JP4491650B2 - 基板位置決め装置 - Google Patents
基板位置決め装置 Download PDFInfo
- Publication number
- JP4491650B2 JP4491650B2 JP2004323612A JP2004323612A JP4491650B2 JP 4491650 B2 JP4491650 B2 JP 4491650B2 JP 2004323612 A JP2004323612 A JP 2004323612A JP 2004323612 A JP2004323612 A JP 2004323612A JP 4491650 B2 JP4491650 B2 JP 4491650B2
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- JP
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- Prior art keywords
- substrate
- axis direction
- stopper
- offset
- laser processing
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02B—HYDRAULIC ENGINEERING
- E02B3/00—Engineering works in connection with control or use of streams, rivers, coasts, or other marine sites; Sealings or joints for engineering works in general
- E02B3/04—Structures or apparatus for, or methods of, protecting banks, coasts, or harbours
- E02B3/12—Revetment of banks, dams, watercourses, or the like, e.g. the sea-floor
- E02B3/128—Coherent linings made on the spot, e.g. cast in situ, extruded on the spot
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02B—HYDRAULIC ENGINEERING
- E02B3/00—Engineering works in connection with control or use of streams, rivers, coasts, or other marine sites; Sealings or joints for engineering works in general
- E02B3/04—Structures or apparatus for, or methods of, protecting banks, coasts, or harbours
- E02B3/12—Revetment of banks, dams, watercourses, or the like, e.g. the sea-floor
- E02B3/122—Flexible prefabricated covering elements, e.g. mats, strips
- E02B3/123—Flexible prefabricated covering elements, e.g. mats, strips mainly consisting of stone, concrete or similar stony material
Description
Claims (2)
- 2ヘッドレーザ加工機に、1回のレーザ加工用に2枚1組の基板を供給するための基板位置決め装置であって、
基板が載置されるテーブルおよびこのテーブルを保持するテーブル保持台と、
前記基板の直交する2辺に当接して前記基板の位置決めをおこなうX軸方向ストッパおよびY軸方向ストッパと、
前記テーブル保持台に対する前記X軸方向ストッパのX軸方向位置を、所定の基準位置と、これに対し2ヘッドレーザ加工機における2枚の基板の加工点のX軸方向位置ずれ量に相当するオフセット量だけオフセットしたオフセット位置とに切換えるX軸方向ストッパ位置切換装置と、
前記テーブル保持台に対する前記Y軸方向ストッパのY軸方向位置を、所定の基準位置と、これに対し2ヘッドレーザ加工機における2枚の基板の加工点のY軸方向位置ずれ量に相当するオフセット量だけオフセットしたオフセット位置とに切換えるY軸方向ストッパ位置切換装置と、
前記テーブルをX軸方向およびY軸方向に対して斜交する斜行方向に水平移動させて前記基板を前記X軸方向ストッパおよびY軸方向ストッパに当接させるテーブル駆動装置とを、
具備したことを特徴とする基板位置決め装置。 - 前記テーブルの上面に、前記テーブル駆動装置によるテーブル移動方向である斜行方向に平行に延びる複数本の溝を、並設したことを特徴とする請求項1記載の基板位置決め装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004323612A JP4491650B2 (ja) | 2004-11-08 | 2004-11-08 | 基板位置決め装置 |
KR1020050027097A KR100693696B1 (ko) | 2004-11-08 | 2005-03-31 | 기판위치결정장치 |
CNB2005100649249A CN100411810C (zh) | 2004-11-08 | 2005-04-04 | 基板定位装置 |
TW094112851A TWI271255B (en) | 2004-11-08 | 2005-04-22 | Substrate positioning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004323612A JP4491650B2 (ja) | 2004-11-08 | 2004-11-08 | 基板位置決め装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006134143A JP2006134143A (ja) | 2006-05-25 |
JP4491650B2 true JP4491650B2 (ja) | 2010-06-30 |
Family
ID=36727630
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004323612A Active JP4491650B2 (ja) | 2004-11-08 | 2004-11-08 | 基板位置決め装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4491650B2 (ja) |
KR (1) | KR100693696B1 (ja) |
CN (1) | CN100411810C (ja) |
TW (1) | TWI271255B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020116670A (ja) * | 2019-01-23 | 2020-08-06 | 大船企業日本株式会社 | 基板搬送方法、該基板搬送方法を備える基板搬送装置、及び該基板搬送装置と基板加工装置とからなる基板搬送装置付き基板加工装置 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100469508C (zh) * | 2007-04-26 | 2009-03-18 | 瑞安市博业激光应用技术有限公司 | 双头互移式激光切割机 |
JP5460420B2 (ja) * | 2010-03-30 | 2014-04-02 | 三菱電機株式会社 | 加工制御装置およびレーザ加工装置 |
CN103286452B (zh) * | 2012-03-02 | 2015-09-09 | 大族激光科技产业集团股份有限公司 | 激光微孔加工方法及激光微孔加工设备 |
TW201347077A (zh) * | 2012-05-07 | 2013-11-16 | Fulgency Materials Corp | 床台同步定位補償系統 |
CN112296700B (zh) * | 2020-10-30 | 2021-09-21 | 永固集团股份有限公司 | 用于断路器零部件加工的吸附结构 |
CN112975777B (zh) * | 2021-01-29 | 2022-11-18 | 洛博特思智能科技(苏州)有限公司 | 一种可切换基准载具 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61178444U (ja) * | 1985-04-25 | 1986-11-07 | ||
JP2001252842A (ja) * | 2000-03-08 | 2001-09-18 | Mitsubishi Electric Corp | 被加工物位置決め装置、被加工物位置決め方法及びこの被加工物位置決め装置を用いたレーザ加工装置 |
JP2003004614A (ja) * | 2001-06-22 | 2003-01-08 | Akashi Corp | 材料試験機 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3550617B2 (ja) * | 1997-06-03 | 2004-08-04 | 日立ビアメカニクス株式会社 | レーザ加工装置 |
JP3715196B2 (ja) * | 2000-11-13 | 2005-11-09 | 三菱電機株式会社 | レーザ加工装置 |
JP3855684B2 (ja) * | 2001-06-05 | 2006-12-13 | 松下電器産業株式会社 | レーザ加工装置およびレーザ加工方法 |
DE10235234B3 (de) * | 2002-08-01 | 2004-01-08 | Siemens Ag | Vorrichtung zum Halten und Positionieren eines Substrats in einer Laserbearbeitungsmaschine |
CN2605955Y (zh) * | 2002-12-24 | 2004-03-10 | 华中科技大学 | 薄板激光切割—焊接设备 |
-
2004
- 2004-11-08 JP JP2004323612A patent/JP4491650B2/ja active Active
-
2005
- 2005-03-31 KR KR1020050027097A patent/KR100693696B1/ko active IP Right Grant
- 2005-04-04 CN CNB2005100649249A patent/CN100411810C/zh active Active
- 2005-04-22 TW TW094112851A patent/TWI271255B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61178444U (ja) * | 1985-04-25 | 1986-11-07 | ||
JP2001252842A (ja) * | 2000-03-08 | 2001-09-18 | Mitsubishi Electric Corp | 被加工物位置決め装置、被加工物位置決め方法及びこの被加工物位置決め装置を用いたレーザ加工装置 |
JP2003004614A (ja) * | 2001-06-22 | 2003-01-08 | Akashi Corp | 材料試験機 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020116670A (ja) * | 2019-01-23 | 2020-08-06 | 大船企業日本株式会社 | 基板搬送方法、該基板搬送方法を備える基板搬送装置、及び該基板搬送装置と基板加工装置とからなる基板搬送装置付き基板加工装置 |
JP7370140B2 (ja) | 2019-01-23 | 2023-10-27 | 大船企業日本株式会社 | 基板搬送方法、該基板搬送方法を備える基板搬送装置、及び該基板搬送装置と基板加工装置とからなる基板搬送装置付き基板加工装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2006134143A (ja) | 2006-05-25 |
KR100693696B1 (ko) | 2007-03-09 |
TWI271255B (en) | 2007-01-21 |
KR20060045361A (ko) | 2006-05-17 |
CN1772434A (zh) | 2006-05-17 |
TW200615075A (en) | 2006-05-16 |
CN100411810C (zh) | 2008-08-20 |
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