JP4685884B2 - パワー半導体アセンブリ - Google Patents
パワー半導体アセンブリ Download PDFInfo
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- JP4685884B2 JP4685884B2 JP2007555474A JP2007555474A JP4685884B2 JP 4685884 B2 JP4685884 B2 JP 4685884B2 JP 2007555474 A JP2007555474 A JP 2007555474A JP 2007555474 A JP2007555474 A JP 2007555474A JP 4685884 B2 JP4685884 B2 JP 4685884B2
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- semiconductor chip
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- semiconductor
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Description
11、11a〜c 第1半導体チップの第1主接続部
12、12a〜c 第1半導体チップの第2主接続部
13、13a〜c 第1半導体チップの制御接続部
20、20a〜c 第2半導体チップ
21、21a〜c 第2半導体チップの第1主接続部
22、22a〜c 第2半導体チップの第2主接続部
23、23a〜c 第2半導体チップの制御接続部
30、30a〜c 第1ダイオード
31、31a〜c 第1ダイオードのカソード
32、32a〜c 第1ダイオードのアノード
40、40a〜c 第2ダイオード
41、41a〜c 第2ダイオードのカソード
42、42a〜c 第2ダイオードのアノード
50 支持体
51 支持体の第1面
52 支持体の第2面
60 パターン化された金属層
61 パターン化された金属層の第1部分
62 パターン化された金属層の第2部分
63 パターン化された金属層の第3部分
64 パターン化された金属層の第4部分
65 金属層の第5部分
66 金属層の第6部分
67 金属層
70 放熱板
71、71a〜c 第1コンタクト用接続部(負荷接続部)
72 第2コンタクト用接続部
73 第3コンタクト用接続部
74 第1金属薄膜
75 第2金属薄膜
76 第3金属薄膜
77 ボンディングワイヤ
78 ボンディングワイヤ
79 はんだ
80 絶縁薄膜
81 第1駆動回路
82 第2駆動回路
83 複合駆動回路
84 ボンディングワイヤ
85 正の駆動信号
86 負の駆動信号
87 ボンディングワイヤ
88 ボンディングワイヤ
89 ハウジング
90 駆動ユニット(トランス)
90´ 駆動ユニット(フォトカプラ)
90a XXX
90b 第一次コイル
90c 第二次コイル
91 第1電流センサ
92 第2電流センサ
93 第3電流センサ
99 電圧供給ユニット
100 負荷
105a〜c 駆動電子ユニット
110 制御電子ユニット
120 監視電子ユニット
130a ダイオード
130b ダイオード
130c ダイオード
140a ダイオード
140b ダイオード
140c ダイオード
205a〜c 駆動電子ユニット
210 制御電子ユニット
230a〜c サイリスタ(第1半導体チップ)
231a〜c アノード(第2主接続部)
232a〜c カソード(第1主接続部)
233a〜c ゲート(制御接続部)
240a〜c サイリスタ(第2半導体チップ)
241a〜c アノード(第2主接続部)
242a〜c カソード(第1主接続部)
243a〜c ゲート(制御接続部)
171a〜c 電源供給システム電圧の接続部
t 時間
C 結合容量
C0 コンデンサ
N 電源供給システム
G 整流器
U1+ ハーフブリッジの正の供給電圧
U1− ハーフブリッジの負の供給電圧
U10 ブリッジの基準電位
U2+ 駆動ユニットの正の供給電圧
U2− 駆動ユニットの負の供給電圧
U20 駆動ユニットの基準電位
UE 入力電圧偏差
UL 負荷接続部における電位
US1、US2、US 駆動回路の出力電圧
ΔUS1、ΔUS2 制御電圧
ΔUS 制御電圧
Δtd デッドタイム
W インバータ
I 上流側ハーフブリッジ枝部
II 下流側ハーフブリッジ枝部
Claims (27)
- 支持体(50)と、第1半導体チップ(10)と、第2半導体チップ(20)とを有するパワー半導体アセンブリであって、
上記第1半導体チップ(10)は、第1主接続部(11)および第2主接続部(12)を上記第1半導体チップ(10)の互いに向かい合う各面にそれぞれ配置されて有し、
上記第2半導体チップ(20)は、第1主接続部(21)および第2主接続部(22)を上記第2半導体チップ(20)の互いに向かい合う各面にそれぞれ配置されて有し、
