JP4496842B2 - Mask case - Google Patents

Description

  The present invention is a case for storing or transporting a photomask substrate used for manufacturing a semiconductor element, a liquid crystal display element or the like, which can be placed firmly and has a photomask surface, that is, a surface provided with a mask pattern or patterning. The present invention relates to a mask case that can be stored in the case without contacting the front surface.

Conventionally, with respect to a mask substrate used in a manufacturing process of a semiconductor integrated circuit or the like, for example, a photomask substrate used in a photolithography process or the like for manufacturing a semiconductor element or a liquid crystal display element, the substrate surface is extremely disliked. The mask case for storing it during its storage or transportation is mainly used for preventing dust from adhering to or scratching the photomask substrate.
That is, dust adhesion or scratches on the photomask substrate are defects of the photomask, which are reproduced on the photoresist, and destroy the normal function of the device when incorporated in a microelectronic device as it is. Various measures have been taken to prevent these problems.
For example, when handling the photomask substrate, do not touch any surface other than the end face, handle it carefully so that it does not get dusty when stored, and in the mask case The storage is performed with care so that dust does not enter, and further, the dust does not enter into the max case after storage.

Furthermore, a photomask substrate with a mask pattern is supported by a frame with an optically transparent thin film typified by pellicle, that is, nitrocellulose, to prevent dust adhesion and scratches on the mask pattern surface. It is.
In this case, in order to avoid contact with the mask pattern surface as much as possible, for example, there is a configuration shown in FIGS. 7 and 8 of JP-A-2001-301877.
The mask support that is this locking tool has a required number of holding branches protruding from the inner surfaces of the main body and the lid, and a photomask substrate is placed on this portion. It consists of a holding branch having a base plate having an inclined plane on the trunk or a holding branch having a hat on the trunk.
In addition, since the photomask uses a synthetic quartz plate or the like, the photomask substrate in the mask case and the mask support that is the locking tool are displaced due to an impact when stored and transported in the mask case. The mask support is rubbed, and this locking tool is scraped off, and dust is generated, and fine dust is generated in the case and may adhere to the photomask substrate and cause serious damage. There is also.

For this reason, Japanese Patent Application Laid-Open No. 2003-222992 discloses a configuration for preventing contact with the photomask substrate and preventing displacement when the photomask substrate is stored. This configuration uses a locking tool having an inclined surface with respect to this locking tool, and the locking tool in the opening direction of the main body is disposed so that the inclined surface gradually becomes lower toward the center of the case. The direction locking device is disposed so that the inclined surface gradually becomes lower toward the case opening, and further, the locking device in the opening direction of the lid gradually moves the inclined surface toward the case back direction. Arranged so that the locking device in the back direction of the lid gradually lowers the inclined surface toward the center of the case, and when the lid is closed, the ridgeline part of the photomask is vertically oriented In addition, the mask case is pressed from the front, rear, left and right directions.
JP 2001-301877 A JP 2003-222992 A

First, regarding JP 2001-301877, a contact portion with a photomask is used as a cap portion to make the contact surface as small as possible, but at least this portion is in contact with the surface of the photomask. Contamination and scratches are inevitable.
That is, for example, it may occur that an index mark portion or the like other than a pellicle of a photomask substrate on which a mask pattern is provided is touched.
Furthermore, it is a support at the point of the cap portion, and there is a possibility that the internal photomask is shaken by an impact at the time of transportation or the like and is displaced from the holding branch portion.
Therefore, the contact surface of the cap portion is enlarged due to the shift and there is a risk of breakage, and it comes into contact with a positioning member that positions the photomask substrate such as a rib or a holding branch portion, and this portion There was a risk that dust would be generated by rubbing and scraping.

In contrast, JP 2003-222992 is different from this in that the ridge line portion of the photomask is pressed in the front-rear and left-right directions with a locking tool having an inclined surface from the vertical direction. Because it is not in contact and is pressed from the vertical direction to the front / rear / left / right direction, it is difficult for the internal photomask to be shaken by impact during transportation, and even if it is displaced, the contact portion with the ridgeline portion of the photomask is shifted. Therefore, it is not in contact with the surface of the photomask.
However, it is positioned at a fixed position with a total of 8 points from the vertical direction to the front / rear / left / right direction, and it can prevent the photomask from shifting against moderate impacts, but if it is shaken by an extremely large force, it will inevitably be a photo. There is a risk of mask displacement. There are a total of 4 presses in the front and rear direction on the top and bottom surfaces, and a total of 4 presses in the left and right direction on the top and bottom surfaces. The presser is put in places, and there is a possibility that a slight shift occurs in the tilt direction.

