JP4443234B2 - 低oh含有率を有する円筒状石英ガラス体の製造方法 - Google Patents

低oh含有率を有する円筒状石英ガラス体の製造方法 Download PDF

Info

Publication number
JP4443234B2
JP4443234B2 JP2003587745A JP2003587745A JP4443234B2 JP 4443234 B2 JP4443234 B2 JP 4443234B2 JP 2003587745 A JP2003587745 A JP 2003587745A JP 2003587745 A JP2003587745 A JP 2003587745A JP 4443234 B2 JP4443234 B2 JP 4443234B2
Authority
JP
Japan
Prior art keywords
vitrification
pretreatment
furnace
quartz glass
enclosure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003587745A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005523863A5 (enExample
JP2005523863A (ja
Inventor
シュミット スヴェン
ロゼリープ クヌート
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
Original Assignee
Heraeus Tenevo GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Tenevo GmbH filed Critical Heraeus Tenevo GmbH
Publication of JP2005523863A publication Critical patent/JP2005523863A/ja
Publication of JP2005523863A5 publication Critical patent/JP2005523863A5/ja
Application granted granted Critical
Publication of JP4443234B2 publication Critical patent/JP4443234B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/14Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146Furnaces therefor, e.g. muffle tubes, furnace linings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/02Pure silica glass, e.g. pure fused quartz
    • C03B2201/03Impurity concentration specified
    • C03B2201/04Hydroxyl ion (OH)
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
JP2003587745A 2002-04-26 2003-04-28 低oh含有率を有する円筒状石英ガラス体の製造方法 Expired - Fee Related JP4443234B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10218864A DE10218864C1 (de) 2002-04-26 2002-04-26 Verfahren zur Herstellung eines zylinderförmigen Quarzglaskörpers mit geringem OH-Gehalt
PCT/EP2003/004412 WO2003091171A2 (de) 2002-04-26 2003-04-28 Verfahren zur herstellung eines zylinderförmigen quarzglaskörpers mit geringem oh-gehalt

Publications (3)

Publication Number Publication Date
JP2005523863A JP2005523863A (ja) 2005-08-11
JP2005523863A5 JP2005523863A5 (enExample) 2006-02-02
JP4443234B2 true JP4443234B2 (ja) 2010-03-31

Family

ID=28458955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003587745A Expired - Fee Related JP4443234B2 (ja) 2002-04-26 2003-04-28 低oh含有率を有する円筒状石英ガラス体の製造方法

Country Status (6)

Country Link
US (1) US20050172676A1 (enExample)
JP (1) JP4443234B2 (enExample)
CN (1) CN1305791C (enExample)
AU (1) AU2003236840A1 (enExample)
DE (1) DE10218864C1 (enExample)
WO (1) WO2003091171A2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1632460A4 (en) * 2003-05-19 2011-12-28 Sumitomo Electric Industries OPTICAL FIBER AND METHOD FOR PRODUCING THE SAME
WO2005099357A1 (en) * 2004-04-13 2005-10-27 Sebit Co., Ltd Method for manufacturing high heat-resistant quartz glass
JP5066784B2 (ja) * 2005-02-04 2012-11-07 旭硝子株式会社 合成石英ガラスの製造方法
DE102005059290A1 (de) * 2005-12-09 2007-06-14 Heraeus Tenevo Gmbh Verfahren und Vorrichtung zur Herstellung eines Formkörpers aus Quarzglas
DE102006059779B4 (de) * 2006-12-15 2010-06-24 Heraeus Quarzglas Gmbh & Co. Kg Verfahren für die Herstellung eines Hohlzylinders aus synthetischem Quarzglas, nach dem Verfahren erhaltener dickwandiger Hohlzylinder und Verfahren zur Herstellung einer Vorform für optische Fasern
CN101323501B (zh) * 2007-01-02 2015-10-07 德雷卡通信技术公司 用于石英玻璃沉积管的连续焙烧方法
US8062986B2 (en) * 2007-07-27 2011-11-22 Corning Incorporated Fused silica having low OH, OD levels and method of making
US20100122558A1 (en) * 2008-11-19 2010-05-20 John Michael Jewell Apparatus and Method of Sintering an Optical Fiber Preform
EP2977359B1 (de) 2014-07-21 2016-10-19 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von mit fluor dotiertem quarzglas
CN114031274A (zh) * 2021-12-09 2022-02-11 中天科技精密材料有限公司 连续式低羟基高均匀性石英玻璃的制备方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136129A (ja) * 1984-07-30 1986-02-20 Sumitomo Electric Ind Ltd 光フアイバ用ガラス母材の製造方法
US4969941A (en) * 1987-02-16 1990-11-13 Sumitomo Electric Industries, Ltd. Furnace for heating glass preform for optical fiber and method for producing glass preform
AU626362B2 (en) * 1988-12-29 1992-07-30 Sumitomo Electric Industries, Ltd. Furnace for producing high purity quartz glass preform
AU653411B2 (en) * 1991-07-19 1994-09-29 Sumitomo Electric Industries, Ltd. Method for producing glass preform for optical fiber
GB9210327D0 (en) * 1992-05-14 1992-07-01 Tsl Group Plc Heat treatment facility for synthetic vitreous silica bodies
JP3036993B2 (ja) * 1992-09-07 2000-04-24 信越化学工業株式会社 合成石英ガラス部材の製造方法
JP3277719B2 (ja) * 1994-09-21 2002-04-22 住友金属工業株式会社 紫外光透過用合成石英ガラスおよびその製造方法
CN1048700C (zh) * 1995-03-17 2000-01-26 中国建筑材料科学研究院 紫外激光传能光纤预制棒制造方法
JP3818603B2 (ja) * 1996-05-21 2006-09-06 信越石英株式会社 石英ガラスの製造方法
DE19649935C2 (de) * 1996-12-02 1999-09-16 Heraeus Quarzglas Verfahren zur Herstellung von Quarzglaskörpern
US6253580B1 (en) * 1997-12-19 2001-07-03 Fibercore, Inc. Method of making a tubular member for optical fiber production using plasma outside vapor deposition
JP2862001B2 (ja) * 1998-04-03 1999-02-24 旭硝子株式会社 石英ガラス光学部材の製造方法
EP1101741B1 (de) * 1999-11-15 2005-07-13 Heraeus Quarzglas GmbH & Co. KG Quarzglaskörper für ein optisches Bauteil und Verfahren zu seiner Herstellung
AU2001277156A1 (en) * 2000-08-10 2002-02-25 Yazaki Corporation Process for making glass bodies having refractive index gradients
EP1337483A1 (en) * 2000-09-27 2003-08-27 Corning Incorporated Process for drying porous glass preforms
JP2003183042A (ja) * 2001-12-14 2003-07-03 Shin Etsu Chem Co Ltd 光ファイバ用母材の製造方法及びその製造方法で製造した光ファイバ用母材

