JP4498862B2 - 塗布方法及び塗布装置 - Google Patents

塗布方法及び塗布装置 Download PDF

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Publication number
JP4498862B2
JP4498862B2 JP2004257052A JP2004257052A JP4498862B2 JP 4498862 B2 JP4498862 B2 JP 4498862B2 JP 2004257052 A JP2004257052 A JP 2004257052A JP 2004257052 A JP2004257052 A JP 2004257052A JP 4498862 B2 JP4498862 B2 JP 4498862B2
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Japan
Prior art keywords
substrate
coating
nozzle
unit
stage
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Expired - Fee Related
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JP2004257052A
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Japanese (ja)
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JP2006068673A (ja
JP2006068673A5 (cg-RX-API-DMAC7.html
Inventor
公男 元田
文彦 池田
幸男 豊良
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication of JP2006068673A5 publication Critical patent/JP2006068673A5/ja
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  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2004257052A 2004-09-03 2004-09-03 塗布方法及び塗布装置 Expired - Fee Related JP4498862B2 (ja)

Priority Applications (1)

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JP2004257052A JP4498862B2 (ja) 2004-09-03 2004-09-03 塗布方法及び塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004257052A JP4498862B2 (ja) 2004-09-03 2004-09-03 塗布方法及び塗布装置

Publications (3)

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JP2006068673A JP2006068673A (ja) 2006-03-16
JP2006068673A5 JP2006068673A5 (cg-RX-API-DMAC7.html) 2006-11-02
JP4498862B2 true JP4498862B2 (ja) 2010-07-07

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JP2004257052A Expired - Fee Related JP4498862B2 (ja) 2004-09-03 2004-09-03 塗布方法及び塗布装置

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5246857B2 (ja) * 2008-06-27 2013-07-24 東レエンジニアリング株式会社 塗布装置
JP2011013321A (ja) * 2009-06-30 2011-01-20 Hoya Corp フォトマスクブランクの製造方法、フォトマスクの製造方法及び塗布装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61147234A (ja) * 1984-12-20 1986-07-04 Fujitsu Ltd 偏光板のラミネ−ト方法
JPH06339665A (ja) * 1993-05-31 1994-12-13 Yokohama Rubber Co Ltd:The 壁面塗装工法
JP3245813B2 (ja) * 1996-11-27 2002-01-15 東京エレクトロン株式会社 塗布膜形成装置
WO1999034929A1 (en) * 1998-01-09 1999-07-15 Fastar, Ltd. System and method for cleaning and priming extrusion head
JP2001276721A (ja) * 2000-03-29 2001-10-09 Konica Corp 塗布方法
JP4325084B2 (ja) * 2000-06-19 2009-09-02 東レ株式会社 塗布方法およびそれを用いたカラーフィルタの製造方法
JP4198944B2 (ja) * 2002-06-04 2008-12-17 大日本スクリーン製造株式会社 基板処理装置

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JP2006068673A (ja) 2006-03-16

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