JP7124787B2 - 電源一体型真空ポンプ - Google Patents
電源一体型真空ポンプ Download PDFInfo
- Publication number
- JP7124787B2 JP7124787B2 JP2019078660A JP2019078660A JP7124787B2 JP 7124787 B2 JP7124787 B2 JP 7124787B2 JP 2019078660 A JP2019078660 A JP 2019078660A JP 2019078660 A JP2019078660 A JP 2019078660A JP 7124787 B2 JP7124787 B2 JP 7124787B2
- Authority
- JP
- Japan
- Prior art keywords
- connector
- pump
- power supply
- housing
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 125000006850 spacer group Chemical group 0.000 claims description 64
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims description 7
- 238000001816 cooling Methods 0.000 description 24
- 238000010586 diagram Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000012778 molding material Substances 0.000 description 4
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0693—Details or arrangements of the wiring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/46—Bases; Cases
- H01R13/533—Bases, cases made for use in extreme conditions, e.g. high temperature, radiation, vibration, corrosive environment, pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/002—Details, component parts, or accessories especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/5806—Cooling the drive system
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/73—Means for mounting coupling parts to apparatus or structures, e.g. to a wall
- H01R13/74—Means for mounting coupling parts in openings of a panel
- H01R13/741—Means for mounting coupling parts in openings of a panel using snap fastening means
- H01R13/745—Means for mounting coupling parts in openings of a panel using snap fastening means separate from the housing
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
- H02G3/00—Installations of electric cables or lines or protective tubing therefor in or on buildings, equivalent structures or vehicles
- H02G3/22—Installations of cables or lines through walls, floors or ceilings, e.g. into buildings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/10—Stators
- F05B2240/14—Casings, housings, nacelles, gondels or the like, protecting or supporting assemblies there within
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/50—Bearings
- F05B2240/51—Bearings magnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/57—Seals
Description
本実施の形態では、コネクタ40をポンプベース15の底面151に直接固定せず、図2に示すようにコネクタスペーサ41を介してコネクタ40を固定するようにした。それにより、コネクタ40の位置をポンプベース15の底面151から突出させることができ、電源部20とポンプベース15との間に電源側配線61を挟み込んでしまうという電源固定時における不具合の発生を防止することができる。
上述した実施の形態では、コネクタ40は、図2に示すようにコネクタピン403の真空側にポンプ側配線60が接続されると共に大気圧側に電源側配線61が接続される、フィードスルー方式のコネクタであった。しかし、コネクタ40の構成はこのような構成に限定されず、図8に示すような着脱可能なレセプタクル421とプラグ422とで構成されるコネクタ42であっても良い。その場合、レセプタクル421がコネクタスペーサ41に固定される。
Claims (4)
- 内部にポンプロータが配置されるポンプ筐体と、
前記ポンプ筐体の外表面に固定される電源筐体と、
ポンプ筐体側の配線と電源筐体側の配線とを接続するコネクタと、
前記ポンプ筐体の外表面に固定され、前記コネクタが固定されるコネクタ固定面を有するスペーサとを備え、
前記スペーサのポンプ側固定面から前記コネクタ固定面までの厚さは、前記ポンプ筐体の外表面から前記電源筐体の内周面までの厚さ方向寸法以上に設定される、
電源一体型真空ポンプ。 - 内部にポンプロータが配置されるポンプ筐体と、
前記ポンプ筐体の外表面に固定される電源筐体と、
ポンプ筐体側の配線と電源筐体側の配線とを接続するコネクタと、
前記ポンプ筐体の外表面に固定され、前記コネクタが固定されるコネクタ固定面を有するスペーサとを備え、
前記スペーサの熱伝導率は前記ポンプ筐体の熱伝導率よりも小さい、
電源一体型真空ポンプ。 - 内部にポンプロータが配置されるポンプ筐体と、
前記ポンプ筐体の外表面に固定される電源筐体と、
ポンプ筐体側の配線と電源筐体側の配線とを接続するコネクタと、
前記ポンプ筐体の外表面に固定され、前記コネクタが固定されるコネクタ固定面を有するスペーサと、
前記ポンプ筐体と前記電源筐体との間に設けられる断熱材と、を備え、
前記スペーサのポンプ側固定面から前記コネクタ固定面までの厚さは、前記電源筐体の厚さと前記断熱材の厚さとの和以上に設定される、
電源一体型真空ポンプ。 - 請求項1から請求項3までのいずれか一項に記載の電源一体型真空ポンプにおいて、
前記スペーサと前記ポンプ筐体との間を封止する第1真空シールと、
前記スペーサと前記コネクタとの間を封止する第2真空シールとを備える、電源一体型真空ポンプ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019078660A JP7124787B2 (ja) | 2019-04-17 | 2019-04-17 | 電源一体型真空ポンプ |
CN202010162914.3A CN111828349B (zh) | 2019-04-17 | 2020-03-10 | 电源一体型真空泵 |
US16/837,136 US11398699B2 (en) | 2019-04-17 | 2020-04-01 | Power supply integrated vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019078660A JP7124787B2 (ja) | 2019-04-17 | 2019-04-17 | 電源一体型真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020176543A JP2020176543A (ja) | 2020-10-29 |
JP7124787B2 true JP7124787B2 (ja) | 2022-08-24 |
Family
ID=72831947
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019078660A Active JP7124787B2 (ja) | 2019-04-17 | 2019-04-17 | 電源一体型真空ポンプ |
Country Status (3)
Country | Link |
---|---|
US (1) | US11398699B2 (ja) |
JP (1) | JP7124787B2 (ja) |
