JP4594689B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP4594689B2
JP4594689B2 JP2004279163A JP2004279163A JP4594689B2 JP 4594689 B2 JP4594689 B2 JP 4594689B2 JP 2004279163 A JP2004279163 A JP 2004279163A JP 2004279163 A JP2004279163 A JP 2004279163A JP 4594689 B2 JP4594689 B2 JP 4594689B2
Authority
JP
Japan
Prior art keywords
control device
pump
cooling
heat
pump body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004279163A
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English (en)
Japanese (ja)
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JP2006090251A5 (enExample
JP2006090251A (ja
Inventor
雅哉 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Priority to JP2004279163A priority Critical patent/JP4594689B2/ja
Publication of JP2006090251A publication Critical patent/JP2006090251A/ja
Publication of JP2006090251A5 publication Critical patent/JP2006090251A5/ja
Application granted granted Critical
Publication of JP4594689B2 publication Critical patent/JP4594689B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5813—Cooling the control unit

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2004279163A 2004-09-27 2004-09-27 真空ポンプ Expired - Lifetime JP4594689B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004279163A JP4594689B2 (ja) 2004-09-27 2004-09-27 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004279163A JP4594689B2 (ja) 2004-09-27 2004-09-27 真空ポンプ

Publications (3)

Publication Number Publication Date
JP2006090251A JP2006090251A (ja) 2006-04-06
JP2006090251A5 JP2006090251A5 (enExample) 2007-07-12
JP4594689B2 true JP4594689B2 (ja) 2010-12-08

Family

ID=36231469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004279163A Expired - Lifetime JP4594689B2 (ja) 2004-09-27 2004-09-27 真空ポンプ

Country Status (1)

Country Link
JP (1) JP4594689B2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103104512A (zh) * 2011-11-09 2013-05-15 株式会社岛津制作所 涡轮分子泵装置
CN104912829A (zh) * 2014-03-12 2015-09-16 埃地沃兹日本有限公司 真空泵的控制装置和具备它的真空泵
US10132329B2 (en) 2013-12-25 2018-11-20 Shimadzu Corporation Vacuum pump

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006016405B4 (de) * 2006-04-07 2024-08-01 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Antriebsgerät
JP5024507B2 (ja) * 2006-04-12 2012-09-12 株式会社島津製作所 ターボ分子ポンプ、及び真空装置
JP4929939B2 (ja) * 2006-09-12 2012-05-09 株式会社島津製作所 一体型ターボ分子ポンプ
WO2008062598A1 (en) * 2006-11-22 2008-05-29 Edwards Japan Limited Vacuum pump
JP5156649B2 (ja) * 2007-02-06 2013-03-06 エドワーズ株式会社 真空ポンプ
CN102483069B (zh) * 2009-08-28 2016-09-07 埃地沃兹日本有限公司 真空泵以及真空泵中使用的部件
US9353755B2 (en) 2010-03-11 2016-05-31 Shimadzu Corporation Turbomolecular pump device
JP5353838B2 (ja) * 2010-07-07 2013-11-27 株式会社島津製作所 真空ポンプ
JP5673497B2 (ja) * 2011-11-08 2015-02-18 株式会社島津製作所 一体型ターボ分子ポンプ
JP5700158B2 (ja) * 2014-04-24 2015-04-15 株式会社島津製作所 ターボ分子ポンプ装置
JP6916413B2 (ja) * 2017-04-25 2021-08-11 株式会社島津製作所 電源一体型真空ポンプ
JP6942610B2 (ja) * 2017-07-14 2021-09-29 エドワーズ株式会社 真空ポンプ、該真空ポンプに適用される温度調節用制御装置、検査用治具、及び温度調節機能部の診断方法
JP7022265B2 (ja) * 2017-10-25 2022-02-18 株式会社島津製作所 真空ポンプ
JP7087418B2 (ja) * 2018-02-02 2022-06-21 株式会社島津製作所 真空ポンプ
JP7124787B2 (ja) * 2019-04-17 2022-08-24 株式会社島津製作所 電源一体型真空ポンプ
JP7467882B2 (ja) * 2019-10-28 2024-04-16 株式会社島津製作所 真空ポンプ
IT202000004870A1 (it) * 2020-03-09 2021-09-09 Dab Pumps Spa Elettropompa ad isolamento perfezionato della parte elettronica ed elemento dissipatore di calore per tale parte elettronica

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5890385U (ja) * 1981-12-15 1983-06-18 芝浦メカトロニクス株式会社 ポンプ
JP3519759B2 (ja) * 1993-09-30 2004-04-19 Ｎｔｎ株式会社 磁気軸受スピンドル
JP3476142B2 (ja) * 2001-05-24 2003-12-10 日本電気株式会社 結露防止構造を備えた電子デバイス
JP2003269367A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103104512A (zh) * 2011-11-09 2013-05-15 株式会社岛津制作所 涡轮分子泵装置
CN103104512B (zh) * 2011-11-09 2015-04-22 株式会社岛津制作所 涡轮分子泵装置
US10132329B2 (en) 2013-12-25 2018-11-20 Shimadzu Corporation Vacuum pump
CN104912829A (zh) * 2014-03-12 2015-09-16 埃地沃兹日本有限公司 真空泵的控制装置和具备它的真空泵
CN104912829B (zh) * 2014-03-12 2019-05-14 埃地沃兹日本有限公司 真空泵的控制装置和具备它的真空泵

Also Published As

Publication number Publication date
JP2006090251A (ja) 2006-04-06

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