上記支持体(50)は、パターン化された金属層(60)が設けられた第1面(51)を有し、上記第1面(51)は、第1部分(61)と上記第1部分(61)から間隔を空けた第2部分(62)とを備え、
上記第1半導体チップ(10)は、上記支持体(50)の第1面(51)上に配置され、上記第1半導体チップ(10)の第2主接続部(12)を介して第1部分(61)に機械的および導電的に接続されており、
上記第2半導体チップ(20)は、上記支持体(50)の第1面(51)上に配置され、上記第2半導体チップ(20)の第2主接続部(22)を介して第2部分(62)に機械的および導電的に接続されており、
上記第1半導体チップ(10)の第1主接続部(11)と、上記第2半導体チップ(20)の第1主接続部(21)とは、互いに導電的に接続されており、外部の負荷(100)または外部の供給電圧に接続するために備えられた第1コンタクト用接続部(71)とも導電的に接続されており、
上記第1半導体チップ(10)および上記第2半導体チップ(20)はハーフブリッジを形成し、
第1半導体チップ(10)の第1主接続部(11)および第2半導体チップ(20)の第1主接続部(21)は互いに導電的に接続されており、
上記第1半導体チップ(10)の制御入力部(13)を駆動するための第1駆動回路(81)、および、
上記第2半導体チップ(20)の制御入力部(23)を駆動するための第2駆動回路(82)を含み、
上記第1駆動回路(81)および上記第2駆動回路(82)は、上記第1半導体チップ(10)の第1主接続部(11)と、上記第2半導体チップ(20)の第1主接続部(21)とに導電的に接続されている、パワー半導体アセンブリ。 - 上記支持体(50)の第1面(51)に向かい合う第2面(52)が、金属体(70)に対し、伝熱的に接触している、請求項1に記載のパワー半導体アセンブリ。
- 上記金属体(70)は、放熱板、蓄熱器、金属板、または、金属薄膜として形成されている、請求項2に記載のパワー半導体アセンブリ。
- 上記金属体は接地されている、請求項2または3に記載のパワー半導体アセンブリ。
- 正の供給電圧(U1+)に接続するために設けられている第2コンタクト用接続部(72)と、
負の供給電圧(U1−)に接続するために設けられている第3コンタクト用接続部(73)とを有し、
上記第2コンタクト用接続部(72)は、上記第1半導体チップ(10)の第2主接続部(12)に導電的に接続され、
上記第3コンタクト用接続部(73)は、上記第2半導体チップ(20)の第2主接続部(22)に導電的に接続され、
上記第2コンタクト用接続部(72)および上記第3コンタクト用接続部(73)は、上記第1半導体チップ(10)から離れた上記第2半導体チップ(20)の側、または、上記第2半導体チップ(20)から離れた上記第1半導体チップ(10)の側に配置されている、請求項1〜4のいずれか1項に記載のパワー半導体アセンブリ。 - 上記第2コンタクト用接続部(72)から第1コンタクト用接続部(71)までの電流路、および、第1コンタクト用接続部(71)から第3コンタクト用接続部(73)までの電流路は、互いにほぼ逆方向に電流が流れるように設定されている、請求項5に記載のパワー半導体アセンブリ。
- 上記第1半導体チップ(10)は、nチャネル型電界効果トランジスタであり、そのソース端子は第1半導体チップ(10)の上記第1主接続部(11)を構成し、上記nチャネル型電界効果トランジスタのドレイン端子は上記第1半導体チップ(10)の第2主接続部(12)を構成しているか、または、
上記第1半導体チップ(10)は、pチャネル型電界効果トランジスタであり、そのドレイン端子は上記第1半導体チップ(10)の第1主接続部(11)を構成し、上記pチャネル型電界効果トランジスタのソース端子は上記第1半導体チップ(10)の第2主接続部(12)を構成しているか、または、
上記第1半導体チップ(10)は、バイポーラnpn型トランジスタであり、そのエミッタ接続部は上記第1半導体チップ(10)の第1主接続部(11)を構成し、上記バイポーラnpn型トランジスタのコレクタ接続部は上記第1半導体チップ(10)の第2主接続部(12)を構成しているか、または、
上記第1半導体チップ(10)は、バイポーラpnp型トランジスタであり、そのコレクタ接続部は上記第1半導体チップ(10)の第1主接続部(11)を構成し、上記バイポーラpnp型トランジスタのエミッタ接続部は上記第1半導体チップ(10)の第2主接続部(12)を構成しているか、または、
上記第1半導体チップ(10a〜c)は、サイリスタであり、そのカソードは上記第1半導体チップ(10a〜c)の第1主接続部(11a〜c)を構成し、上記サイリスタのアノードは上記第1半導体チップ(10a〜c)の第2主接続部(12a〜c)を構成している、請求項1〜6のいずれか1項に記載のパワー半導体アセンブリ。 - 上記第2半導体チップ(20)は、pチャネル型電界効果トランジスタであり、そのソース端子は上記第2半導体チップ(20)の第1主接続部(21)を構成し、上記pチャネル型電界効果トランジスタのドレイン端子は上記第2半導体チップ(20)の第2主接続部(22)を構成しているか、または、
上記第2半導体チップ(20)は、nチャネル型電界効果トランジスタであり、そのドレイン端子は上記第2半導体チップ(20)の第1主接続部(21)を構成し、上記nチャネル型電界効果トランジスタのソース端子は上記第2半導体チップ(20)の第2主接続部(22)を構成しているか、または、
上記第2半導体チップ(20)は、バイポーラpnp型トランジスタであり、そのエミッタ接続部は第2半導体チップ(20)の第1主接続部(21)を構成し、上記バイポーラpnp型トランジスタのコレクタ接続部は第2半導体チップ(20)の第2主接続部(22)を構成しているか、または、
上記第2半導体チップ(20)は、バイポーラnpn型トランジスタであり、そのコレクタ接続部は上記第2半導体チップ(20)の第1主接続部(21)を構成し、上記バイポーラnpn型トランジスタのエミッタ接続部は上記第2半導体チップ(20)の第2主接続部(22)を構成しているか、または、
上記第2半導体チップ(20a〜c)は、サイリスタであり、そのアノードは上記第2半導体チップ(20a〜c)の第1主接続部(21a〜c)を構成し、上記サイリスタのカソードは上記第2半導体チップ(20a〜c)の第2主接続部(22a〜c)を構成している、請求項1〜7のいずれか1項に記載のパワー半導体アセンブリ。 - 上記第1半導体チップ(10)は、nチャネル型電界効果トランジスタであり、そのソース端子は上記第1半導体チップ(10)の第1主接続部(11)を構成し、上記nチャネル型電界効果トランジスタのドレイン端子は上記第1半導体チップ(10)の第2主接続部(12)を構成しているか、または、
上記第1半導体チップ(10)は、バイポーラnpn型トランジスタであり、そのエミッタ接続部は上記第1半導体チップ(10)の第1主接続部(11)を構成し、上記バイポーラnpn型トランジスタのコレクタ接続部は上記第1半導体チップ(10)の第2主接続部(12)を構成しており、および、
上記第2半導体チップ(20)は、pチャネル型電界効果トランジスタであり、そのソース端子は上記第2半導体チップ(20)の第1主接続部(21)を構成し、上記pチャネル型電界効果トランジスタのドレイン端子は上記第2半導体チップ(20)の第2主接続部(22)を構成しているか、または、
上記第2半導体チップ(20)は、バイポーラpnp型トランジスタであり、そのエミッタ接続部は上記第2半導体チップ(20)の第1主接続部(21)を構成し、上記バイポーラpnp型トランジスタのコレクタ接続部は上記第2半導体チップ(20)の第2主接続部(22)を構成している、請求項1〜6のいずれか1項に記載のパワー半導体アセンブリ。 - 上記第1半導体チップ(10a〜c)は、p型に制御されたサイリスタであり、そのカソードは上記第1半導体チップ(10a〜c)の第1主接続部(11a〜c)を構成し、上記p型に制御されたサイリスタのアノードは上記第1半導体チップ(10a〜c)の第1主接続部(12a〜c)を構成しており、および、
上記第2半導体チップ(20a〜c)は、n型に制御されたサイリスタであり、そのアノードは上記第2半導体チップ(20a〜c)の第1主接続部(21a〜c)を構成し、上記n型に制御された上記サイリスタのカソードは上記第2半導体チップ(20)の第2主接続部(22a〜c)を構成している、請求項1〜8のいずれか1項に記載のパワー半導体アセンブリ。 - 上記第1半導体チップ(10)および/または上記第2半導体チップ(20)は、MOSFETである、請求項7〜9のいずれか1項に記載のパワー半導体アセンブリ。
- 上記第1半導体チップ(10)および/または上記第2半導体チップ(20)は、IGBTである、請求項7〜9のいずれか1項に記載のパワー半導体アセンブリ。
- 上記第1駆動回路(81)および上記第2駆動回路(82)は、上記第1半導体チップ(10)の第1主接続部(11)と、上記第2半導体チップ(20)の第1主接続部(21)との電位(UL)に関連づけられて、それぞれ、上記第1半導体チップ(10)および上記第2半導体チップ(20)を駆動するものである、請求項1〜12のいずれか1項に記載のパワー半導体アセンブリ。
- 第1ダイオード(30、30a〜c)を含み、
上記第1ダイオード(30、30a〜c)のアノード(32、32a〜c)は、上記第1半導体チップ(10)の第1主接続部(11)に導電的に接続され、p型ウェルとして形成されている、請求項1〜13のいずれか1項に記載のパワー半導体アセンブリ。 - 第1ダイオード(30、30a〜c)を含み、
上記第1ダイオード(30、30a〜c)のカソード(31、31a〜c)は、上記第1半導体チップ(10)の第2主接続部(12)に導電的に接続され、n型ウェルとして形成されている、請求項1〜13のいずれか1項に記載のパワー半導体アセンブリ。 - 第2ダイオード(40、40a〜c)を含み、
上記第2ダイオード(40、40a〜c)のアノード(42、42a〜c)は、上記第2半導体チップ(20)の第2主接続部(22)に導電的に接続され、p型ウェルとして形成されている、請求項1〜15のいずれか1項に記載のパワー半導体アセンブリ。 - 第2ダイオード(40、40a〜c)を含み、
上記第2ダイオード(40、40a〜c)のカソード(41、41a〜c)は、上記第2半導体チップ(20)の第1主接続部(21)に導電的に接続され、n型ウェルとして形成されている、請求項1〜15のいずれか1項に記載のパワー半導体アセンブリ。 - 正の供給電圧(U1+)を供給するために設けられた第2コンタクト用接続部(72)、および、負の供給電圧(U1−)を供給するために設けられた第3コンタクト用接続部(73)を含み、
上記第2コンタクト用接続部(72)は、上記第1半導体チップ(10)の第2主接続部(12)に導電的に接続され、
上記第3コンタクト用接続部(73)は、上記第2半導体チップ(20)の第2主接続部(22)に導電的に接続され、
上記第2コンタクト用接続部(72)および上記第3コンタクト用接続部(73)は、上記第1半導体チップ(10)から離れた、上記第2半導体チップ(20)の側、または、上記第2半導体チップ(20)から離れた、上記第1半導体チップ(10)の側に、配置されている、請求項1〜4のいずれか1項に記載のパワー半導体アセンブリ。 - 上記第1半導体チップ(230a〜c)は、n型に制御されたサイリスタであり、そのアノードは、上記第1半導体チップ(230a〜c)の第1主接続部(231a〜c)を構成し、上記n型に制御されたサイリスタのカソードは、上記第1半導体チップ(230a〜c)の第2主接続部(232a〜c)を構成しており、
上記第2半導体チップ(240a〜c)は、p型に制御されたサイリスタであり、そのカソードは、上記第2半導体チップ(240a〜c)の第1主接続部(241a〜c)を構成し、上記p型に制御されたサイリスタのアノードは、上記第2半導体チップ(240a〜c)の第2主接続部(242a〜c)を構成している、請求項1〜4のいずれか1項に記載のパワー半導体アセンブリ。 - 上記ハーフブリッジは、整流器である、請求項19に記載のパワー半導体アセンブリ。
- 単一のトランスを含有する直流−直流コンバータを有し、第1駆動回路(81)および第2駆動回路(82)に接続され、上記第1駆動回路(81)および上記第2駆動回路(82)に電圧を供給するために設けられた電圧供給ユニット(99)を含む、請求項1または20に記載のパワー半導体アセンブリ。
- 一次側と、上記一次側から電気的に絶縁している二次側とを有する駆動ユニット(90)を含み、
上記二次側は、上記第1駆動回路(81)の入力部、および、上記第2駆動回路(82)の入力部に導電的に接続されている、請求項1、20または21に記載のパワー半導体アセンブリ。 - 上記駆動ユニット(90、90´)は、フォトカプラまたはトランスを有する、請求項22に記載のパワー半導体アセンブリ。
- 上記二次側、上記第1駆動回路(81)および上記第2駆動回路(82)は、1つの共通のチップハウジング内、または、1つの共通の集積回路内に配置されている、請求項22または23に記載のパワー半導体アセンブリ。
- 上記第1半導体チップ(10)の第1主接続部(11)および上記第2半導体チップ(20)の第1主接続部(21)は、金属薄膜(75)により導電的に接続されている、請求項3〜24のいずれか1項に記載のパワー半導体アセンブリ。
- さらに、上記第1半導体チップ(10)を保護するために、上記第1半導体チップ(10)の負荷経路に対して並列に逆方向に接続された第1ダイオード(30)と、
上記第2半導体チップ(20)を保護するために、上記第2半導体チップ(20)の負荷経路に対して並列に逆方向に接続された第2ダイオード(40)とを備え、
上記第1半導体チップ(10)および上記第2半導体チップ(20)は、上記第1ダイオード(30)および上記第2ダイオード(40)の間に配置されている、請求項1〜13のいずれか1項に記載のパワー半導体アセンブリ。 - 上記第1半導体チップ(10)および上記第2半導体チップ(20)が、同時にON状態に切り換わることを防止するラッチ回路を含む、請求項1〜26のいずれか1項に記載のパワー半導体アセンブリ。
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Also Published As
Publication number | Publication date |
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US20090016088A1 (en) | 2009-01-15 |
WO2006087065A3 (de) | 2008-02-21 |
JP2008530807A (ja) | 2008-08-07 |
US8472949B2 (en) | 2013-06-25 |
WO2006087065A2 (de) | 2006-08-24 |
DE102005007373A1 (de) | 2006-08-24 |
DE102005007373B4 (de) | 2013-05-29 |
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