JP4564454B2 - 塗布方法及び塗布装置及び塗布処理プログラム - Google Patents
塗布方法及び塗布装置及び塗布処理プログラム Download PDFInfo
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Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2006010762A JP4564454B2 (ja) | 2006-01-19 | 2006-01-19 | 塗布方法及び塗布装置及び塗布処理プログラム |
TW096101501A TWI313193B (en) | 2006-01-19 | 2007-01-15 | Coating method, coating apparatus and memory medium |
KR1020070005581A KR101346887B1 (ko) | 2006-01-19 | 2007-01-18 | 도포 방법, 도포 장치 및 기억 매체 |
CN2007100040225A CN101003041B (zh) | 2006-01-19 | 2007-01-19 | 涂敷方法、涂敷装置以及涂敷处理程序 |
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JP2006010762A JP4564454B2 (ja) | 2006-01-19 | 2006-01-19 | 塗布方法及び塗布装置及び塗布処理プログラム |
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JP2007190483A JP2007190483A (ja) | 2007-08-02 |
JP4564454B2 true JP4564454B2 (ja) | 2010-10-20 |
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JP2006010762A Active JP4564454B2 (ja) | 2006-01-19 | 2006-01-19 | 塗布方法及び塗布装置及び塗布処理プログラム |
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JP (1) | JP4564454B2 (zh) |
CN (1) | CN101003041B (zh) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101007685B1 (ko) * | 2008-11-18 | 2011-01-13 | 세메스 주식회사 | 평판 디스플레이 소자 제조용 코팅 물질 도포 장치 |
KR101020681B1 (ko) * | 2008-11-18 | 2011-03-11 | 세메스 주식회사 | 평판 디스플레이 소자 제조용 코팅 물질 도포 장치 |
KR101214698B1 (ko) * | 2009-06-23 | 2012-12-21 | 시바우라 메카트로닉스 가부시키가이샤 | 페이스트 도포 장치 및 페이스트 도포 방법 |
JP5469992B2 (ja) * | 2009-10-19 | 2014-04-16 | 東京応化工業株式会社 | 塗布方法、及び塗布装置 |
JP2012071244A (ja) * | 2010-09-28 | 2012-04-12 | Dainippon Screen Mfg Co Ltd | パターン形成方法およびパターン形成装置 |
JP5739778B2 (ja) * | 2011-09-21 | 2015-06-24 | 株式会社日立製作所 | ペースト塗布方法 |
JP5546516B2 (ja) * | 2011-09-22 | 2014-07-09 | 富士フイルム株式会社 | 塗布装置及び塗布方法 |
JP5858247B2 (ja) * | 2013-09-30 | 2016-02-10 | 株式会社村田製作所 | 塗工装置 |
JP6136909B2 (ja) * | 2013-12-17 | 2017-05-31 | 旭硝子株式会社 | 樹脂層付き支持基板の製造方法、ガラス積層体の製造方法、電子デバイスの製造方法 |
JP6310741B2 (ja) | 2014-03-20 | 2018-04-11 | 株式会社Screenホールディングス | 間欠塗工方法および間欠塗工装置 |
JP2018008216A (ja) * | 2016-07-13 | 2018-01-18 | 株式会社テクノスマート | 塗工装置 |
CN106681105A (zh) * | 2017-02-09 | 2017-05-17 | 深圳市华星光电技术有限公司 | 光阻涂布装置检测机构及光阻涂布机 |
US10675654B2 (en) * | 2017-03-01 | 2020-06-09 | Nordson Corporation | Multi-layer slot die system and method |
CN106862010A (zh) * | 2017-03-24 | 2017-06-20 | 苏州威格尔纳米科技有限公司 | 一种旋转式狭缝涂布模头及方法 |
CN111032360A (zh) * | 2017-09-28 | 2020-04-17 | 日本电产株式会社 | 液剂涂敷装置 |
JP7038524B2 (ja) * | 2017-11-14 | 2022-03-18 | 東京エレクトロン株式会社 | 基板処理装置の洗浄装置および洗浄方法 |
JP6931849B2 (ja) * | 2018-02-01 | 2021-09-08 | パナソニックIpマネジメント株式会社 | 塗工方法および塗工装置 |
CN108816641B (zh) * | 2018-06-30 | 2024-05-14 | 浙江浙能科技环保集团股份有限公司 | 一种钙钛矿太阳能电池中钙钛矿吸光层的涂布工艺及装置 |
CN109277265B (zh) * | 2018-08-29 | 2022-05-20 | 广州倬粤动力新能源有限公司 | 双极板涂膏设备厚度调节方法 |
EP3789123B1 (en) * | 2019-06-26 | 2023-04-26 | ABB Schweiz AG | Coating machine and coating method |
CN111187008B (zh) * | 2020-03-12 | 2022-04-26 | Tcl华星光电技术有限公司 | 玻璃基板涂布方法及玻璃基板涂布装置 |
CN113198656B (zh) * | 2021-04-26 | 2022-03-15 | 东风延锋汽车饰件系统有限公司 | 喷胶设备的自动清洗装置及方法 |
CN114074063A (zh) * | 2021-11-22 | 2022-02-22 | 深圳市深赛尔股份有限公司 | 一种用多组分水性组合物涂覆金属表面的方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002113411A (ja) * | 2000-10-10 | 2002-04-16 | Tokyo Ohka Kogyo Co Ltd | 塗布方法 |
JP2002153795A (ja) * | 2000-11-16 | 2002-05-28 | Advanced Color Tec Kk | 枚葉基板の製造方法および塗布装置 |
JP2005244155A (ja) * | 2004-01-30 | 2005-09-08 | Tokyo Electron Ltd | 浮上式基板搬送処理装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69814710T2 (de) * | 1997-03-03 | 2004-03-18 | Tokyo Electron Ltd. | Beschichtungs-Vorrichtung und Verfahren |
JP3874547B2 (ja) * | 1998-08-20 | 2007-01-31 | 松下電器産業株式会社 | バンプ付きic封止剤塗布方法及びバンプ付きic封止剤塗布装置 |
JP4398786B2 (ja) * | 2003-07-23 | 2010-01-13 | 東京エレクトロン株式会社 | 塗布方法及び塗布装置 |
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2006
- 2006-01-19 JP JP2006010762A patent/JP4564454B2/ja active Active
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2007
- 2007-01-19 CN CN2007100040225A patent/CN101003041B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002113411A (ja) * | 2000-10-10 | 2002-04-16 | Tokyo Ohka Kogyo Co Ltd | 塗布方法 |
JP2002153795A (ja) * | 2000-11-16 | 2002-05-28 | Advanced Color Tec Kk | 枚葉基板の製造方法および塗布装置 |
JP2005244155A (ja) * | 2004-01-30 | 2005-09-08 | Tokyo Electron Ltd | 浮上式基板搬送処理装置 |
Also Published As
Publication number | Publication date |
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JP2007190483A (ja) | 2007-08-02 |
CN101003041A (zh) | 2007-07-25 |
CN101003041B (zh) | 2010-05-19 |
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