Therefore, when it is extremely shaken, etc., it will come into contact with a positioning member that positions the photomask substrate, such as a rib or a locking tool, etc. There was also.
Furthermore, when a ridgeline part of a photomask is pressed against a locking tool having an inclined surface, and a soft member is used for the locking tool, the inclined surface is recessed by the pressing force with the lid closed, There is also a possibility that the inclined surface is in contact with the surface of the mask slightly.
Therefore, there is a possibility that the index mark applied to the end portion of the surface of the photomask does not necessarily come into contact.

In particular, with respect to photomasks, extremely fine patterning is required in the manufacture of semiconductor elements, liquid crystal display elements, etc., and accordingly, the presence of extremely fine dust becomes a problem as compared with the prior art. It is required to eliminate the contact of as much as possible.
That is, in the case where a mask pattern is provided on a photomask substrate, the pattern surface should not be contaminated, and further, the surface of blanks which are mask substrates before patterning of the photomask substrate. Is required to be flat and smooth and should not be contaminated.
In particular, blanks for LSI use have a light-reflective film with a single-layer structure of chrome, a surface-reflective structure, and a low-reflective structure on the front and back surfaces. The low-reflective film is made of chromium oxide, reducing the reflectivity due to interference. ing.
In such a chrome blank substrate, the surface contamination is extremely disliked, so that it should not touch any part other than the end face.

Therefore, in order to store such a substrate in a mask case, it is necessary to wear an approved finger cover and gloves in a strict clean room and work without touching anything other than the end face. In addition, it is required not to touch any part other than the end face of the board, and it is necessary to take some measures so as not to generate dust generated by cutting a part of the container based on the fine movement of the board due to vibration during transportation. Therefore, it is required that dust generation in the container be avoided as much as possible for any photomask substrate in a blank state and a mask pattern state.
Furthermore, it is desirable to have a structure that does not touch the front and back surfaces other than the end face of the photomask substrate including the portion where the index mark is provided or applied as well as the pellicle placement portion of the photomask substrate provided with the blanks and the mask pattern. ing.

The present invention solves the above-described problems, and can provide a mask case that can be stored without touching the surface portion of the photomask substrate and can control the fine movement of the photomask substrate during storage. It is what.
Therefore, the invention according to claim 1 relates to a mask case that houses a photomask substrate 9 having a main body 1 and a lid 2 that closes an opening of the main body. The locking tool 3 to be stopped is composed of a substantially L-shaped locking tool 3 for mounting and locking the photomask substrate 9 in the vicinity of one corner in each corner direction of the photomask substrate 9. The substantially L-shaped locking tool 3 includes at least the inclined surface 30 in contact with the ridgeline surface 91 of the photomask substrate 9 and both end directions of both substantially L-shaped projecting portions of the locking tool 3 connected thereto. Main body pressing projections 31 in the protruding portions of the substantially L-shaped locking tool 3, and the photomask substrate 9 is arranged in the side direction, the opening direction and the side direction by the locking tool 3. The ridgeline surface 91 is pushed by the inclined surface 30 from the two directions of the hinge direction toward the center. The lid body 2 has the lid body locking tool 4 having the inclined surface 40, and the inclined surface 40 has a thick shape 420 provided continuously to the lid body locking tool base 41. A curved surface 42 and a slightly thin-walled bent portion 43 connected to the curved surface 42, and the ridgeline surface 91 of the photomask substrate is in contact with the thick-walled shape 420 portion of the inclined surface 40. The ridgeline surface 91 of the photomask substrate 9 is suppressed, and the photomask substrate 9 is substantially L-shaped by closing the lid 2 after the photomask substrate 9 is placed and locked on the locking tool 3 of the main body 1. A mask case that is accommodated by being held in contact with and pressed only at the ridgeline portion 91 of the photomask substrate 9 by the inclined surface 30 of the shaped locking device 3 and the inclined surface 40 of the lid locking device 4. The above problem can be solved.

