JP4476232B2 - 成膜装置のシーズニング方法 - Google Patents
成膜装置のシーズニング方法 Download PDFInfo
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- JP4476232B2 JP4476232B2 JP2006065415A JP2006065415A JP4476232B2 JP 4476232 B2 JP4476232 B2 JP 4476232B2 JP 2006065415 A JP2006065415 A JP 2006065415A JP 2006065415 A JP2006065415 A JP 2006065415A JP 4476232 B2 JP4476232 B2 JP 4476232B2
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- Prior art keywords
- film
- silicon
- forming apparatus
- silicon nitride
- gas
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- Expired - Fee Related
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0236—Pretreatment of the material to be coated by cleaning or etching by etching with a reactive gas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/029—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Description
処理容器内に収容する基板に窒化珪素膜を成膜する成膜装置のシーズニング方法であって、
前記処理容器内にクリーニングガスを供給し、該クリーニングガスをプラズマ状態にして、前記処理容器の内壁に付着した前記窒化珪素膜をエッチングし、
前記処理容器内に珪素系ガスを供給し、該珪素系ガスをプラズマ状態にして、前記処理容器の内壁にアモルファス−シリコン膜を堆積し、
前記処理容器内に珪素系ガスを供給すると共に窒素系ガスを所定流量まで漸増させて供給し、該珪素系ガス及び該窒素系ガスをプラズマ状態にして、前記アモルファス−シリコン膜上に窒素含有量を厚さ方向に漸増させた窒化珪素膜を堆積し、
基板への窒化珪素膜の成膜が開始されるまで、前記処理容器内に希ガスを供給して、該希ガスのプラズマ状態を維持することを特徴とする。
上記第1の発明に記載の成膜装置のシーズニング方法において、
前記アモルファス−シリコン膜上に前記窒化珪素膜を堆積する際、前記窒素系ガスを所定流量まで、当初緩やかに漸増させ、その後より速やかに漸増させて供給することを特徴とする。
本発明に係る成膜装置は、図1に示すように、アルミニウム製の円筒状の真空チャンバ1の内部が処理室2(処理容器)として構成されるものであり、真空チャンバ1の上部開口部には、電磁波透過窓となるセラミクス製の円板状の天井板3が、開口部を塞ぐように配設されている。又、真空チャンバ1の下部には、支持台4が備えられ、半導体等の基板5が支持台4の上面に載置される。
2 処理室
3 天井板
4 支持台
5 基板
7 アンテナ
8 整合器
9 高周波電源
10a、10b ガスノズル
11 排気口
12 アンテナ
13 整合器
14 交流電源
Claims (2)
- 処理容器内に収容する基板に窒化珪素膜を成膜する成膜装置のシーズニング方法であって、
前記処理容器内にクリーニングガスを供給し、該クリーニングガスをプラズマ状態にして、前記処理容器の内壁に付着した前記窒化珪素膜をエッチングし、
前記処理容器内に珪素系ガスを供給し、該珪素系ガスをプラズマ状態にして、前記処理容器の内壁にアモルファス−シリコン膜を堆積し、
前記処理容器内に珪素系ガスを供給すると共に窒素系ガスを所定流量まで漸増させて供給し、該珪素系ガス及び該窒素系ガスをプラズマ状態にして、前記アモルファス−シリコン膜上に窒素含有量を厚さ方向に漸増させた窒化珪素膜を堆積し、
基板への窒化珪素膜の成膜が開始されるまで、前記処理容器内に希ガスを供給して、該希ガスのプラズマ状態を維持することを特徴とする成膜装置のシーズニング方法。 - 請求項1に記載の成膜装置のシーズニング方法において、
前記アモルファス−シリコン膜上に前記窒化珪素膜を堆積する際、前記窒素系ガスを所定流量まで、当初緩やかに漸増させ、その後より速やかに漸増させて供給することを特徴とする成膜装置のシーズニング方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006065415A JP4476232B2 (ja) | 2006-03-10 | 2006-03-10 | 成膜装置のシーズニング方法 |
EP07714447A EP1995770A1 (en) | 2006-03-10 | 2007-02-19 | Method of seasoning film-forming apparatus |
KR1020087022176A KR101004975B1 (ko) | 2006-03-10 | 2007-02-19 | 성막 장치의 시즈닝 방법 |
US12/282,475 US8337960B2 (en) | 2006-03-10 | 2007-02-19 | Seasoning method for film-forming apparatus |
PCT/JP2007/052921 WO2007105412A1 (ja) | 2006-03-10 | 2007-02-19 | 成膜装置のシーズニング方法 |
