JP4666744B2 - 計測装置、露光装置およびデバイス製造方法 - Google Patents

計測装置、露光装置およびデバイス製造方法 Download PDF

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Publication number
JP4666744B2
JP4666744B2 JP2000330957A JP2000330957A JP4666744B2 JP 4666744 B2 JP4666744 B2 JP 4666744B2 JP 2000330957 A JP2000330957 A JP 2000330957A JP 2000330957 A JP2000330957 A JP 2000330957A JP 4666744 B2 JP4666744 B2 JP 4666744B2
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JP2002134400A5 (enrdf_load_stackoverflow
JP2002134400A (ja
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浩 田中
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Canon Inc
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Canon Inc
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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Image Input (AREA)
JP2000330957A 2000-10-30 2000-10-30 計測装置、露光装置およびデバイス製造方法 Expired - Fee Related JP4666744B2 (ja)

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JP2000330957A JP4666744B2 (ja) 2000-10-30 2000-10-30 計測装置、露光装置およびデバイス製造方法

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JP2000330957A JP4666744B2 (ja) 2000-10-30 2000-10-30 計測装置、露光装置およびデバイス製造方法

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JP2002134400A JP2002134400A (ja) 2002-05-10
JP2002134400A5 JP2002134400A5 (enrdf_load_stackoverflow) 2007-12-13
JP4666744B2 true JP4666744B2 (ja) 2011-04-06

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7512454B1 (en) * 2002-05-31 2009-03-31 Advanced Micro Devices, Inc. Display unit with processor and communication controller
JP2005227640A (ja) * 2004-02-16 2005-08-25 Casio Comput Co Ltd 投影装置、測距処理方法及びプログラム
JP2005302970A (ja) * 2004-04-09 2005-10-27 Nikon Corp レシピ作成方法、位置検出装置、および、位置ずれ検出装置
JP7587359B2 (ja) 2020-06-23 2024-11-20 キヤノン株式会社 位置合わせ装置、マークの位置を求める方法、プログラム、リソグラフィ装置、および物品製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183583A (ja) * 1983-04-04 1984-10-18 Nippon Hoso Kyokai <Nhk> 移動物体画像のちらつき防止方法
JPS6414918A (en) * 1987-07-08 1989-01-19 Nikon Corp Stepper
JPH01207603A (ja) * 1988-02-15 1989-08-21 Nikon Corp 位置検出装置
JPH0313181A (ja) * 1989-06-12 1991-01-22 Casio Comput Co Ltd 画像処理装置
JP2650066B2 (ja) * 1990-01-31 1997-09-03 キヤノン株式会社 画像取り込み装置
JP3016818B2 (ja) * 1990-05-19 2000-03-06 日東電工株式会社 電線水密処理用材
JP2908099B2 (ja) * 1992-01-17 1999-06-21 キヤノン株式会社 基板の位置合わせ方法
JPH09106939A (ja) * 1995-10-13 1997-04-22 Nikon Corp 露光方法及び装置
JPH09224195A (ja) * 1996-02-19 1997-08-26 Canon Inc 画像検出法および装置
JPH09266164A (ja) * 1996-03-28 1997-10-07 Canon Inc 位置合わせ方法および装置
JPH11295056A (ja) * 1998-04-15 1999-10-29 Nikon Corp 位置検出方法、位置合わせ方法、および露光方法
JP3065613B2 (ja) * 1999-06-21 2000-07-17 キヤノン株式会社 位置合わせ装置および方法
JP2002100650A (ja) * 2000-09-22 2002-04-05 Kaijo Corp ワイヤボンダー用画像処理装置

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