JP4514140B2 - 基板処理装置及び基板処理方法 - Google Patents

基板処理装置及び基板処理方法 Download PDF

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Publication number
JP4514140B2
JP4514140B2 JP2005054750A JP2005054750A JP4514140B2 JP 4514140 B2 JP4514140 B2 JP 4514140B2 JP 2005054750 A JP2005054750 A JP 2005054750A JP 2005054750 A JP2005054750 A JP 2005054750A JP 4514140 B2 JP4514140 B2 JP 4514140B2
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JP
Japan
Prior art keywords
substrate
liquid
processing
rinsing liquid
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005054750A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006245051A (ja
Inventor
和男 上代
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd, Dainippon Screen Manufacturing Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2005054750A priority Critical patent/JP4514140B2/ja
Priority to TW095102440A priority patent/TWI274607B/zh
Priority to KR1020060015755A priority patent/KR100740407B1/ko
Priority to CNB2006100086900A priority patent/CN100378914C/zh
Publication of JP2006245051A publication Critical patent/JP2006245051A/ja
Application granted granted Critical
Publication of JP4514140B2 publication Critical patent/JP4514140B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J27/00—Cooking-vessels
    • A47J27/12—Multiple-unit cooking vessels
    • A47J27/13—Tier cooking-vessels
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J27/00—Cooking-vessels
    • A47J27/002—Construction of cooking-vessels; Methods or processes of manufacturing specially adapted for cooking-vessels
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S220/00—Receptacles
    • Y10S220/912—Cookware, i.e. pots and pans

Landscapes

  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
JP2005054750A 2005-02-28 2005-02-28 基板処理装置及び基板処理方法 Expired - Fee Related JP4514140B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005054750A JP4514140B2 (ja) 2005-02-28 2005-02-28 基板処理装置及び基板処理方法
TW095102440A TWI274607B (en) 2005-02-28 2006-01-23 Apparatus and method of treating substrate
KR1020060015755A KR100740407B1 (ko) 2005-02-28 2006-02-17 기판 처리 장치 및 기판 처리 방법
CNB2006100086900A CN100378914C (zh) 2005-02-28 2006-02-21 基板处理装置以及基板处理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005054750A JP4514140B2 (ja) 2005-02-28 2005-02-28 基板処理装置及び基板処理方法

Publications (2)

Publication Number Publication Date
JP2006245051A JP2006245051A (ja) 2006-09-14
JP4514140B2 true JP4514140B2 (ja) 2010-07-28

Family

ID=36947126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005054750A Expired - Fee Related JP4514140B2 (ja) 2005-02-28 2005-02-28 基板処理装置及び基板処理方法

Country Status (4)

Country Link
JP (1) JP4514140B2 (zh)
KR (1) KR100740407B1 (zh)
CN (1) CN100378914C (zh)
TW (1) TWI274607B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4502854B2 (ja) * 2005-03-22 2010-07-14 株式会社高田工業所 基板の処理装置及び処理方法
JP4850775B2 (ja) * 2007-05-07 2012-01-11 大日本スクリーン製造株式会社 基板処理装置
JP2009147260A (ja) * 2007-12-18 2009-07-02 Dainippon Screen Mfg Co Ltd 基板処理装置
EP2133636B1 (en) * 2008-06-09 2012-01-25 Consejo Superior De Investigaciones Científicas Absorber and absorber-evaporator assembly for absorption machines and lithium bromide - water absorption machines that integrate said absorber and absorber-evaporator assembly
KR101086517B1 (ko) 2008-10-15 2011-11-23 다이니폰 스크린 세이조우 가부시키가이샤 기판 처리 장치
JP6329380B2 (ja) * 2014-02-07 2018-05-23 株式会社ジャパンディスプレイ 液晶表示装置の製造方法および製造装置
JP6658195B2 (ja) * 2016-03-28 2020-03-04 大日本印刷株式会社 エッチング方法およびエッチング装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004074021A (ja) * 2002-08-19 2004-03-11 Dainippon Screen Mfg Co Ltd 基板処理装置及び基板洗浄ユニット
JP2004095926A (ja) * 2002-09-02 2004-03-25 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2004273743A (ja) * 2003-03-07 2004-09-30 Shibaura Mechatronics Corp 基板の洗浄処理装置及び洗浄処理方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3323385B2 (ja) * 1995-12-21 2002-09-09 大日本スクリーン製造株式会社 基板洗浄装置および基板洗浄方法
JP3517585B2 (ja) 1998-04-23 2004-04-12 株式会社アドバンスト・ディスプレイ 液晶表示パネルの製造方法およびこれに用いられる洗浄装置
JP3185753B2 (ja) * 1998-05-22 2001-07-11 日本電気株式会社 半導体装置の製造方法
FR2797405B1 (fr) * 1999-08-12 2001-10-26 Coillard Sa Ets Bac de rincage a liquide ultra propre
KR20010018028A (ko) * 1999-08-17 2001-03-05 윤종용 커버에 분사 노즐이 구비된 웨이퍼 세척 장치
JP2004273984A (ja) * 2003-03-12 2004-09-30 Dainippon Screen Mfg Co Ltd 基板処理方法および基板処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004074021A (ja) * 2002-08-19 2004-03-11 Dainippon Screen Mfg Co Ltd 基板処理装置及び基板洗浄ユニット
JP2004095926A (ja) * 2002-09-02 2004-03-25 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2004273743A (ja) * 2003-03-07 2004-09-30 Shibaura Mechatronics Corp 基板の洗浄処理装置及び洗浄処理方法

Also Published As

Publication number Publication date
TW200630169A (en) 2006-09-01
CN100378914C (zh) 2008-04-02
JP2006245051A (ja) 2006-09-14
CN1828826A (zh) 2006-09-06
KR20060095464A (ko) 2006-08-31
KR100740407B1 (ko) 2007-07-16
TWI274607B (en) 2007-03-01

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