Next, the invention according to claim 2 has a rib 7 disposed in parallel with the inclined surface 30 of the locking tool 3 in the main body 1, and the inclination angle of the rib 7 in the mounting direction of the photomask substrate 9. Is a position where the inclination is steeper than the inclination angle of the inclined surface 30 of the locking tool 3 adapted to the ridgeline surface 91 of the photomask substrate 9 and at least at a position from the photomask substrate 9. This is a mask case in which the rib 7 is disposed at a position where the rib 7 does not contact, and the above-described problems can be solved by the invention.
Next, the invention according to claim 3 is the same as the ridgeline surface 91 of the photomask substrate 9 in which the inclined surface 30 is connected to the main body protrusion pressing portions 31 at both ends of each projecting portion constituting a substantially L shape. The third inclined surface 32 having an inclination angle and the second inclined surface 33 connected to the third inclined surface 32 and having a gentler angle than the third inclined surface 32, the third inclined surface A mask case in which the surface 32 is in contact with the ridgeline surface 91 of the photomask substrate 9, and such an invention may be used.
In this case, the invention according to claim 4 is a mask case in which the inclination angle of the third inclined surface 32 is an inclination angle within plus or minus 15 degrees from the inclination angle of the ridgeline surface 91 of the photomask substrate 9. May be used.

Further, as in the invention according to claim 5, the mask having the first inclined surface 34 in which the locking tool 3 is connected to the second inclined surface 33 and has an inclination angle relative to the second inclined surface 33. A case may be used.
Alternatively, as in the invention according to claim 6, a mask case in which the locking tool 3 is provided continuously with the first inclined surface 34 and has the uppermost lowermost surface 35 may be used.
In addition to these, as in the invention according to claim 7, in place of the substantially L-shaped locking tool 3, a locking tool 3 in which two substantially rod-shaped locking tools 3 are arranged to face each other by approximately 90 degrees. Even in the mask case used, or as in the invention according to claim 8, it is a mask case that uses a substantially square-shaped locking tool 3 instead of the substantially L-shaped locking tool 3, and has a substantially rectangular shape. A mask case may be used in which the two adjacent sides constitute the main body protrusion pressing portion 31 and the inclined surface 30 connected thereto is the inclined surface 30 in contact with the ridge line surface 91 of the photomask substrate 9.

With this configuration, the locking tool is held and locked in contact with the ridgeline surface of the photomask substrate, so that the photomask substrate can be placed without touching the surface of the photomask substrate. The surface of the photomask substrate is scratched or soiled by the contact of the locking tool in any case of so-called blanks which are mask substrates before patterning or photomasks subjected to patterning. The first effect is that it can be prevented.
Furthermore, by using the mask case using the locking tool according to the present invention, the stored photomask substrate can be pressed from two directions in one corner direction, and eight directions with respect to one photomask substrate. Therefore, there is a second effect that the photomask substrate can be prevented from being displaced or slightly moved during storage.

This means that it is possible to prevent the generation of dust caused by contact with a portion of the container body due to displacement or fine movement of the photomask substrate and scraping off this portion, and the dust in the mask case adheres to the photomask substrate. Can be prevented with a very high probability, and serious damage to the photomask substrate can be prevented.
Furthermore, by using a mask case using a lid locking tool for the lid according to the present invention, a ridge line surface of the photomask substrate generated when the photomask substrate is pressed in the lid locking tool when the lid is closed, and There is a third effect that deformation of the lid locking tool in the vicinity of the contacting portion can be prevented, and contact of the deformed portion of the lid locking tool to the surface of the photomask substrate can be prevented.

Next, an example of the best mode of the present invention is shown in FIG.
First, a photomask case 1 for storing or transporting a photomask substrate 9 used for manufacturing a semiconductor element, a liquid crystal display element or the like, and this figure shows a state in which the photomask 9 is stored. .
That is, a mask substrate used in a manufacturing process of a semiconductor integrated circuit or the like, for example, a photomask substrate used in a photolithography process or the like for manufacturing a semiconductor element, a liquid crystal display element or the like, and a so-called blank substrate which is a mask substrate before patterning. And a photomask case for storing and carrying a patterned photomask.
The configuration shown in this figure shows a state in which the lid 2 is closed with the photomask 9 stored.
In this case, the mask in the photomask case is mounted at the four corners of the photomask 9 by the substantially L-shaped locking tool 3 of the main body 1, and the locking tool 3 further has an inclined surface 30. The ridge line portion 91 of the photomask 9 is in contact with the inclined surface 30.

Accordingly, in the main body 1, the four corners of the photomask 9 are respectively pressed in two directions, that is, from the side portion direction toward the center portion direction, and at the same time, the locking tool 3 moves the photomask 9 toward the center portion direction. The position of the mask 9 is restricted.
The main body also has a rib 7.
Further, in the lid body 2, the lid body locking tool 4 is arranged in parallel to both the wall portion having the opening portion and the wall portion having the hinge portion, and when the lid body is closed, the photomask 9 is closed. Will be pressed from above.
In this case, since the lid locking member 4 similarly has the inclined surface 40, the ridge line portion 91 of the photomask 9 is in contact with the inclined surface 40.
Accordingly, the front and back surfaces of the photomask 9 are not in contact with the locking tool 3 and the lid locking tool 4, and come into contact only at the ridge line portion 91 of the photomask 9.

As a result, the photomask 9 can be stored and held in the case without touching the front and back surfaces of the photomask 9 at all.
Although this is absolutely necessary when using a photomask regardless of before and after patterning of the photomask 9, conventionally, only a portion to be patterned is not touched as much as possible in relation to the locking tool. Although it was requested, an index mark is also given at present, and this index mark is applied to the four corners of the surface of the photomask unlike patterning. It is necessary to avoid providing a contact object.
In particular, there are various photomask sizes, blanked areas, patterning surface areas, etc. In addition, considering manufacturing errors, etc., contact the case locking tool etc. on all the front and back sides of the photomask. This should not be allowed, and this configuration can achieve this.
Furthermore, the main body locking tool 3 enables the ridgeline 91 of the photomask 9 to be pressed from eight directions toward the central portion, and the photomask 9 in the case is fixed in place and moved. Can be prevented.

This prevents the photomask 9 in the case from moving even slightly.
That is, the storage mask substrate 9 is brought into contact with the locking members 3, 4, the ribs 7, etc. of the case due to the fine movement of the storage mask substrate 9 due to the shaking of the case itself during storage or storage. Dust generated by scraping the locking members 3 and 4 and the rib 7 of the case must be prevented, but this configuration can prevent all of them.
At present, it is hard to prevent fine dust that cannot be visually recognized from adhering to the surface of the photomask. Under the present circumstances, it is possible to prevent the generation of extremely fine dust that is scraped off by the vibration of the photomask. Defects on reproduction on the photoresist film due to the adhesion of fine dust on the light shielding film surface of the mask and on the pellicle can be prevented.

FIG. 2 is a diagram showing a state in which the main body 1 is visually recognized by opening the lid 2 of the mask case, and is a diagram showing an arrangement state of the locking tool 3 of the main body 1.
In the direction of the opening having the closing slider 6 of the main body 1, the locking tool 3 is disposed at both corners of the mask substrate 9 when the mask substrate 9 is placed, and further in the direction having the hinge 5. Thus, the locking tools 3 are also provided at both corners of the mask substrate 9 when the mask substrate 9 is placed.
In this case, the mask substrate 9 is locked by the substantially L-shaped locking tool 3, and the substantially L-shaped locking tool 3 includes an inclined surface 30 on the upper surface of each protrusion. Therefore, the inclined surface 30 comes into contact with the ridge line portion 91 of the mask substrate 9, and the mask substrate 9 can be locked by the ridge line portion 91.
Further, with this configuration, the mask substrate 9 is pressed and positioned at each of the four corners of the mask substrate 9 so that the mask substrate 9 can be placed in a fixed position.
In this case, the mask substrate 9 is not displaced or swayed on the locking tool 3 even when the case is shaken because the case is shaken because it is held in a total of 8 places.

The main body 1 has ribs 7 in the direction of both ends of the mask substrate 9 from the direction of the walls toward the center. This is for confirmation.
Accordingly, the ribs 7 shown in the figure are arranged so as not to contact the mask substrate 9 when stored, and in particular for the convenience of insertion and removal of the mask substrate 9, and further increase the strength of the main body. .
The position of the rib 7 shown in the figure is an example, and is not limited to the position in the figure. However, it is necessary that the rib 7 is not in contact with the mask substrate 9 when stored. is there.
In addition, a mask pattern-applied portion 92 is provided at the center of the surface of the mask substrate 9, and a pellicle is provided in this portion, and index marks 93 are attached to the four corners.
FIG. 3 is a diagram showing an example of the arrangement state of the lid locking device 4 of the lid 2, and is a diagram showing a state in which the lid 2 of the mask case is opened to expose the surface of the lid. .
First, when the lid body 2 is closed, the lid body locking tool 4 is disposed at a position in contact with the ridgeline 91 of the mask substrate 9 placed on the main body. The ridgeline 91 of the substrate 9 is disposed in the facing direction.

This lid body locking tool 4 has an upper surface constituted by an inclined surface 40, and the inclined surface 40 comes into contact with the ridgeline 91 of the mask substrate 9.
The lid body locking tool 4 shown in this figure is parallel to the wall portion of the lid body 2 in the direction of the opening portion having the closing slider conducting path 61 and is disposed one by one in the direction of the both side walls of the case. The lid 2 is parallel to the hinged wall portion having the hinges and is arranged one by one on the both side walls of the case.
Therefore, when the lid locking device 4 is disposed on the lid 2 at a total of four locations and the lid 2 is closed, the ridgeline 91 of the mask substrate 9 is pressed by the lid locking device 4 from above. Thus, the displacement and fine movement of the mask substrate 9 are prevented.
With respect to the location and orientation of the lid locking member 4 shown in this figure, an example of the present invention is shown, and the present invention is not limited to the form shown in this figure.
FIG. 4 is a cross-sectional view showing a state in which the mask substrate 9 is locked by the locking tool 3 of the main body 1 and the lid locking tool 4 of the lid 2. First, the inclination of the locking tool 3 of the main body 1 is shown. A state is shown in which the mask substrate 9 is placed on the surface 30 and the mask substrate 9 is pressed by the lid locking device 4 from above.

First, the mask substrate 9 has front and back surfaces and side surfaces 90.
A ridgeline 91 is provided between the side surface 90 and the front and back surfaces.
On the other hand, in the locking tool 3 of the main body 1, the third inclined surface 32 connected to the main body protrusion pressing portion 31, the second inclined surface 33 connected to the third inclined surface 33, and further to this. The first inclined surface 34 and the uppermost lowermost surface 35 are provided.
First, considering the uppermost lowermost surface 35 as a reference, the uppermost lowermost surface 35 is a surface located at the lowermost part constituting the main body of the locking device 3, and it does not matter whether it is a flat surface or an inclined surface.
For example, when the mask substrate 9 is placed on the back side, that is, in the direction having the hinge 5, when the mask substrate 9 is slid into the lock tool 3, the ridgeline 91 of the mask substrate 9 is After touching the surface, the mask substrate 9 can be guided to a fixed position along the surface along the first inclined surface 34 to the third inclined surface 32 sequentially.
The first inclined surface 34 following the uppermost lowermost surface 35 is formed of an inclined surface having a slight inclination angle, and the ridgeline of the mask substrate 9 is further along the second inclined surface 33 and the third inclined surface along this surface. 32, the mask substrate 9 can be guided to a fixed position.

The configuration of the first inclined surface 34 shown in this figure is about 20 degrees, but is not limited to this angle.
What is necessary is just to have an angle that can guide the mask substrate 9 to a fixed position without touching at least the mask surface.
The second inclined surface 33 that follows the first inclined surface 34 is an inclined surface that is gentler than the first inclined surface 34, and may be at least an angle that does not touch the mask surface when the mask is placed. Accordingly, the angle may be any angle that can support the ridgeline 91 of the mask surface from below.
In this drawing, the second inclined surface 33 is configured to have an inclination angle of 5 degrees. However, the second inclined surface 33 is not limited to this angle, and may have an optimum angle as appropriate.
In addition, when supporting the ridgeline surface of a mask surface with the 3rd inclined surface 32, it is not necessary to support from the lower part.
Next, the second inclined surface 33 is followed by a third inclined surface 32. The inclined surface is a surface in contact with the ridge line surface 91 of the mask substrate 9, and is substantially equal to the angle of the ridge line surface 91 of the mask substrate 9. It is optimal to have a similar angle.

For example, when the two angles coincide with each other, the third inclined surface 32 and the ridge line surface 91 of the mask substrate 9 are in contact with each other, and the mask substrate 9 is supported at this portion.
Even if the angle is slightly different, the mask substrate 9 can be supported by the third inclined surface 32 and a part of the ridgeline surface 91 of the mask substrate 9 or a corner of the ridgeline surface, and the slight difference is sufficient. Is acceptable.
Although the example in which the inclination angle of the third inclined surface 32 shown in the figure is configured to be about 50 degrees is shown, any inclination angle of about 40 degrees to 60 degrees may be used, for example, an angle of 45 degrees or the like. Of course it may be.
Therefore, it has an inclination angle having an angle that matches at least the angle of the ridge line surface 91 of the mask substrate 9, that is, an angle that is the same as the angle of the ridge line surface 91 of the mask substrate 9 or in the range of about plus or minus 15 degrees of the angle. If it is.
Next, the lid body locking tool 4 of the lid body 2 has a curved surface 42 connected to the lid body locking tool base 41 and is thick at a portion 420 of the curved surface contacting the ridge line surface of the mask substrate. It has a shape, and has a slightly thin and thick bent portion 43 in a portion provided continuously to the shape.

Therefore, in the portion that contacts the ridgeline surface 91 of the mask substrate 9, the lid locking member 4 is difficult to be deformed, and the ridgeline surface 91 of the mask substrate 9 is elastically applied from above by the bending portion 43. It will be something to suppress.
This is because when the lid locking member 4 is used as a pressing member, for example, if a slightly soft resin member is used, the pressing member is recessed at a portion in contact with the ridge line surface 91 of the mask substrate 9. Both end direction surfaces are easily deformed to form a protruding shape, which may inadvertently come into contact with the surface of the mask substrate 9, and this did not prevent the mask surface from becoming dirty or scratched. Therefore, such harmful effects can be prevented.
Therefore, even when the index marks 93 are provided at the four corners of the mask substrate 9, the lid locking tool 4 does not come into contact with anything.
FIG. 5 is a top view of the locking tool 3 of the main body 1 shown in FIG.

As shown in this figure, the locking tool 3 shown in FIG. 4 has a substantially L shape, and the inclined surface 30, that is, the main body protrusion pressing portion 31, and the third protrusion portion in both directions in the substantially L-shaped projecting portions. The inclined surface 32, the second inclined surface 33, the first inclined surface 34, and the uppermost lowermost surface 35, and the ridgeline surface 91 of the glass substrate 9 placed in that direction can be locked.
FIG. 6 is a side view of FIG. 4. In each of the substantially L-shaped protrusions, the main body protrusion pressing portion 31, the third inclined surface 32, the second inclined surface 33, and the first in the direction of both ends. The inclined surface 34 and the uppermost lowermost surface 35 are provided.
Accordingly, the corner portion of the mask substrate 9 is placed between the two main body protrusion pressing portions 31, and the mask surface 9 does not touch the locking device 3 and the two locking devices 3 are used. The position of the direction can be regulated.
FIG. 7 is a view showing the shape of the locking tool 3 of the main body 1 shown in FIG. 4 in the bottom direction, and is a view showing an example of the locking tool.

For example, when the main body has a locking projection for locking and fitting, the locking tool 3 can be disposed on the main body 1 by having the fitting hole 38 at the bottom of the locking tool 3 and the figure. If it inserts in three places as shown, the shift | offset | difference and fine movement of the locking tool 3 can be prevented.
8 is a cross-sectional view of the locking device of the main body, and FIG. 9 is another side view of FIG.
FIG. 10 is a view showing another example of the locking device 3 of the main body 1. In each of the substantially L-shaped protrusions, the main body protrusion pressing portion 31 and the third inclined surface 32 from the both end directions. The second inclined surface 33 and the uppermost lowermost surface 35 are configured.
Even if comprised in this way, the mask board | substrate 9 can be hold | maintained effectively and it does not touch a mask surface further.
FIG. 11 is a diagram showing another example of the locking device 3 of the main body 1. In each of the substantially L-shaped projecting portions, the main body protrusion pressing portion 31 and the third inclined surface 32 from both end directions. The second inclined surface 33 is a configuration.
Even if comprised in this way, the mask board | substrate 9 can be hold | maintained effectively and it does not touch a mask surface further.

Therefore, the configuration shown in FIG. 4 is optimal, but is not limited to this configuration. At least the main body projection pressing portion 31 for effectively holding the mask substrate 9 and the mask substrate 9 should be in contact with the ridgeline surface. Any one having three inclined surfaces 32 may be used.
FIG. 12 is a view showing a state in which each of the protruding portions of the substantially L-shaped locking device is divided and two substantially rod-shaped locking devices 3 are arranged to face each other by approximately 90 degrees. .
The substantially L-shaped locking device can be manufactured more easily in terms of manufacturing cost and manufacturing process, but is not limited to this configuration, and the two locking devices 3 divided as shown in the figure are approximately 90. It may be arranged so as to face each other.
In this case as well, each of the locking tools 3 is optimally provided with the main body protrusion pressing portion 31, the third inclined surface 32, the second inclined surface 33, the first inclined surface 34, and the uppermost lowermost surface 35. However, the present invention is not limited to this, and the main body protrusion pressing portion 31, the third inclined surface 32, the second inclined surface 33, and the uppermost lowermost surface 35, or the main body protrusion pressing portion 31 and the first lower surface 35. It may have three inclined surfaces 32.