TW096107225A TW200741869A (en) | 2006-03-10 | 2007-03-02 | Method of seasoning film-forming apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006065415A JP4476232B2 (ja) | 2006-03-10 | 2006-03-10 | 成膜装置のシーズニング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007242996A JP2007242996A (ja) | 2007-09-20 |
JP4476232B2 true JP4476232B2 (ja) | 2010-06-09 |
Family
ID=38509250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006065415A Expired - Fee Related JP4476232B2 (ja) | 2006-03-10 | 2006-03-10 | 成膜装置のシーズニング方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8337960B2 (ja) |
EP (1) | EP1995770A1 (ja) |
JP (1) | JP4476232B2 (ja) |
KR (1) | KR101004975B1 (ja) |
TW (1) | TW200741869A (ja) |
WO (1) | WO2007105412A1 (ja) |
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JP5710591B2 (ja) * | 2009-04-20 | 2015-04-30 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | プロセスチャンバ壁上にシリコンコーティングを使用した残留フッ素ラジカルの除去の促進 |
JP5275188B2 (ja) * | 2009-09-18 | 2013-08-28 | 東京エレクトロン株式会社 | 処理開始可否判定方法及び記憶媒体 |
US20110117680A1 (en) * | 2009-11-17 | 2011-05-19 | Applied Materials, Inc. | Inline detection of substrate positioning during processing |
US8999847B2 (en) | 2010-08-16 | 2015-04-07 | Applied Materials, Inc. | a-Si seasoning effect to improve SiN run-to-run uniformity |
JP5807511B2 (ja) * | 2011-10-27 | 2015-11-10 | 東京エレクトロン株式会社 | 成膜装置及びその運用方法 |
JP5772508B2 (ja) * | 2011-10-27 | 2015-09-02 | 東京エレクトロン株式会社 | 成膜装置及びその運用方法 |
CN104099582B (zh) * | 2013-04-15 | 2016-10-19 | 中芯国际集成电路制造(上海)有限公司 | 一种减少炉管中颗粒的方法 |
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JP2015070233A (ja) * | 2013-09-30 | 2015-04-13 | 株式会社東芝 | 半導体装置の製造方法 |
US9745658B2 (en) | 2013-11-25 | 2017-08-29 | Lam Research Corporation | Chamber undercoat preparation method for low temperature ALD films |
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-
2006
- 2006-03-10 JP JP2006065415A patent/JP4476232B2/ja not_active Expired - Fee Related
-
2007
- 2007-02-19 EP EP07714447A patent/EP1995770A1/en not_active Withdrawn
- 2007-02-19 WO PCT/JP2007/052921 patent/WO2007105412A1/ja active Application Filing
- 2007-02-19 US US12/282,475 patent/US8337960B2/en not_active Expired - Fee Related
- 2007-02-19 KR KR1020087022176A patent/KR101004975B1/ko not_active IP Right Cessation
- 2007-03-02 TW TW096107225A patent/TW200741869A/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2007242996A (ja) | 2007-09-20 |
WO2007105412A1 (ja) | 2007-09-20 |
US8337960B2 (en) | 2012-12-25 |
KR20080103068A (ko) | 2008-11-26 |
KR101004975B1 (ko) | 2011-01-04 |
TW200741869A (en) | 2007-11-01 |
EP1995770A1 (en) | 2008-11-26 |
US20090242511A1 (en) | 2009-10-01 |
TWI351062B (ja) | 2011-10-21 |
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