JP2002134400A5 - - Google Patents

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Publication number
JP2002134400A5
JP2002134400A5 JP2000330957A JP2000330957A JP2002134400A5 JP 2002134400 A5 JP2002134400 A5 JP 2002134400A5 JP 2000330957 A JP2000330957 A JP 2000330957A JP 2000330957 A JP2000330957 A JP 2000330957A JP 2002134400 A5 JP2002134400 A5 JP 2002134400A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2000330957A
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Japanese (ja)
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JP4666744B2 (ja
JP2002134400A (ja
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Priority to JP2000330957A priority Critical patent/JP4666744B2/ja
Priority claimed from JP2000330957A external-priority patent/JP4666744B2/ja
Publication of JP2002134400A publication Critical patent/JP2002134400A/ja
Publication of JP2002134400A5 publication Critical patent/JP2002134400A5/ja
Application granted granted Critical
Publication of JP4666744B2 publication Critical patent/JP4666744B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000330957A 2000-10-30 2000-10-30 計測装置、露光装置およびデバイス製造方法 Expired - Fee Related JP4666744B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000330957A JP4666744B2 (ja) 2000-10-30 2000-10-30 計測装置、露光装置およびデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000330957A JP4666744B2 (ja) 2000-10-30 2000-10-30 計測装置、露光装置およびデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2002134400A JP2002134400A (ja) 2002-05-10
JP2002134400A5 true JP2002134400A5 (enrdf_load_stackoverflow) 2007-12-13
JP4666744B2 JP4666744B2 (ja) 2011-04-06

Family

ID=18807383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000330957A Expired - Fee Related JP4666744B2 (ja) 2000-10-30 2000-10-30 計測装置、露光装置およびデバイス製造方法

Country Status (1)

Country Link
JP (1) JP4666744B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7512454B1 (en) * 2002-05-31 2009-03-31 Advanced Micro Devices, Inc. Display unit with processor and communication controller
JP2005227640A (ja) * 2004-02-16 2005-08-25 Casio Comput Co Ltd 投影装置、測距処理方法及びプログラム
JP2005302970A (ja) * 2004-04-09 2005-10-27 Nikon Corp レシピ作成方法、位置検出装置、および、位置ずれ検出装置
JP7587359B2 (ja) 2020-06-23 2024-11-20 キヤノン株式会社 位置合わせ装置、マークの位置を求める方法、プログラム、リソグラフィ装置、および物品製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183583A (ja) * 1983-04-04 1984-10-18 Nippon Hoso Kyokai <Nhk> 移動物体画像のちらつき防止方法
JPS6414918A (en) * 1987-07-08 1989-01-19 Nikon Corp Stepper
JPH01207603A (ja) * 1988-02-15 1989-08-21 Nikon Corp 位置検出装置
JPH0313181A (ja) * 1989-06-12 1991-01-22 Casio Comput Co Ltd 画像処理装置
JP2650066B2 (ja) * 1990-01-31 1997-09-03 キヤノン株式会社 画像取り込み装置
JP3016818B2 (ja) * 1990-05-19 2000-03-06 日東電工株式会社 電線水密処理用材
JP2908099B2 (ja) * 1992-01-17 1999-06-21 キヤノン株式会社 基板の位置合わせ方法
JPH09106939A (ja) * 1995-10-13 1997-04-22 Nikon Corp 露光方法及び装置
JPH09224195A (ja) * 1996-02-19 1997-08-26 Canon Inc 画像検出法および装置
JPH09266164A (ja) * 1996-03-28 1997-10-07 Canon Inc 位置合わせ方法および装置
JPH11295056A (ja) * 1998-04-15 1999-10-29 Nikon Corp 位置検出方法、位置合わせ方法、および露光方法
JP3065613B2 (ja) * 1999-06-21 2000-07-17 キヤノン株式会社 位置合わせ装置および方法
JP2002100650A (ja) * 2000-09-22 2002-04-05 Kaijo Corp ワイヤボンダー用画像処理装置

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