FIG. 13 is a side view of FIG. 12, and includes a main body protrusion pressing portion 31, a third inclined surface 32, a second inclined surface 33, a first inclined surface 34, and an uppermost lowermost surface 35. Indicates.
FIG. 14 is a view showing another example of a substantially quadrangular shape in a top view instead of the protruding portions of the substantially L-shaped locking tool 3.
Even if comprised in this way, it has similarly the main body protrusion pressing part 31, the 3rd inclined surface 32, the 2nd inclined surface 33, the 1st inclined surface 34, and the uppermost lowermost surface 35, and a mask substrate 9 ridgelines 91 can be locked.
In this case, for example, the bent portion 39 may be configured with a corner, or may be configured with a rounded angle. If the curved portion 39 has a rounded angle corresponding to the rounded angle of the corner of the mask substrate, it is placed. Sometimes it can be installed neatly and can prevent displacement and fine movement.
It may have a round angle different from the round angle of the corner of the mask substrate.

Furthermore, for example, when the mask substrate is configured with a rounded corner, a portion that does not contact a part of the corner may occur, but at a portion that contacts the third inclined surface at another portion. Since it can be held, it can be held in a fixed position at a fixed position.
Also in the case shown in the figure, it is sufficient if it has at least the main body protrusion pressing portion 31 and the third inclined surface 32.
FIG. 15 shows a side view of FIG.
With this configuration, the third inclined surface 32 can be held in contact with the ridgeline surface 91 of the mask substrate 9 and the front and back surfaces of the mask substrate 9 are not touched at all.
In this case, for example, as shown in FIG. 16, the main body protrusion pressing portion 31 and the inclined surface 30 may be formed in a substantially arc shape as a whole apart from the round shape of the corner portion of the mask substrate 9.
FIG. 17 is a diagram illustrating an example of a positional relationship between the rib 7 of the main body and the locking tool 3 of the main body 1.

The ridgeline surface 91 of the mask substrate 9 is in contact with the third inclined surface 32 of the locking member 3 of the main body 1, and has a certain distance from the mask substrate 9 by the second inclined surface 33. .
In this case, the main body protrusion pressing portion 31 and the mask substrate 9 have a constant interval. Further, the rib 7 is clearly shown. The rib 7 clearly indicates the place where the mask substrate 9 is placed and can be used for the convenience of placing the mask substrate 9 in the container. As a result, the shavings that become the dust are generated due to contact with the mask substrate 9 that is displaced due to, for example, and the possibility of adhering to the pellicle or the like is high.
As shown in the figure, the rib 7 has an angle of about 85 degrees, whereas the third inclined surface 32 in the figure has an angle of about 45 to 50 degrees. The rib 7 that has a portion that coincides at one point in the mask placement direction but has a steep angle at the height at which the mask substrate 9 is placed has a distance from the mask substrate 9, and the mask substrate 9 vibrates temporarily. Even when the mask substrate 9 is displaced, the third inclined surface 32 suppresses the movement in the rib direction, so that it does not come into contact with the rib 7 when the mask substrate 9 is placed, and dust can be prevented from being generated.
Note that the third inclined surface 32 not only sufficiently allows an error in size when the mask substrate 9 is manufactured, but also in this case, contact with the rib 7 can be prevented.

The figure which shows one Embodiment of the state which closed the cover of the mask case which concerns on this invention The figure which shows the state which opened the cover of the mask case of FIG. 1 and visually recognized the main body The figure which shows the state which opened the cover body of FIG. 1 and visually recognized the cover body Sectional drawing which shows an example of the state by which the mask board | substrate is latched by the latching tool of a main body, and the lid locking tool of a cover body Top view of the locking device of the main body shown in FIG. Side view of the locking device of the main body shown in FIG. The figure which shows the shape of the bottom part direction of the locking tool of the main body shown in FIG. Sectional drawing of the locking tool of the main body shown in FIG. The other side view of the locking tool of the main body shown in FIG. The figure which shows another example of the locking tool of a main body The figure which shows another example of the locking tool of a main body The figure which shows another example of the locking tool of a main body The side view of the locking tool of the main body shown in FIG. The figure which shows another example of the locking tool of a main body The side view of the locking tool of the main body shown in FIG. The figure which shows another example of the locking tool of a main body The figure which shows an example of the positional relationship of the rib of a main body and a locking tool

