JP4486372B2 - プラズマ処理装置 - Google Patents

プラズマ処理装置 Download PDF

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Publication number
JP4486372B2
JP4486372B2 JP2004032218A JP2004032218A JP4486372B2 JP 4486372 B2 JP4486372 B2 JP 4486372B2 JP 2004032218 A JP2004032218 A JP 2004032218A JP 2004032218 A JP2004032218 A JP 2004032218A JP 4486372 B2 JP4486372 B2 JP 4486372B2
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Japan
Prior art keywords
plasma
ring member
electrode
coating
substrate
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Japanese (ja)
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JP2004260159A5 (enExample
JP2004260159A (ja
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康晴 佐々木
剛 守屋
宏史 長池
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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  • Plasma Technology (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2004032218A 2003-02-07 2004-02-09 プラズマ処理装置 Expired - Lifetime JP4486372B2 (ja)

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JP2004032218A JP4486372B2 (ja) 2003-02-07 2004-02-09 プラズマ処理装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003031278 2003-02-07
JP2004032218A JP4486372B2 (ja) 2003-02-07 2004-02-09 プラズマ処理装置

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JP2004260159A JP2004260159A (ja) 2004-09-16
JP2004260159A5 JP2004260159A5 (enExample) 2007-03-29
JP4486372B2 true JP4486372B2 (ja) 2010-06-23

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111383887A (zh) * 2018-12-27 2020-07-07 江苏鲁汶仪器有限公司 一种改善等离子体刻蚀均匀性的装置及方法

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JP4666576B2 (ja) * 2004-11-08 2011-04-06 東京エレクトロン株式会社 セラミック溶射部材の洗浄方法、該方法を実行するためのプログラム、記憶媒体、及びセラミック溶射部材
US7993489B2 (en) 2005-03-31 2011-08-09 Tokyo Electron Limited Capacitive coupling plasma processing apparatus and method for using the same
JP4628900B2 (ja) * 2005-08-24 2011-02-09 株式会社日立ハイテクノロジーズ プラズマ処理装置
US8038837B2 (en) 2005-09-02 2011-10-18 Tokyo Electron Limited Ring-shaped component for use in a plasma processing, plasma processing apparatus and outer ring-shaped member
JP4783094B2 (ja) * 2005-09-02 2011-09-28 東京エレクトロン株式会社 プラズマ処理用環状部品、プラズマ処理装置、及び外側環状部材
JP4508054B2 (ja) * 2005-09-12 2010-07-21 パナソニック株式会社 電極部材の製造方法
JP2007115973A (ja) * 2005-10-21 2007-05-10 Shin Etsu Chem Co Ltd 耐食性部材
JP2007243020A (ja) * 2006-03-10 2007-09-20 Hitachi High-Technologies Corp プラズマ処理装置
JP4884047B2 (ja) * 2006-03-23 2012-02-22 東京エレクトロン株式会社 プラズマ処理方法
JP5014656B2 (ja) * 2006-03-27 2012-08-29 国立大学法人東北大学 プラズマ処理装置用部材およびその製造方法
KR101098858B1 (ko) * 2006-05-15 2011-12-26 울박, 인크 클리닝 방법 및 진공 처리 장치
JP4989111B2 (ja) * 2006-05-29 2012-08-01 株式会社日立ハイテクインスツルメンツ プラズマ洗浄装置
JP4733616B2 (ja) * 2006-11-01 2011-07-27 積水化学工業株式会社 表面処理装置
US7829469B2 (en) * 2006-12-11 2010-11-09 Tokyo Electron Limited Method and system for uniformity control in ballistic electron beam enhanced plasma processing system
JP5102500B2 (ja) * 2007-01-22 2012-12-19 東京エレクトロン株式会社 基板処理装置
JP5071856B2 (ja) * 2007-03-12 2012-11-14 日本碍子株式会社 酸化イットリウム材料及び半導体製造装置用部材
JP4833890B2 (ja) 2007-03-12 2011-12-07 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ分布補正方法
JP4988402B2 (ja) * 2007-03-30 2012-08-01 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP5281309B2 (ja) * 2008-03-28 2013-09-04 東京エレクトロン株式会社 プラズマエッチング装置及びプラズマエッチング方法及びコンピュータ読み取り可能な記憶媒体
US8603591B2 (en) * 2009-04-03 2013-12-10 Varian Semiconductor Ewuipment Associates, Inc. Enhanced etch and deposition profile control using plasma sheath engineering
JP5227264B2 (ja) * 2009-06-02 2013-07-03 東京エレクトロン株式会社 プラズマ処理装置，プラズマ処理方法，プログラム
KR20120042864A (ko) * 2009-10-09 2012-05-03 고쿠리츠다이가쿠호징 야마나시다이가쿠 액추에이터 소자 및 시트 형상 액추에이터
JP5312369B2 (ja) * 2010-02-22 2013-10-09 東京エレクトロン株式会社 プラズマ処理装置およびプラズマ処理方法
US8362386B2 (en) * 2010-06-09 2013-01-29 General Electric Company Power delivery unit, plasma spray system, and method of using plasma spray system
KR101191543B1 (ko) 2010-08-09 2012-10-15 주식회사 케이씨텍 기판 도금 장치
JP5026571B2 (ja) * 2010-08-31 2012-09-12 株式会社新川 表面洗浄装置
KR101217460B1 (ko) * 2010-11-11 2013-01-02 주식회사 케이씨텍 기판 도금 장치
JP5313375B2 (ja) * 2012-02-20 2013-10-09 東京エレクトロン株式会社 プラズマ処理装置およびフォーカスリングとフォーカスリング部品
JP6714978B2 (ja) * 2014-07-10 2020-07-01 東京エレクトロン株式会社 プラズマ処理装置用の部品、プラズマ処理装置、及びプラズマ処理装置用の部品の製造方法
JP6539113B2 (ja) * 2015-05-28 2019-07-03 株式会社日立ハイテクノロジーズ プラズマ処理装置およびプラズマ処理方法
KR101817779B1 (ko) * 2015-12-31 2018-01-11 (주)코미코 내플라즈마 코팅막 및 이의 형성방법
JP6703425B2 (ja) * 2016-03-23 2020-06-03 株式会社栗田製作所 プラズマ処理方法及びプラズマ処理装置
JP7068921B2 (ja) * 2018-05-15 2022-05-17 東京エレクトロン株式会社 部品の形成方法及びプラズマ処理装置
KR102708348B1 (ko) * 2018-06-22 2024-09-20 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치 및 플라즈마 에칭 방법
TWI741320B (zh) * 2018-07-18 2021-10-01 日商日本發條股份有限公司 電漿處理裝置用構件
US20200024735A1 (en) * 2018-07-18 2020-01-23 Applied Materials, Inc. Erosion resistant metal fluoride coatings deposited by atomic layer deposition
KR102841591B1 (ko) * 2019-01-11 2025-08-01 도쿄엘렉트론가부시키가이샤 처리 방법 및 플라즈마 처리 장치
KR102585287B1 (ko) * 2020-09-08 2023-10-05 세메스 주식회사 기판 처리 장치 및 이의 커버링
KR20230058069A (ko) * 2020-09-09 2023-05-02 미쓰비시 마테리알 가부시키가이샤 내플라즈마 코팅막, 그 막 형성용 졸 겔액, 내플라즈마 코팅막의 형성 방법 및 내플라즈마 코팅막 형성 기재
KR102327270B1 (ko) 2020-12-03 2021-11-17 피에스케이 주식회사 지지 유닛, 기판 처리 장치, 그리고 기판 처리 방법
KR102626584B1 (ko) 2020-12-24 2024-01-18 도카로 가부시키가이샤 정전 척 및 처리 장치
CN112736015B (zh) * 2020-12-31 2024-09-20 拓荆科技股份有限公司 用于调节处理腔中电浆曲线的装置及其控制方法
JP7801157B2 (ja) * 2022-03-23 2026-01-16 日本特殊陶業株式会社 被覆構造体および保持装置
CN117238743B (zh) * 2023-11-10 2024-02-09 合肥晶合集成电路股份有限公司 改善晶圆边缘环状缺陷的方法
CN120172723B (zh) * 2025-05-23 2025-08-08 中铁四局集团有限公司 一种低吸水性的煤矸石路基填料及其制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111383887A (zh) * 2018-12-27 2020-07-07 江苏鲁汶仪器有限公司 一种改善等离子体刻蚀均匀性的装置及方法

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