JP4647159B2 - 無電解めっき皮膜の形成方法 - Google Patents
無電解めっき皮膜の形成方法 Download PDFInfo
- Publication number
- JP4647159B2 JP4647159B2 JP2001288395A JP2001288395A JP4647159B2 JP 4647159 B2 JP4647159 B2 JP 4647159B2 JP 2001288395 A JP2001288395 A JP 2001288395A JP 2001288395 A JP2001288395 A JP 2001288395A JP 4647159 B2 JP4647159 B2 JP 4647159B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- electroless plating
- film
- electrode
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
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- Chemically Coating (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001288395A JP4647159B2 (ja) | 2001-09-21 | 2001-09-21 | 無電解めっき皮膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001288395A JP4647159B2 (ja) | 2001-09-21 | 2001-09-21 | 無電解めっき皮膜の形成方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003096573A JP2003096573A (ja) | 2003-04-03 |
| JP2003096573A5 JP2003096573A5 (enExample) | 2008-07-10 |
| JP4647159B2 true JP4647159B2 (ja) | 2011-03-09 |
Family
ID=19111055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001288395A Expired - Fee Related JP4647159B2 (ja) | 2001-09-21 | 2001-09-21 | 無電解めっき皮膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4647159B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5707709B2 (ja) | 2009-03-23 | 2015-04-30 | 富士電機株式会社 | 半導体装置の製造方法 |
| JP5678698B2 (ja) * | 2011-02-01 | 2015-03-04 | トヨタ自動車株式会社 | 触媒微粒子の製造方法 |
| JP5664370B2 (ja) * | 2011-03-16 | 2015-02-04 | トヨタ自動車株式会社 | 触媒微粒子の製造方法 |
| JP5736945B2 (ja) * | 2011-05-12 | 2015-06-17 | トヨタ自動車株式会社 | 部分的にめっきをおこなう方法 |
| JP5733150B2 (ja) * | 2011-10-13 | 2015-06-10 | 株式会社デンソー | 半導体装置の製造方法 |
| JP6273971B2 (ja) * | 2014-03-31 | 2018-02-07 | 三菱マテリアル株式会社 | 放熱板付パワーモジュール用基板の製造方法 |
| JP6390481B2 (ja) * | 2015-03-19 | 2018-09-19 | 三菱マテリアル株式会社 | めっき付きパワーモジュール用基板の製造方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62250178A (ja) * | 1986-04-22 | 1987-10-31 | Oki Electric Ind Co Ltd | 無電解めつきの初期析出方法 |
| JPH03215676A (ja) * | 1990-01-20 | 1991-09-20 | Tokin Corp | 無電解めっき剤,及びそれを用いた無電解めっき方法 |
| JP3726500B2 (ja) * | 1997-07-28 | 2005-12-14 | 株式会社日立製作所 | 配線板及びその製造方法並びに無電解めっき方法 |
| JPH11214421A (ja) * | 1997-10-13 | 1999-08-06 | Matsushita Electric Ind Co Ltd | 半導体素子の電極形成方法 |
| JP2000038682A (ja) * | 1998-07-24 | 2000-02-08 | Fujitsu Ltd | ニッケルめっき方法及び半導体装置 |
| JP4523106B2 (ja) * | 2000-02-29 | 2010-08-11 | 東芝テック株式会社 | 無電解メッキ方法、インクジェットヘッドの製造方法および電極基板 |
-
2001
- 2001-09-21 JP JP2001288395A patent/JP4647159B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003096573A (ja) | 2003-04-03 |
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