JP4496842B2 - マスクケース - Google Patents

マスクケース Download PDF

Info

Publication number
JP4496842B2
JP4496842B2 JP2004138617A JP2004138617A JP4496842B2 JP 4496842 B2 JP4496842 B2 JP 4496842B2 JP 2004138617 A JP2004138617 A JP 2004138617A JP 2004138617 A JP2004138617 A JP 2004138617A JP 4496842 B2 JP4496842 B2 JP 4496842B2
Authority
JP
Japan
Prior art keywords
inclined surface
locking tool
photomask substrate
main body
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004138617A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005321529A (ja
Inventor
森作 斎藤
忠三郎 大塚
Original Assignee
株式会社荒川樹脂
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社荒川樹脂 filed Critical 株式会社荒川樹脂
Priority to JP2004138617A priority Critical patent/JP4496842B2/ja
Priority to TW93114155A priority patent/TW200536760A/zh
Publication of JP2005321529A publication Critical patent/JP2005321529A/ja
Application granted granted Critical
Publication of JP4496842B2 publication Critical patent/JP4496842B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2004138617A 2004-05-07 2004-05-07 マスクケース Expired - Fee Related JP4496842B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004138617A JP4496842B2 (ja) 2004-05-07 2004-05-07 マスクケース
TW93114155A TW200536760A (en) 2004-05-07 2004-05-19 Mask case

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004138617A JP4496842B2 (ja) 2004-05-07 2004-05-07 マスクケース

Publications (2)

Publication Number Publication Date
JP2005321529A JP2005321529A (ja) 2005-11-17
JP4496842B2 true JP4496842B2 (ja) 2010-07-07

Family

ID=35468881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004138617A Expired - Fee Related JP4496842B2 (ja) 2004-05-07 2004-05-07 マスクケース

Country Status (2)

Country Link
JP (1) JP4496842B2 (cs)
TW (1) TW200536760A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI847461B (zh) * 2021-12-29 2024-07-01 美商恩特葛瑞斯股份有限公司 用於光罩盒之蓋或基底板之容器、及儲存光罩盒之蓋或基底板之方法

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4667018B2 (ja) * 2004-11-24 2011-04-06 ミライアル株式会社 レチクル搬送容器
JP4581681B2 (ja) * 2004-12-27 2010-11-17 株式会社ニコン レチクル保護装置および露光装置
JP2008032915A (ja) * 2006-07-27 2008-02-14 Hoya Corp マスクケース
KR100858634B1 (ko) 2007-09-20 2008-09-17 비아이 이엠티 주식회사 마스크 보관 케이스
DE102007047186B4 (de) * 2007-10-02 2014-01-09 Carl Zeiss Sms Gmbh Aufnahmevorrichtung zur Aufnahme einer Photolithographiemaske
KR101511599B1 (ko) * 2007-12-20 2015-04-14 주식회사 에스앤에스텍 마스크 컨테이너
JP5005778B2 (ja) * 2010-02-15 2012-08-22 家登精密工業股▲ふん▼有限公司 レチクルポッド
JP5318060B2 (ja) * 2010-09-29 2013-10-16 ヒロパックス株式会社 半導体ウエハーの収納容器
JP5843190B2 (ja) * 2011-06-29 2016-01-13 株式会社荒川樹脂 マスクケースのマスク係止具
US20200144086A1 (en) * 2018-11-07 2020-05-07 Entegris, Inc. Reticle support for a container
TWI770791B (zh) * 2021-01-28 2022-07-11 家登精密工業股份有限公司 具有快拆式支撐機構之光罩盒

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI847461B (zh) * 2021-12-29 2024-07-01 美商恩特葛瑞斯股份有限公司 用於光罩盒之蓋或基底板之容器、及儲存光罩盒之蓋或基底板之方法

Also Published As

Publication number Publication date
JP2005321529A (ja) 2005-11-17
TW200536760A (en) 2005-11-16
TWI339635B (cs) 2011-04-01

Similar Documents

Publication Publication Date Title
JP4496842B2 (ja) マスクケース
KR101142957B1 (ko) 기판 수납 케이스
KR101472145B1 (ko) 기판 수납 용기
TWI438855B (zh) A retainer and a substrate storage container including a retainer
TW416091B (en) Storage container for precision substrates
JP2010079109A (ja) マスクブランク収納ケース及びマスクブランクの収納方法、並びにマスクブランク収納体
JP4667018B2 (ja) レチクル搬送容器
JP6050981B2 (ja) マスクブランク収納ケース、及びマスクブランク収納体
JP4025973B2 (ja) マスクケース
TWI755795B (zh) 具有導位構件的光罩盒
JP2006173273A (ja) レチクル搬送容器
JP5843190B2 (ja) マスクケースのマスク係止具
JP5416154B2 (ja) 基板収納容器、膜付きガラス基板収納体、マスクブランク収納体、および転写マスク収納体
JP5094093B2 (ja) 基板収納容器
KR102125579B1 (ko) 마스크 블랭크 수납 케이스 및 마스크 블랭크 수납체
JP5449974B2 (ja) 精密基板収納容器
JP4357048B2 (ja) 精密基板収納容器
JP3893642B2 (ja) マスク用収納容器
KR101067200B1 (ko) 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크 수납체
JP3210526U (ja) 内視鏡ケース
JP4668053B2 (ja) リテーナ及び基板収納容器
JP2007145397A5 (cs)
KR20240102865A (ko) 기판 수납 케이스 및 기판 수납체
JP2001240179A (ja) 精密基板収納容器
JPH11278659A (ja) 基板収納ケース

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070501

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20091110

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091211

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100309

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100405

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130423

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4496842

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees