に配置された保護層をさらに有することを特徴とする請求項1に記載の電力半導体装置。
- 前記第1電極は第1給電部に接続され、前記第2電極は第2給電部に接続されることを特徴とする請求項1に記載の電力半導体装置。
- 前記第1電極と前記第2電極は、かみ合うように配置されたことを特徴とする請求項1に記載の電力半導体装置。
- 前記保護層は窒素の外方拡散を防止することを特徴とする請求項14に記載の電力半導体装置。
- 前記保護層は窒化物を含むことを特徴とする請求項14に記載の電力半導体装置。
- 前記保護層は、AlN、HfN、AlGaN、高濃度ドーピングのGaN、高濃度ドーピングのポリガリウム窒素、及び、低圧化学蒸着法で形成されたSi3N4のうち少なくとも1つからなることを特徴とする請求項14に記載の電力半導体装置。
- 前記第1電極と前記第2のIII族窒化物ヘテロ接合との間に挿入されたドーピングされたIII族窒化層を有することを特徴とする請求項1に記載の電力半導体装置。
- 前記第1電極に接続されさらに前記第2電極に接続されたドーピングされたIII族窒化層を有することを特徴とする請求項1に記載の電力半導体装置。
- 前記ドーピングされたIII族窒化層は、GaNからなることを特徴とする請求項20に記載の電力半導体装置。
- 前記ドーピングされたIII族窒化層は、GaNからなることを特徴とする請求項21に記載の電力半導体装置。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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US61467504P | 2004-09-30 | 2004-09-30 | |
US60/614,675 | 2004-09-30 | ||
US11/238,206 US8441030B2 (en) | 2004-09-30 | 2005-09-29 | III-nitride multi-channel heterojunction interdigitated rectifier |
US11/238,206 | 2005-09-29 |
Publications (2)
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JP2006108676A JP2006108676A (ja) | 2006-04-20 |
JP4686321B2 true JP4686321B2 (ja) | 2011-05-25 |
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JP2005288548A Active JP4686321B2 (ja) | 2004-09-30 | 2005-09-30 | Iii族窒化物マルチチャンネルヘテロ接合インターデジタル整流器 |
Country Status (3)
Country | Link |
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US (3) | US8441030B2 (ja) |
JP (1) | JP4686321B2 (ja) |
DE (1) | DE102005048102B4 (ja) |
Cited By (1)
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WO2020010253A1 (en) * | 2018-07-06 | 2020-01-09 | Analog Devices, Inc. | Compound device with back-side field plate |
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CN111477690B (zh) * | 2020-04-02 | 2021-05-07 | 西安电子科技大学 | 基于P-GaN帽层和叉指结构的横向肖特基二极管及其制备方法 |
CN111430457A (zh) * | 2020-04-27 | 2020-07-17 | 华南理工大学 | 一种硅衬底上GaN/二维AlN异质结整流器及其制备方法 |
CN111934566A (zh) * | 2020-08-20 | 2020-11-13 | 西安电子科技大学 | 多氮化镓肖特基二极管串并联结构的大功率微波整流电路 |
CN112768512A (zh) * | 2021-01-13 | 2021-05-07 | 西安电子科技大学 | 基于凹槽阳极结构的AlGaN基双沟道肖特基二极管及制备方法 |
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2005
- 2005-09-29 US US11/238,206 patent/US8441030B2/en active Active
- 2005-09-30 DE DE102005048102A patent/DE102005048102B4/de active Active
- 2005-09-30 JP JP2005288548A patent/JP4686321B2/ja active Active
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2013
- 2013-05-09 US US13/891,080 patent/US8742450B2/en active Active
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2014
- 2014-05-29 US US14/290,811 patent/US20140264373A1/en not_active Abandoned
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JPS5929456A (ja) * | 1982-08-12 | 1984-02-16 | Nec Corp | 半導体装置 |
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JP2001358075A (ja) * | 2000-06-16 | 2001-12-26 | Univ Meijo | 半導体素子の製造方法及び半導体素子 |
JP2003133332A (ja) * | 2001-10-24 | 2003-05-09 | Shin Etsu Handotai Co Ltd | 化合物半導体素子 |
JP2004031896A (ja) * | 2002-04-30 | 2004-01-29 | Furukawa Electric Co Ltd:The | GaN系半導体装置およびIII−V族窒化物半導体装置 |
JP2004055627A (ja) * | 2002-07-17 | 2004-02-19 | Nippon Inter Electronics Corp | 横型トレンチ構造を有するショットキー・バリア・ダイオード及びその製造方法 |
Cited By (2)
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KR20150072580A (ko) * | 2013-12-20 | 2015-06-30 | 엘지이노텍 주식회사 | 전력 반도체 소자 및 이를 포함하는 전력 반도체 회로 |
KR102170211B1 (ko) | 2013-12-20 | 2020-10-26 | 엘지이노텍 주식회사 | 전력 반도체 소자 및 이를 포함하는 전력 반도체 회로 |
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US8441030B2 (en) | 2013-05-14 |
JP2006108676A (ja) | 2006-04-20 |
US20130240911A1 (en) | 2013-09-19 |
US20060065908A1 (en) | 2006-03-30 |
DE102005048102B4 (de) | 2013-03-07 |
DE102005048102A1 (de) | 2006-05-11 |
US8742450B2 (en) | 2014-06-03 |
US20140264373A1 (en) | 2014-09-18 |
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