JP2015048734A - 真空ポンプ - Google Patents
真空ポンプ Download PDFInfo
- Publication number
- JP2015048734A JP2015048734A JP2013179431A JP2013179431A JP2015048734A JP 2015048734 A JP2015048734 A JP 2015048734A JP 2013179431 A JP2013179431 A JP 2013179431A JP 2013179431 A JP2013179431 A JP 2013179431A JP 2015048734 A JP2015048734 A JP 2015048734A
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- JP
- Japan
- Prior art keywords
- wiring board
- printed wiring
- flexible printed
- control unit
- connector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0693—Details or arrangements of the wiring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
- F04D29/281—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps for fans or blowers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/30—Structural association with control circuits or drive circuits
- H02K11/33—Drive circuits, e.g. power electronics
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0474—Active magnetic bearings for rotary movement
- F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R12/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
- H01R12/50—Fixed connections
- H01R12/59—Fixed connections for flexible printed circuits, flat or ribbon cables or like structures
- H01R12/592—Fixed connections for flexible printed circuits, flat or ribbon cables or like structures connections to contact elements
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2211/00—Specific aspects not provided for in the other groups of this subclass relating to measuring or protective devices or electric components
- H02K2211/03—Machines characterised by circuit boards, e.g. pcb
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
【解決手段】磁気軸受で軸支される回転体19を有するポンプ本体11と該ポンプ本体11を駆動制御する制御ユニット12との間の電気接続を、シート状をした絶縁性基材の表面上に電気回路がプリントされたフレキシブルプリント配線板41で接続するようにした。
【選択図】図1
Description
2参照)。
ンサ、回転数センサなどの信号線のみをフレキシブルプリント配線板として説明としたが、これに限定されず、全ての信号線をフレキシブルプリント配線板41で接続しても良い。
11 ポンプ本体
12 制御ユニット
13、14 ケーブル
15 吸気口
17 外筒
18 回転翼
118 最下位の回転翼
19 回転体
20 ロータ軸
21 上側径方向電磁石
22 上側径方向センサ
23 制御回路
24 下側径方向電磁石
25 下側径方向センサ
26A、26B 軸方向電磁石
27 金属ディスク
28 軸方向センサ
29 モータ
30 固定翼
31 回転翼スペーサ
32 ベース部
33 ネジ付スペーサ
34 排気口
35 シール材
36 保護ベアリング
37 ステータコラム
41 フレキシブルプリント配線板
42 コネクタ
43 フランジ部
44 コネクタ本体
45 コンタクトピン
46 電気回路(配線パターン)
47 スルーホール
48 カット箇所
49 インシュレータ
50 従来構造で必要していた領域
51a、51b 指示手段としてのマーク
Claims (7)
- 回転体を有するポンプ本体と、該ポンプ本体を駆動制御する制御ユニットと、を備え、前記ポンプ本体内の電気接続、前記制御ユニット内の電気接続、または前記ポンプ本体と前記制御ユニットの間の電気接続をケーブルで接続してなる真空ポンプにおいて、
前記ケーブルの少なくとも一部を、シート状絶縁性基材の表面上に配線パターンを設けてなるフレキシブルプリント配線板で形成したことを特徴とすると真空ポンプ。 - 前記制御ユニットは、前記ポンプ本体に取り付けられていることを特徴とする請求項1に記載の真空ポンプ。
- 前記フレキシブルプリント配線板は、少なくとも一端側に取り付けられたコネクタを備えることを特徴とする請求項1または請求項2に記載の真空ポンプ。
- 前記コネクタは、前記フレキシブルプリント配線板と接続するための複数のピンを有することを特徴とする請求項3に記載の真空ポンプ。
- 前記複数のピンは、前記フレキシブルプリント配線板の延在方向中心を挟んで左右対称な位置に配設され、前記コネクタは前記フレキシブルプリント配線板を取り付ける向きを指示する指示手段を設けてなることを特徴とする請求項4に記載の真空ポンプ。
- 前記フレキシブルプリント配線板は、複数の孔と該複数の孔をそれぞれ囲み、かつ、それぞれが前記配線パターンに接続されてなる複数の端子を有することを特徴とする請求項1、2、3、4または5に記載の真空ポンプ。
