JP4559728B2 - 半導体記憶装置 - Google Patents
半導体記憶装置 Download PDFInfo
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- JP4559728B2 JP4559728B2 JP2003433930A JP2003433930A JP4559728B2 JP 4559728 B2 JP4559728 B2 JP 4559728B2 JP 2003433930 A JP2003433930 A JP 2003433930A JP 2003433930 A JP2003433930 A JP 2003433930A JP 4559728 B2 JP4559728 B2 JP 4559728B2
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7841—Field effect transistors with field effect produced by an insulated gate with floating body, e.g. programmable transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B99/00—Subject matter not provided for in other groups of this subclass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
Description
まず、この発明の第1の実施形態の係る半導体記憶装置について、図1乃至図3を用いて説明する。図1乃至図3に示す半導体記憶装置は、いわゆる、FBC(Floating Body Cell)であり、トランジスタのチャネルボディを記憶ノードとし、その記憶ノードの電位によるトランジスタの電流−電圧特性の違いによりデータ認識を行なうDRAMセルである。
続いて、図4乃至図6を用いて、この発明の第2の実施形態に係る半導体記憶装置について説明する。以下の説明において、上記第1の実施形態と重複する部分の説明は省略する。
続いて、図7乃至図9を用いて、この発明の第3の実施形態に係る半導体記憶装置について説明する。以下の説明において、上記第1、第2の実施形態と重複する部分の説明は省略する。
続いて、図10を用いて、第3の実施形態の変形例に係る半導体記憶装置について説明する。以下の説明において、上記実施形態と重複する部分の説明は省略する。
続いて、図11乃至図13を用いて、この発明の第4の実施形態に係る半導体記憶装置について説明する。以下の説明において、上記実施形態と重複する部分の説明は省略する。
続いて、図14乃至図16を用いて、上記第1の実施形態の変形例に係る半導体記憶装置について説明する。以下の説明において、上記第1の実施形態と重複する部分の説明は省略する。
図17乃至図20を用いて、上記第2の実施形態の変形例に係る半導体記憶装置について説明する。以下の説明において、上記第2の実施形態と重複する部分の説明は省略する。
図21乃至図24を用いて、上記第2の実施形態の変形例に係る半導体記憶装置について説明する。以下の説明において、上記第4の実施形態と重複する部分の説明は省略する。
図25乃至図28を用いて、上記第2の実施形態の変形例に係る半導体記憶装置について説明する。以下の説明において、上記第2の実施形態と重複する部分の説明は省略する。
Claims (4)
- 第1ワード線とビット線との交差位置にそれぞれ設けられ、各々がメモリセルを構成する複数のフィンゲート型のダブルゲートトランジスタを備え、
前記複数のフィンゲート型のダブルゲートトランジスタはそれぞれ、
絶縁膜上の半導体層中に形成され、電気的にフローティング状態のチャネルボディと、
前記半導体層のチャネルボディ上及び対向する側壁に設けられたゲート絶縁膜と、
前記ゲート絶縁膜上に、前記半導体層の一方の側壁から前記半導体層上および他方の側壁に亙って設けられ、前記第1ワード線に電気的に接続されたダブルゲート電極と、
前記半導体層中に前記チャネルボディを挟むように、ビット線方向に隔離して設けられたソース領域およびドレイン領域と、
前記絶縁膜上の前記半導体層中に形成され、電気的にフローティング状態であって、ビット線方向に沿って、前記チャネルボディに接して前記ソース領域下に配置される第1領域と前記第1領域に接続される第2領域とを有する引き出し領域と
を具備することを特徴とする半導体記憶装置。 - 前記メモリセルは、前記チャネルボディを第1電位に設定した第1状態と、前記チャネルボディを第2電位に設定した第2状態とをダイナミックに記憶すること
を特徴とする請求項1に記載の半導体記憶装置。 - 前記ビット線方向に沿って隣接するメモリセルの間に設けられ、隣接するメモリセルを絶縁分離する素子分離膜を更に具備すること
を特徴とする請求項1または2に記載の半導体記憶装置。 - 前記ドレイン領域上に設けられ、前記ビット線とドレイン領域とを電気的に接続するビット線コンタクトと、前記ソース領域上に設けられ、所定の固定電位が印加される共通ソース線コンタクトとを更に具備すること
を特徴とする請求項1乃至3のいずれか1項に記載の半導体記憶装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003433930A JP4559728B2 (ja) | 2003-12-26 | 2003-12-26 | 半導体記憶装置 |
US10/845,403 US7075820B2 (en) | 2003-12-26 | 2004-05-14 | Semiconductor memory device for dynamically storing data with channel body of transistor used as storage node |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2003433930A JP4559728B2 (ja) | 2003-12-26 | 2003-12-26 | 半導体記憶装置 |
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JP2005191451A JP2005191451A (ja) | 2005-07-14 |
JP4559728B2 true JP4559728B2 (ja) | 2010-10-13 |
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JP2003433930A Expired - Fee Related JP4559728B2 (ja) | 2003-12-26 | 2003-12-26 | 半導体記憶装置 |
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JP (1) | JP4559728B2 (ja) |
Families Citing this family (62)
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JP4216483B2 (ja) | 2001-02-15 | 2009-01-28 | 株式会社東芝 | 半導体メモリ装置 |
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TW544911B (en) | 2001-04-26 | 2003-08-01 | Toshiba Corp | Semiconductor device |
JP4053738B2 (ja) | 2001-04-26 | 2008-02-27 | 株式会社東芝 | 半導体メモリ装置 |
EP1288955A3 (en) | 2001-08-17 | 2004-09-22 | Kabushiki Kaisha Toshiba | Semiconductor memory device |
JP4044401B2 (ja) | 2002-09-11 | 2008-02-06 | 株式会社東芝 | 半導体記憶装置 |
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JPH02263473A (ja) * | 1988-11-21 | 1990-10-26 | Hitachi Ltd | 半導体装置及び半導体記憶装置 |
JPH1056183A (ja) * | 1996-06-07 | 1998-02-24 | Samsung Electron Co Ltd | Sio素子及びその製造方法 |
JPH10107215A (ja) * | 1996-09-30 | 1998-04-24 | Fujitsu Ltd | 強誘電体記憶装置 |
JP2002343886A (ja) * | 2001-03-15 | 2002-11-29 | Toshiba Corp | 半導体メモリ装置 |
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JP2003332584A (ja) * | 2002-03-05 | 2003-11-21 | Semiconductor Energy Lab Co Ltd | トランジスタ |
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US7075820B2 (en) | 2006-07-11 |
JP2005191451A (ja) | 2005-07-14 |
US20050141262A1 (en) | 2005-06-30 |
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