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Main body 2 Cover body 3 Locking tool 30 Inclined surface 31 Main body protrusion pressing part 32 3rd inclination 33 2nd inclination 34 1st inclination 35 Uppermost lower surface 39 Bending part 4 Lid body locking tool 40 Inclined surface 41 Lid Body locking tool base part 42 Curved surface 420 Thick part 43 Deflection part 5 Hinge 6 Closing slider 61 Closing slider conduction path 7 Rib 9 Photomask substrate 90 Side face 91 Edge line 92 Mask pattern part 93 Index mark

Claims (8)

In a mask case that houses a photomask substrate 9 having a main body 1 and a lid 2 that closes an opening of the main body,
The locking tool 3 for mounting and locking the photomask substrate 9 in the main body 1 mounts the photomask substrate 9 in the vicinity of one corner in each corner direction of the photomask substrate 9. It consists of a substantially L-shaped locking tool 3 to be locked ,
The substantially L-shaped locking tool 3 includes at least the inclined surface 30 in contact with the ridge line surface 91 of the photomask substrate 9 and both ends of the substantially L-shaped protrusions of the locking tool 3 connected thereto. A main body presser protrusion 31 and a protrusion of each of the substantially L-shaped stoppers 3,
The photomask substrate 9 holds the ridge line surface 91 with the inclined surface 30 from the two directions of the side direction and the opening direction, and the side direction and the hinge direction, respectively, from the two directions, ie, the center direction. Yes,
The lid body 2 has a lid body locking tool 4 having an inclined surface 40, and
The inclined surface 40 has a curved surface 42 having a thick shape 420 connected to the lid body locking tool base 41 and a slightly thin-walled flexible portion 43 connected to the curved surface 42.
The ridgeline surface 91 of the photomask substrate is in contact with the thick portion 420 of the inclined surface 40, and the ridgeline surface 91 of the photomask substrate 9 is suppressed from above with elasticity.
After the photomask substrate 9 is placed and locked on the locking tool 3 of the main body 1, the cover body 2 is closed, whereby the photomask substrate 9 is attached to the inclined surface 30 of the substantially L-shaped locking tool 3 and the cover body. A mask case characterized in that the mask case is housed by being held in contact with and pressed only at the ridge portion 91 of the photomask substrate 9 by the inclined surface 40 of the stopper 4 . The main body 1 has ribs 7 arranged in parallel with the inclined surface 30 of the locking tool 3, and the inclination angle of the rib 7 in the mounting direction of the photomask substrate 9 is the ridgeline surface 91 of the photomask substrate 9. The rib 7 is at a position where the inclination is steeper than the inclination angle of the inclined surface 30 of the locking tool 3 adapted to the above and at a position where the rib 7 is not in contact with the photomask substrate 9 at least at the mounting position . The mask case according to claim 1, wherein the mask case is provided. The inclined surface 30 is connected to the main body protrusion pressing portions 31 at both ends of each projecting portion constituting a substantially L-shape, and has a third inclined surface 32 having the same inclination angle as the ridgeline surface 91 of the photomask substrate 9. And a second inclined surface 33 that is connected to the third inclined surface 32 and has a gentler angle than the third inclined surface 32 ,
Mask case according to claim 1 or 2 wherein the third inclined surface 32 is characterized in that in contact with the ridge surface 91 of the photomask substrate 9. The mask case according to claim 3, wherein the inclination angle of the third inclined surface 32 is an inclination angle within plus or minus 15 degrees from the inclination angle of the ridgeline surface 91 of the photomask substrate 9. Claim 3 or 4, characterized in that the locking device 3 has a first inclined surface 34 having an inclination angle than the second inclined surface 33 is provided continuously to the second inclined surface 33 The mask case described in 1. The mask case according to claim 5, wherein the latching tool 3 has an uppermost lowermost surface 35 connected to the first inclined surface 34. Instead of the substantially L-shaped fastener 3, any of claims 1 to 6, characterized by using a fastener 3 which is disposed to face substantially 90 degrees fastener 3 of the two substantially bar-like Mask case according to crab. A mask case using a substantially square-shaped locking tool 3 instead of the substantially L-shaped locking tool 3, and two adjacent sides of the substantially rectangular shape constitute a main body protrusion pressing portion 31, and are connected to this. mask case according to any one of claims 1 to 6 inclined surface 30 that set is characterized in that an inclined surface 30 in contact with the ridge surface 91 of the photomask substrate 9.

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