- 前記フレキシブルプリント配線板は、前記フレキシブルプリント配線板を取り付ける向きを指示する指示手段を設けてなることを特徴とする請求項1、2、3、4、5または6に記載の真空ポンプ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013179431A JP6735526B2 (ja) | 2013-08-30 | 2013-08-30 | 真空ポンプ |
KR1020157035415A KR102167207B1 (ko) | 2013-08-30 | 2014-06-06 | 진공 펌프 |
EP14841254.7A EP3040561A4 (en) | 2013-08-30 | 2014-06-06 | Vacuum pump |
PCT/JP2014/065153 WO2015029536A1 (ja) | 2013-08-30 | 2014-06-06 | 真空ポンプ |
CN201480043086.4A CN105408634A (zh) | 2013-08-30 | 2014-06-06 | 真空泵 |
US14/912,434 US11512705B2 (en) | 2013-08-30 | 2014-06-06 | Vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013179431A JP6735526B2 (ja) | 2013-08-30 | 2013-08-30 | 真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015048734A true JP2015048734A (ja) | 2015-03-16 |
JP6735526B2 JP6735526B2 (ja) | 2020-08-05 |
Family
ID=52586115
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013179431A Active JP6735526B2 (ja) | 2013-08-30 | 2013-08-30 | 真空ポンプ |
Country Status (6)
Country | Link |
---|---|
US (1) | US11512705B2 (ja) |
EP (1) | EP3040561A4 (ja) |
JP (1) | JP6735526B2 (ja) |
KR (1) | KR102167207B1 (ja) |
CN (1) | CN105408634A (ja) |
WO (1) | WO2015029536A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020195944A1 (ja) * | 2019-03-28 | 2020-10-01 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプの制御装置 |
JP2020176543A (ja) * | 2019-04-17 | 2020-10-29 | 株式会社島津製作所 | 電源一体型真空ポンプ |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6753759B2 (ja) * | 2016-10-21 | 2020-09-09 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプに適用される防水構造、制御装置 |
JP6912196B2 (ja) * | 2016-12-28 | 2021-08-04 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプに適用されるコネクタ、制御装置 |
JP7003418B2 (ja) * | 2017-02-17 | 2022-01-20 | 株式会社島津製作所 | 磁気軸受装置および真空ポンプ |
JP7022265B2 (ja) * | 2017-10-25 | 2022-02-18 | 株式会社島津製作所 | 真空ポンプ |
JP7087418B2 (ja) * | 2018-02-02 | 2022-06-21 | 株式会社島津製作所 | 真空ポンプ |
JP7088688B2 (ja) * | 2018-02-16 | 2022-06-21 | エドワーズ株式会社 | 真空ポンプと真空ポンプの制御装置 |
JP7096006B2 (ja) * | 2018-02-16 | 2022-07-05 | エドワーズ株式会社 | 真空ポンプと真空ポンプの制御装置 |
FR3093544B1 (fr) * | 2019-03-05 | 2021-03-12 | Pfeiffer Vacuum | Pompe à vide turbomoléculaire et procédé de purge |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62165884A (ja) * | 1986-01-17 | 1987-07-22 | 富士通株式会社 | コネクタ |
JPH0636248U (ja) * | 1991-05-27 | 1994-05-13 | 東光株式会社 | Dc−dcコンバータ |
JP2001267022A (ja) * | 2000-03-15 | 2001-09-28 | Denso Corp | 電子制御装置 |
JP3138105U (ja) * | 2007-10-09 | 2007-12-20 | 株式会社島津製作所 | ターボ分子ポンプ |
JP2009506733A (ja) * | 2005-08-24 | 2009-02-12 | メコス トラックスラー アクチェンゲゼルシャフト | 真空中での改良型貫通接続部を備えた磁気ベアリング |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4526432A (en) * | 1979-12-26 | 1985-07-02 | Lockheed Corporation | Electrical connector assembly for flat cables |
US4552420A (en) * | 1983-12-02 | 1985-11-12 | E. I. Du Pont De Nemours And Company | Electrical connector using a flexible circuit having an impedance control arrangement thereon |
JPH0829546B2 (ja) | 1989-10-25 | 1996-03-27 | スタンレー電気株式会社 | 軸一体型カッターホイル付きカッター |
CN1160585C (zh) * | 1996-04-24 | 2004-08-04 | 富士通株式会社 | 光纤可分离式光学模块 |
JP2004095756A (ja) * | 2002-08-30 | 2004-03-25 | Seiko Instruments Inc | 半導体パッケージおよびその製造方法、並びに電子装置 |
US7197892B2 (en) * | 2003-06-11 | 2007-04-03 | Denso Corporation | Encapsulated electrically driven compressor |
US7381064B2 (en) * | 2003-08-26 | 2008-06-03 | Methode Electronics, Inc. | Flexible flat cable termination structure for a clockspring |
CA2606475C (en) | 2005-04-27 | 2015-06-16 | Novozymes, Inc. | Polypeptides having endoglucanase activity and polynucleotides encoding same |
JP2006344503A (ja) * | 2005-06-09 | 2006-12-21 | Boc Edwards Kk | 端子構造及び真空ポンプ |
ATE421647T1 (de) * | 2005-08-24 | 2009-02-15 | Mecos Traxler Ag | Rotorwelle für eine magnetlagereinrichtung |
DE102006036493A1 (de) * | 2006-08-04 | 2008-02-21 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
US20080081512A1 (en) | 2006-10-03 | 2008-04-03 | Shawn Chawgo | Coaxial Cable Connector With Threaded Post |
-
2013
- 2013-08-30 JP JP2013179431A patent/JP6735526B2/ja active Active
-
2014
- 2014-06-06 KR KR1020157035415A patent/KR102167207B1/ko active IP Right Grant
- 2014-06-06 WO PCT/JP2014/065153 patent/WO2015029536A1/ja active Application Filing
- 2014-06-06 EP EP14841254.7A patent/EP3040561A4/en active Pending
- 2014-06-06 US US14/912,434 patent/US11512705B2/en active Active
- 2014-06-06 CN CN201480043086.4A patent/CN105408634A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62165884A (ja) * | 1986-01-17 | 1987-07-22 | 富士通株式会社 | コネクタ |
JPH0636248U (ja) * | 1991-05-27 | 1994-05-13 | 東光株式会社 | Dc−dcコンバータ |
JP2001267022A (ja) * | 2000-03-15 | 2001-09-28 | Denso Corp | 電子制御装置 |
JP2009506733A (ja) * | 2005-08-24 | 2009-02-12 | メコス トラックスラー アクチェンゲゼルシャフト | 真空中での改良型貫通接続部を備えた磁気ベアリング |
JP3138105U (ja) * | 2007-10-09 | 2007-12-20 | 株式会社島津製作所 | ターボ分子ポンプ |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020195944A1 (ja) * | 2019-03-28 | 2020-10-01 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプの制御装置 |
JP2020165313A (ja) * | 2019-03-28 | 2020-10-08 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプの制御装置 |
JP7244328B2 (ja) | 2019-03-28 | 2023-03-22 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプの制御装置 |
JP2020176543A (ja) * | 2019-04-17 | 2020-10-29 | 株式会社島津製作所 | 電源一体型真空ポンプ |
JP7124787B2 (ja) | 2019-04-17 | 2022-08-24 | 株式会社島津製作所 | 電源一体型真空ポンプ |
Also Published As
Publication number | Publication date |
---|---|
CN105408634A (zh) | 2016-03-16 |
US20160195098A1 (en) | 2016-07-07 |
EP3040561A1 (en) | 2016-07-06 |
JP6735526B2 (ja) | 2020-08-05 |
WO2015029536A1 (ja) | 2015-03-05 |
US11512705B2 (en) | 2022-11-29 |
EP3040561A4 (en) | 2017-05-03 |
KR102167207B1 (ko) | 2020-10-19 |
KR20160048038A (ko) | 2016-05-03 |
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