CN (1) | CN111828349B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11709155B2 (en) | 2017-09-18 | 2023-07-25 | Waters Technologies Corporation | Use of vapor deposition coated flow paths for improved chromatography of metal interacting analytes |
US11709156B2 (en) | 2017-09-18 | 2023-07-25 | Waters Technologies Corporation | Use of vapor deposition coated flow paths for improved analytical analysis |
US11918936B2 (en) | 2020-01-17 | 2024-03-05 | Waters Technologies Corporation | Performance and dynamic range for oligonucleotide bioanalysis through reduction of non specific binding |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006250033A (ja) | 2005-03-10 | 2006-09-21 | Shimadzu Corp | ターボ分子ポンプ |
JP2012017673A (ja) | 2010-07-07 | 2012-01-26 | Shimadzu Corp | 真空ポンプ |
JP2015048734A (ja) | 2013-08-30 | 2015-03-16 | エドワーズ株式会社 | 真空ポンプ |
US20160172179A1 (en) | 2014-12-12 | 2016-06-16 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum System |
JP2018109371A (ja) | 2016-12-28 | 2018-07-12 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプに適用されるコネクタ、制御装置 |
JP2018141375A (ja) | 2017-02-27 | 2018-09-13 | 株式会社島津製作所 | 電源一体型真空ポンプ |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0750854Y2 (ja) * | 1990-07-13 | 1995-11-15 | 株式会社荏原製作所 | 深井戸ポンプ用キヤンド形水中モータのポンプ取付部の構造 |
JP4594689B2 (ja) * | 2004-09-27 | 2010-12-08 | エドワーズ株式会社 | 真空ポンプ |
CN200993110Y (zh) * | 2006-12-27 | 2007-12-19 | 济南奔腾泵业制造有限公司 | 一体化自动式矿用防爆潜水排沙泵 |
US9353755B2 (en) * | 2010-03-11 | 2016-05-31 | Shimadzu Corporation | Turbomolecular pump device |
JP5778166B2 (ja) | 2010-10-19 | 2015-09-16 | エドワーズ株式会社 | 真空ポンプ |
KR101848529B1 (ko) * | 2010-10-19 | 2018-04-12 | 에드워즈 가부시키가이샤 | 진공 펌프 |
JP6753759B2 (ja) * | 2016-10-21 | 2020-09-09 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプに適用される防水構造、制御装置 |
JP6916413B2 (ja) * | 2017-04-25 | 2021-08-11 | 株式会社島津製作所 | 電源一体型真空ポンプ |
-
2019
- 2019-04-17 JP JP2019078660A patent/JP7124787B2/ja active Active
-
2020
- 2020-03-10 CN CN202010162914.3A patent/CN111828349B/zh active Active
- 2020-04-01 US US16/837,136 patent/US11398699B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006250033A (ja) | 2005-03-10 | 2006-09-21 | Shimadzu Corp | ターボ分子ポンプ |
JP2012017673A (ja) | 2010-07-07 | 2012-01-26 | Shimadzu Corp | 真空ポンプ |
JP2015048734A (ja) | 2013-08-30 | 2015-03-16 | エドワーズ株式会社 | 真空ポンプ |
US20160172179A1 (en) | 2014-12-12 | 2016-06-16 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum System |
JP2018109371A (ja) | 2016-12-28 | 2018-07-12 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプに適用されるコネクタ、制御装置 |
JP2018141375A (ja) | 2017-02-27 | 2018-09-13 | 株式会社島津製作所 | 電源一体型真空ポンプ |
Also Published As
Publication number | Publication date |
---|---|
US20200335902A1 (en) | 2020-10-22 |
CN111828349B (zh) | 2022-05-24 |
US11398699B2 (en) | 2022-07-26 |
CN111828349A (zh) | 2020-10-27 |
JP2020176543A (ja) | 2020-10-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7124787B2 (ja) | 電源一体型真空ポンプ | |
US7713087B2 (en) | Terminal structure and vacuum pump | |
EP1884010B1 (en) | Bldc motor and pump assembly with encapsulated circuit board | |
CN108350894B (zh) | 真空泵 | |
CN103089668B (zh) | 一体型涡轮分子泵 | |
WO2013008266A1 (ja) | 電動機 | |
KR20130138200A (ko) | 진공 펌프 | |
KR102430356B1 (ko) | 진공 펌프 및 그 진공 펌프에 적용되는 방수 구조, 제어장치 | |
CN109923317B (zh) | 电动泵 | |
US10113551B2 (en) | Axial flow fan | |
JP6102222B2 (ja) | 真空ポンプ | |
CN108506225B (zh) | 电源一体型真空泵 | |
CN110242582B (zh) | 泵装置 | |
CN114364880A (zh) | 真空泵 | |
CN111486097A (zh) | 泵装置 | |
CN112696382B (zh) | 薄型泵 | |
JP2008184901A (ja) | 電動ポンプ | |
CN215419840U (zh) | 一种转动轴悬臂安装真空泵电机 | |
JP7380381B2 (ja) | 電動ポンプ | |
CN113629924A (zh) | 转动轴悬臂安装真空泵电机 | |
TW202242260A (zh) | 馬達泵浦 | |
KR20230116781A (ko) | 진공 펌프 | |
JP2022138248A (ja) | 電動圧縮機 | |
US20080036337A1 (en) | Fan and motor thereof | |
CN115988828A (zh) | 具有主动冷却功能的电子装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20210331 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20210720 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210802 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20210817 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220426 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220427 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220609 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220712 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220725 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 7124787 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |