JP4682350B2 - 結晶成長方法およびその装置 - Google Patents
結晶成長方法およびその装置 Download PDFInfo
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- JP4682350B2 JP4682350B2 JP2007337890A JP2007337890A JP4682350B2 JP 4682350 B2 JP4682350 B2 JP 4682350B2 JP 2007337890 A JP2007337890 A JP 2007337890A JP 2007337890 A JP2007337890 A JP 2007337890A JP 4682350 B2 JP4682350 B2 JP 4682350B2
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- Prior art keywords
- crystal
- raw material
- material solution
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- growth
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- 238000002109 crystal growth method Methods 0.000 title claims description 10
- 239000013078 crystal Substances 0.000 claims description 311
- 239000002994 raw material Substances 0.000 claims description 150
- 238000000034 method Methods 0.000 claims description 53
- 238000010438 heat treatment Methods 0.000 claims description 37
- 238000002844 melting Methods 0.000 claims description 10
- 230000008018 melting Effects 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 5
- 229910052700 potassium Inorganic materials 0.000 claims description 5
- 239000012535 impurity Substances 0.000 claims description 3
- 229910052744 lithium Inorganic materials 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 2
- 239000010955 niobium Substances 0.000 claims 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 2
- 239000011591 potassium Substances 0.000 claims 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims 1
- 239000000243 solution Substances 0.000 description 109
- 230000007547 defect Effects 0.000 description 21
- 238000004519 manufacturing process Methods 0.000 description 16
- 239000000203 mixture Substances 0.000 description 12
- 238000010899 nucleation Methods 0.000 description 10
- 230000007423 decrease Effects 0.000 description 9
- 239000002244 precipitate Substances 0.000 description 9
- 239000002904 solvent Substances 0.000 description 9
- 125000005587 carbonate group Chemical group 0.000 description 7
- 238000013021 overheating Methods 0.000 description 7
- 230000000007 visual effect Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 5
- 238000001556 precipitation Methods 0.000 description 3
- 238000002791 soaking Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910018068 Li 2 O Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
Images
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- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
2,22 るつぼ台
3,23 均熱管
4,24 ヒータ
5,25 縦型管状炉
6,26 引き上げ軸
7,27 種子結晶
8,28 原料溶液
9,29 成長結晶
10,30 炉体ふた
11 浮遊結晶
31 監視窓
32 レーザ照射装置
33 駆動装置
41 CO2レーザ
42 He-Neレーザ
43 ハーフミラー
44 ミラー
Claims (4)
- 炉内に設置されたるつぼ内の原料溶液に、種子結晶を浸して結晶を育成する結晶成長方法において、
前記種子結晶を前記原料溶液に接触させると同時に、前記原料溶液を冷却し、
結晶の成長過程において、前記原料溶液の表面に析出した浮遊結晶を、可視光レーザにより照射、検出し、前記可視光レーザの光軸上に、加熱用のレーザ光を照射することにより、前記浮遊結晶を溶融することを特徴とする結晶成長方法。 - 前記結晶の成分は、周期率表Ia族とVa族から構成されており、Ia族はリチウム、カリウムの少なくとも1つを含み、Va族はニオブ、タンタルの少なくとも1つを含むことを特徴とする請求項1に記載の結晶成長方法。
- 前記結晶の成分は、周期率表Ia族とVa族から構成されており、Ia族はカリウムであり、Va族はニオブ、タンタルの少なくとも1つを含み、添加不純物として周期率表Ia、IIa族の1または複数種を含むことを特徴とする請求項1または2に記載の結晶成長方法。
- 炉内に設置されたるつぼ内の原料溶液に、種子結晶を浸して結晶を育成する結晶成長装置において、
前記原料溶液の表面に析出した浮遊結晶を検出するための可視光を照射する第1レーザと、
前記浮遊結晶を溶融するための加熱用のレーザ光を照射する第2レーザと、
前記第1レーザからの前記可視光を、前記第2レーザからの前記レーザ光の光軸上に照射する手段と、
前記可視光が浮遊結晶に照射するように、前記第1および第2レーザのレーザ照射位置を調整する制御手段と
を備えたことを特徴とする結晶成長装置。
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JP2007337890A JP4682350B2 (ja) | 2007-12-27 | 2007-12-27 | 結晶成長方法およびその装置 |
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JP2007337890A JP4682350B2 (ja) | 2007-12-27 | 2007-12-27 | 結晶成長方法およびその装置 |
Publications (2)
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JP2009155182A JP2009155182A (ja) | 2009-07-16 |
JP4682350B2 true JP4682350B2 (ja) | 2011-05-11 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6473649B2 (ja) * | 2015-04-07 | 2019-02-20 | 国立研究開発法人理化学研究所 | レーザ単結晶育成装置及び単結晶 |
JP6401673B2 (ja) * | 2015-07-23 | 2018-10-10 | 日本電信電話株式会社 | 単結晶成長方法およびその装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006213553A (ja) * | 2005-02-02 | 2006-08-17 | Nippon Telegr & Teleph Corp <Ntt> | 結晶成長装置 |
JP2006343325A (ja) * | 2005-05-12 | 2006-12-21 | Kobe Steel Ltd | 熱物性測定装置、熱物性測定方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH02243587A (ja) * | 1989-03-17 | 1990-09-27 | Kawasaki Steel Corp | 単結晶の引上方法およびその装置 |
JPH08183688A (ja) * | 1994-12-27 | 1996-07-16 | Digital Ueebu:Kk | 連続引上法による結晶の製造方法及び製造装置 |
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JP2006213553A (ja) * | 2005-02-02 | 2006-08-17 | Nippon Telegr & Teleph Corp <Ntt> | 結晶成長装置 |
JP2006343325A (ja) * | 2005-05-12 | 2006-12-21 | Kobe Steel Ltd | 熱物性測定装置、熱物性測定方法 |
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