JP4467506B2 - パッケージおよびそれを用いた電子装置 - Google Patents
パッケージおよびそれを用いた電子装置 Download PDFInfo
- Publication number
- JP4467506B2 JP4467506B2 JP2005338600A JP2005338600A JP4467506B2 JP 4467506 B2 JP4467506 B2 JP 4467506B2 JP 2005338600 A JP2005338600 A JP 2005338600A JP 2005338600 A JP2005338600 A JP 2005338600A JP 4467506 B2 JP4467506 B2 JP 4467506B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- solder
- package
- sealing
- connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/007—Interconnections between the MEMS and external electrical signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0172—Seals
- B81C2203/019—Seals characterised by the material or arrangement of seals between parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0284—Details of three-dimensional rigid printed circuit boards
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/14—Structural association of two or more printed circuits
- H05K1/141—One or more single auxiliary printed circuits mounted on a main printed circuit, e.g. modules, adapters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
- H05K2201/09036—Recesses or grooves in insulating substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
- H05K2201/09045—Locally raised area or protrusion of insulating substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10666—Plated through-hole for surface mounting on PCB
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
- H05K2203/1147—Sealing or impregnating, e.g. of pores
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Description
図1および図2は、それぞれ、本発明の実施の形態1のパッケージの下側基板の平面図およびそのII−II線断面図である。図3および図4は、それぞれ、本発明の実施の形態1のパッケージの上側基板の平面図およびそのIV−IV線断面図である。図5は、上側基板と下側基板とが接合され、素子が封止された状態の断面図である。なお、図5に示すパッケージは、半導体素子等の電子部品を内包している電子部品パッケージとしての半導体装置である。ただし、本発明のパッケージは、半導体素子以外の部品を内包するものであってもよい。
次に、図14を用いて、本発明の実施の形態2のパッケージおよび電子装置を説明する。
次に、図15を用いて、本発明の実施の形態3のパッケージおよび電子装置を説明する。
次に、図16を用いて、本発明の実施の形態4のパッケージおよび電子装置を説明する。
Claims (4)
- 下側基板と、前記下側基板に装着され、前記下側基板とともに密閉空間を構成する上側基板とを備え、
前記下側基板上には、所定の領域を囲むように下側封止用リングが設けられ、
前記上側基板は、前記下側封止用リングに対応するリング状の封止用突起を含み、
前記封止用突起の表面上には、上側封止用リングが設けられ、
前記上側封止用リングと前記下側封止用リングとが封止用半田を介して接着され、
前記封止用突起の先端の幅が前記下側封止用リングの幅よりも小さく、
前記封止用半田が、前記下側封止用リング上であって、かつ、前記上側封止用リングの側面上に設けられ、さらに、
前記下側基板上には、下側接続用パッドが設けられ、
前記上側基板は、前記下側接続用パッドに対応する接続用突起を含み、
前記接続用突起の表面上には、上側接続用パッドが設けられ、
前記上側接続用パッドと前記下側接続用パッドとが接続用半田によって接着され、
前記接続用突起の先端の幅が前記下側接続用パッドの幅よりも小さく、
前記接続用半田が、前記下側接続用パッド上であって、かつ、前記上側接続用パッドの側面上に設けられ、
前記上側基板は、厚さ方向に延びる貫通孔を有し、
前記貫通孔内に貫通配線が形成され、
前記貫通配線の一端が、前記上側接続用パッドに電気的に接続されており、前記貫通配線の他端が、外部の素子に接続され得る形態であり、
前記貫通配線が前記接続用突起内において前記接続用突起を貫通するように延びている、パッケージ。 - 前記接続用突起の側面が、前記上側基板の主表面に対して傾斜している傾斜面である、請求項1に記載のパッケージ。
- 前記接続用突起の側面が、前記上側基板の主表面に対してほぼ垂直に延びる垂直面である、請求項1に記載のパッケージ。
- 請求項1〜3のいずれかに記載のパッケージにおいて、前記上側基板と前記下側基板との間の空間に電子部品が設けられた、電子装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005338600A JP4467506B2 (ja) | 2005-11-24 | 2005-11-24 | パッケージおよびそれを用いた電子装置 |
US11/530,692 US7605467B2 (en) | 2005-11-24 | 2006-09-11 | Package and electronic apparatus using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005338600A JP4467506B2 (ja) | 2005-11-24 | 2005-11-24 | パッケージおよびそれを用いた電子装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007149742A JP2007149742A (ja) | 2007-06-14 |
JP4467506B2 true JP4467506B2 (ja) | 2010-05-26 |
Family
ID=38052668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005338600A Expired - Fee Related JP4467506B2 (ja) | 2005-11-24 | 2005-11-24 | パッケージおよびそれを用いた電子装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7605467B2 (ja) |
JP (1) | JP4467506B2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101542478B1 (ko) * | 2007-08-15 | 2015-08-06 | 테세라, 인코포레이티드 | 도전성 포스트를 갖는 상호접속 소자의 제조 방법 |
KR100927418B1 (ko) * | 2007-09-28 | 2009-11-19 | 삼성전기주식회사 | 웨이퍼 레벨 패키지 및 그 제조방법 |
JP5163362B2 (ja) * | 2008-08-21 | 2013-03-13 | 株式会社村田製作所 | 半導体センサ装置 |
JP5273073B2 (ja) * | 2010-03-15 | 2013-08-28 | オムロン株式会社 | 電極構造及び当該電極構造を備えたマイクロデバイス用パッケージ |
JP2012151698A (ja) * | 2011-01-19 | 2012-08-09 | Taiyo Yuden Co Ltd | 弾性波デバイス |
JP6314731B2 (ja) * | 2014-08-01 | 2018-04-25 | 株式会社ソシオネクスト | 半導体装置及び半導体装置の製造方法 |
WO2016199634A1 (ja) * | 2015-06-10 | 2016-12-15 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
US10629545B2 (en) * | 2017-03-09 | 2020-04-21 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device |
JP6635605B2 (ja) * | 2017-10-11 | 2020-01-29 | 国立研究開発法人理化学研究所 | 電流導入端子並びにそれを備えた圧力保持装置及びx線撮像装置 |
CN114725011A (zh) * | 2022-03-18 | 2022-07-08 | 南京睿芯峰电子科技有限公司 | 一种气密性芯片结构及其制备方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6303986B1 (en) * | 1998-07-29 | 2001-10-16 | Silicon Light Machines | Method of and apparatus for sealing an hermetic lid to a semiconductor die |
US6441481B1 (en) * | 2000-04-10 | 2002-08-27 | Analog Devices, Inc. | Hermetically sealed microstructure package |
JP4044265B2 (ja) * | 2000-05-16 | 2008-02-06 | 三菱電機株式会社 | パワーモジュール |
DE10163799B4 (de) * | 2000-12-28 | 2006-11-23 | Matsushita Electric Works, Ltd., Kadoma | Halbleiterchip-Aufbausubstrat und Verfahren zum Herstellen eines solchen Aufbausubstrates |
JP2002203865A (ja) * | 2001-01-05 | 2002-07-19 | Mitsubishi Electric Corp | 半導体デバイス並びにそのダイボンド装置及びダイボンド方法 |
JP3718131B2 (ja) * | 2001-03-16 | 2005-11-16 | 松下電器産業株式会社 | 高周波モジュールおよびその製造方法 |
US6603183B1 (en) * | 2001-09-04 | 2003-08-05 | Amkor Technology, Inc. | Quick sealing glass-lidded package |
US6696645B2 (en) | 2002-05-08 | 2004-02-24 | The Regents Of The University Of Michigan | On-wafer packaging for RF-MEMS |
KR100447851B1 (ko) | 2002-11-14 | 2004-09-08 | 삼성전자주식회사 | 반도체장치의 플립칩 방식 측면 접합 본딩 방법 및 이를이용한 mems 소자 패키지 및 패키지 방법 |
JP4342174B2 (ja) | 2002-12-27 | 2009-10-14 | 新光電気工業株式会社 | 電子デバイス及びその製造方法 |
US20040232535A1 (en) * | 2003-05-22 | 2004-11-25 | Terry Tarn | Microelectromechanical device packages with integral heaters |
JP3838572B2 (ja) * | 2003-09-03 | 2006-10-25 | 松下電器産業株式会社 | 固体撮像装置およびその製造方法 |
US20050212067A1 (en) * | 2004-03-26 | 2005-09-29 | Robert Duboc | Microelectromechanical devices with lubricants and getters formed thereon |
-
2005
- 2005-11-24 JP JP2005338600A patent/JP4467506B2/ja not_active Expired - Fee Related
-
2006
- 2006-09-11 US US11/530,692 patent/US7605467B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20070114620A1 (en) | 2007-05-24 |
JP2007149742A (ja) | 2007-06-14 |
US7605467B2 (en) | 2009-10-20 |
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