Also Published As

Publication number Publication date
CN1305791C (zh) 2007-03-21
AU2003236840A8 (en) 2003-11-10
JP2005523863A (ja) 2005-08-11
CN1649797A (zh) 2005-08-03
DE10218864C1 (de) 2003-10-23
WO2003091171A3 (de) 2004-10-14
AU2003236840A1 (en) 2003-11-10
US20050172676A1 (en) 2005-08-11
WO2003091171A2 (de) 2003-11-06

Similar Documents

Publication Publication Date Title
CN1129558C (zh) 采用等离子外部汽相沉积法制造用于光纤生产的管状件的方法
CN104245610B (zh) 由含氟的合成石英玻璃制备圆柱形组件的方法
JP4443234B2 (ja) 低oh含有率を有する円筒状石英ガラス体の製造方法
IL180213A (en) Quartz glass jig for processing semiconductor wafers and method for producing the jig
JPH0550448B2 (enExample)
JP4399357B2 (ja) 合成により製造された石英ガラスからなるジャケット管およびジャケット管を使用して製造される光ファイバー
JP6068571B2 (ja) ドープ石英ガラスの製造方法
KR101166205B1 (ko) 모재의 제조를 위한 합성 실리카 글래스 튜브, 수직 인발공정을 이용한 합성 실리카 글래스 튜브의 제조방법 및상기 튜브의 이용
JPS5844619B2 (ja) 光フアイバ母材の製造法
RU2179159C2 (ru) Способ уменьшения количества пузырьков в стеклянном изделии (варианты) и стеклянное изделие
US20080011019A1 (en) Method of manufacturing optical fiber preform and method of determining dehydrated condition of porous glass preform
JP4514748B2 (ja) 保持デバイスを使っての合成石英ガラスの中空シリンダーの製造方法とこの方法を実施するために適切な保持デバイス
EP0167054B1 (en) Method for producing glass preform for optical fiber
CN100351192C (zh) 用于生产预制体的合成二氧化硅玻璃管、用垂直拉丝工艺生产它的方法和所述管的用途
CN1262501C (zh) 在mcvd法中使用双喷灯制备光纤预制棒的方法和设备
KR100951644B1 (ko) 광섬유 모재의 제조방법, 광섬유 모재, 광섬유
US7707855B2 (en) Method for producing synthetic quartz glass with predetermined hydroxyl group content
EP0129306A1 (en) Optical fibre preform manufacture
CN1362938A (zh) 玻璃预制坯的生产方法与由其预制坯得到的光纤
TWI866447B (zh) 由石英玻璃製成之管及其製作方法
CN1387499A (zh) 纯的熔凝二氧化硅,窑炉和方法
WO2004101457A1 (ja) 光ファイバ用ガラス母材の製造方法
US8245542B2 (en) Method for producing a cylinder from synthetic quartz glass
JP3752990B2 (ja) フッ素添加ガラス物品の製造方法
JP4640292B2 (ja) 石英ガラス体製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20051206

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051206

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20081128

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20090226

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20090305

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090327

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090625

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20090925

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20091002

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091021

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20091218

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100112

R150 Certificate of patent or registration of utility model

Ref document number: 4443234

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130122

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140122

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees