JP4571067B2 - メガソニック超音波リンスを使用するイマージョン式フォトリソグラフィ - Google Patents
メガソニック超音波リンスを使用するイマージョン式フォトリソグラフィ Download PDFInfo
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- JP4571067B2 JP4571067B2 JP2005337792A JP2005337792A JP4571067B2 JP 4571067 B2 JP4571067 B2 JP 4571067B2 JP 2005337792 A JP2005337792 A JP 2005337792A JP 2005337792 A JP2005337792 A JP 2005337792A JP 4571067 B2 JP4571067 B2 JP 4571067B2
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- JP
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- Prior art keywords
- photoresist
- rinsing
- liquid
- wafer
- megasonic ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
Claims (8)
- 基板上にフォトレジストを形成する工程であって、前記フォトレジストは少なくとも一つのエアポケットを含んでいる、工程と、
少なくとも一つのメガソニック超音波源で振動されているリンス液により前記エアポケットを充填すると共に前記フォトレジストをリンスする工程であって、前記フォトレジストをリンスする工程は、界面活性剤を含む振動リンス液を使用するものであり、前記界面活性剤はパーフルオロオクタンスルホネート(PFOS)を含んでいる、工程と、
前記フォトレジストをリンスする工程の後で、前記フォトレジストをイマージョン露光液に浸す間に前記フォトレジストを放射源に曝す工程と、を含むことを特徴とする方法。 - 前記振動リンス液は、脱イオン水を含むことを特徴とする請求項1記載の方法。
- 前記振動リンス液は、バッファを含むことを特徴とする請求項1記載の方法。
- 前記振動リンス液は、ポリマーを含むことを特徴とする請求項1記載の方法。
- 前記フォトレジストをリンスする工程は、メガソニック超音波で振動されているリンス液槽またはメガソニック超音波で振動されているリンス液スプレーを使用することを特徴とする請求項1記載の方法。
- 前記フォトレジストをリンスする工程は、周波数が約10〜約1000KHzの間であるメガソニック超音波トランスデューサーを少なくとも一つ使用することを特徴とする請求項1記載の方法。
- 前記メガソニック超音波源で振動されているリンス液により前記フォトレジストをリンスする前に、前記基板および前記フォトレジストを加熱する工程、あるいは、脱イオン水で前記フォトレジストをリンスする工程を含むことを特徴とする請求項1記載の方法。
- 前記振動リンス液は、ポリマーを含み、前記ポリマーはC3F8を含んでいることを特徴とする請求項1記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/995,653 US7732123B2 (en) | 2004-11-23 | 2004-11-23 | Immersion photolithography with megasonic rinse |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006148133A JP2006148133A (ja) | 2006-06-08 |
JP4571067B2 true JP4571067B2 (ja) | 2010-10-27 |
Family
ID=36461320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005337792A Active JP4571067B2 (ja) | 2004-11-23 | 2005-11-22 | メガソニック超音波リンスを使用するイマージョン式フォトリソグラフィ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7732123B2 (ja) |
JP (1) | JP4571067B2 (ja) |
KR (1) | KR100733994B1 (ja) |
CN (1) | CN100432841C (ja) |
NL (1) | NL1030480C2 (ja) |
TW (1) | TWI267908B (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1783822A4 (en) * | 2004-06-21 | 2009-07-15 | Nikon Corp | EXPOSURE DEVICE, EXPOSURE DEVICE ELEMENT CLEANING METHOD, EXPOSURE DEVICE MAINTENANCE METHOD, MAINTENANCE DEVICE, AND DEVICE MANUFACTURING METHOD |
CN101044594B (zh) * | 2004-10-26 | 2010-05-12 | 株式会社尼康 | 衬底处理方法、曝光装置及器件制造方法 |
US20070242248A1 (en) * | 2004-10-26 | 2007-10-18 | Nikon Corporation | Substrate processing method, exposure apparatus, and method for producing device |
WO2006062065A1 (ja) * | 2004-12-06 | 2006-06-15 | Nikon Corporation | メンテナンス方法、メンテナンス機器、露光装置、及びデバイス製造方法 |
US7880860B2 (en) * | 2004-12-20 | 2011-02-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US20060194142A1 (en) * | 2005-02-25 | 2006-08-31 | Benjamin Szu-Min Lin | Immersion lithography without using a topcoat |
US20060250588A1 (en) * | 2005-05-03 | 2006-11-09 | Stefan Brandl | Immersion exposure tool cleaning system and method |
TW200710616A (en) * | 2005-07-11 | 2007-03-16 | Nikon Corp | Exposure apparatus and method for manufacturing device |
CN102298274A (zh) * | 2006-05-18 | 2011-12-28 | 株式会社尼康 | 曝光方法及装置、维护方法、以及组件制造方法 |
CN101385125B (zh) * | 2006-05-22 | 2011-04-13 | 株式会社尼康 | 曝光方法及装置、维修方法、以及组件制造方法 |
CN102156389A (zh) * | 2006-05-23 | 2011-08-17 | 株式会社尼康 | 维修方法、曝光方法及装置、以及组件制造方法 |
JP5245825B2 (ja) * | 2006-06-30 | 2013-07-24 | 株式会社ニコン | メンテナンス方法、露光方法及び装置、並びにデバイス製造方法 |
US20110094546A1 (en) * | 2009-10-23 | 2011-04-28 | John Valcore | System and method for wafer carrier vibration reduction |
NL2006272A (en) * | 2010-05-04 | 2011-11-07 | Asml Netherlands Bv | A fluid handling structure, a lithographic apparatus and a device manufacturing method. |
Citations (2)
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JP2004078217A (ja) * | 2002-08-12 | 2004-03-11 | Air Products & Chemicals Inc | 半導体デバイス製造の際の欠陥低減方法及び処理溶液 |
JP2006148093A (ja) * | 2004-11-18 | 2006-06-08 | Internatl Business Mach Corp <Ibm> | 浸漬リソグラフィ・システムにおいて半導体基板を洗浄する方法及び装置 |
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US4509852A (en) | 1980-10-06 | 1985-04-09 | Werner Tabarelli | Apparatus for the photolithographic manufacture of integrated circuit elements |
JPS57153433A (en) | 1981-03-18 | 1982-09-22 | Hitachi Ltd | Manufacturing device for semiconductor |
JPH06124873A (ja) * | 1992-10-09 | 1994-05-06 | Canon Inc | 液浸式投影露光装置 |
JP2753930B2 (ja) | 1992-11-27 | 1998-05-20 | キヤノン株式会社 | 液浸式投影露光装置 |
US5911837A (en) | 1993-07-16 | 1999-06-15 | Legacy Systems, Inc. | Process for treatment of semiconductor wafers in a fluid |
JPH0739833A (ja) | 1993-07-29 | 1995-02-10 | Matsushita Electric Ind Co Ltd | 洗浄装置 |
JP3198899B2 (ja) | 1995-11-30 | 2001-08-13 | アルプス電気株式会社 | ウエット処理方法 |
US5900354A (en) | 1997-07-03 | 1999-05-04 | Batchelder; John Samuel | Method for optical inspection and lithography |
WO1999027568A1 (fr) | 1997-11-21 | 1999-06-03 | Nikon Corporation | Graveur de motifs a projection et procede de sensibilisation a projection |
US20010047810A1 (en) * | 1999-06-29 | 2001-12-06 | Jeff Farber | High rpm megasonic cleaning |
US6517665B1 (en) * | 2000-01-25 | 2003-02-11 | Sandia National Laboratories | Liga developer apparatus system |
JP2001357567A (ja) * | 2000-04-14 | 2001-12-26 | Tdk Corp | 光ディスク原盤の製造方法 |
WO2002101797A2 (en) | 2001-06-12 | 2002-12-19 | Verteq, Inc | Megasonic cleaner and dryer system |
CN1170208C (zh) * | 2001-06-21 | 2004-10-06 | 中国科学院长春光学精密机械与物理研究所 | 利用普通紫外光深刻层光刻的分离曝光工艺方法 |
US20030234029A1 (en) * | 2001-07-16 | 2003-12-25 | Semitool, Inc. | Cleaning and drying a substrate |
WO2004020704A1 (en) * | 2001-08-31 | 2004-03-11 | Semitool, Inc. | Apparatus and method for deposition of an electrophoretic emulsion |
JP4304988B2 (ja) | 2002-01-28 | 2009-07-29 | 三菱化学株式会社 | 半導体デバイス用基板の洗浄方法 |
JP2004134674A (ja) | 2002-10-11 | 2004-04-30 | Toshiba Corp | 基板処理方法、加熱処理装置、パターン形成方法 |
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KR20040058966A (ko) * | 2002-12-27 | 2004-07-05 | 주식회사 하이닉스반도체 | 이머젼 리소그라피 방법 |
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2004
- 2004-11-23 US US10/995,653 patent/US7732123B2/en not_active Expired - Fee Related
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2005
- 2005-06-02 TW TW094118265A patent/TWI267908B/zh not_active IP Right Cessation
- 2005-06-10 CN CNB2005100753346A patent/CN100432841C/zh not_active Expired - Fee Related
- 2005-11-21 NL NL1030480A patent/NL1030480C2/nl active Search and Examination
- 2005-11-22 JP JP2005337792A patent/JP4571067B2/ja active Active
- 2005-11-23 KR KR1020050112164A patent/KR100733994B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2004078217A (ja) * | 2002-08-12 | 2004-03-11 | Air Products & Chemicals Inc | 半導体デバイス製造の際の欠陥低減方法及び処理溶液 |
JP2006148093A (ja) * | 2004-11-18 | 2006-06-08 | Internatl Business Mach Corp <Ibm> | 浸漬リソグラフィ・システムにおいて半導体基板を洗浄する方法及び装置 |
Also Published As
Publication number | Publication date |
---|---|
TW200618058A (en) | 2006-06-01 |
KR20060057517A (ko) | 2006-05-26 |
CN1779573A (zh) | 2006-05-31 |
JP2006148133A (ja) | 2006-06-08 |
NL1030480C2 (nl) | 2008-04-25 |
US20060110689A1 (en) | 2006-05-25 |
KR100733994B1 (ko) | 2007-06-29 |
CN100432841C (zh) | 2008-11-12 |
TWI267908B (en) | 2006-12-01 |
NL1030480A1 (nl) | 2006-05-24 |
US7732123B2 (en) | 2010-06-08 |
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