CN1048700C - 紫外激光传能光纤预制棒制造方法 - Google Patents

紫外激光传能光纤预制棒制造方法 Download PDF

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CN1048700C
CN1048700C CN95102424A CN95102424A CN1048700C CN 1048700 C CN1048700 C CN 1048700C CN 95102424 A CN95102424 A CN 95102424A CN 95102424 A CN95102424 A CN 95102424A CN 1048700 C CN1048700 C CN 1048700C
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hydrogen
optical fiber
mixed gas
oxygen
manufacture method
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CN1131646A (zh
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孙明武
高祀建
顾真安
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China Building Materials Academy CBMA
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China Building Materials Academy CBMA
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Abstract

本发明涉及一种光纤预制棒的制造方法。以SiCl4、BBr3、氟氯烷、氧气、氢气、氦气为原料,在石英管内沉积氟硼共掺杂包层和为反光层,然后再沉积芯层。沉积芯层时掺入氢气,通过调节氢气与管内混合气体的比例,使得在芯层中形成不同的羟基含量,最后通过高温熔烧缩棒。本发明可制备出适用不同波长(200~400nm)的高透过率紫外光纤,在308nm波长透过率可达90~95%,在254nm,可达65-75%。

Description

紫外激光传能光纤预制棒制造方法
本发明涉及一种光电子材料中掺杂石英玻璃光纤预制棒的制造方法。
紫外传输光纤要求羟基的含量达1400~1500PPm,而且目前制造光纤的集中方法对于羟基的含量均难以控制和调节,或达不到上述含量,使得紫外传输光纤的性能不理想。
本发明的目的在于提供一种制造紫外光纤预制棒的方法,使得其羟基含量可以控制和调节。
本发明以SiCl4、BBr3、氟氯烷、氧气、氢气及氦气按一比例混合后通入石英管内,先沉积氟硼掺杂包层作反光层、再沉积芯层,沉积时掺入氢气,通过调节氢气与管内混合气体比例,使芯中形成不同的羟基含量,最后通过高温熔烧缩成预制棒。
附图1为本发明汽相沉积装置示意图。
附图2为本发明所述紫外光纤预制棒横断面结构示意图。
附图3为本发明所述预制棒羟基含量与透过率的关系(254nm)
附图4为两种不同羟基含量的光纤在紫外区透过率的比较,曲线A含有1200PPm羟基,曲线B含有200PPm羟基。
如附图1所示,本发明所用汽相沉积装置由氢气入口1、氦气入口2、氟氯烷入口3、O2入口4、SiCl4入口5、BBr3入口6、气体流量控制器7、旋转连接器8、玻璃车床9、氢氧焰燃烧器10构成,其中石英管11夹在玻璃车床9上并与旋转连接器8相接,通过旋转连接器8使石英管11在玻璃车床9上旋转时,可使气体流量控制器7不旋转,氢氧焰燃烧器10可在玻璃车床9上沿石英管11的长度方向左右移动。
如附图2所示,本发明所述预制棒由芯12、反光层13和石英包层14构成。
附图3的横轴为羟基含量(PPm),纵轴为透过率(%)。
附图4的横轴为波长(nm),纵轴为透过率(%)。
如附图1所示,制造本发明所述的预制棒时,将处理清洁好的石英管11夹在玻璃车床9上,使其以20~50转/分的速度旋转,使SiCl4按100~1000 ml/min、BBr3按150~1500 ml/min、氧气按300~2000ml/min、氟氯烷按2~20 ml/min的量通过气体流量控制器7混合后进入石英管11内,石英管11外通过氢氧焰燃烧器10加热到1200~1500℃,且氢氧焰燃烧器10喷出的火焰从石英管11的一端按50~150毫米/分的速度沿混合气体进入石英管11的方向移动,达到终端时立即以3000~5000毫米/分的速度返回初始端,从而完成一次沉积层的生成。反复上述移动过程若干次后预制棒的反光层沉积完毕。停止BBr3及氟氯烷的通入。添加氢气5~300 ml/min和氦气100~500 ml/min,SiCl4和氧气的通入量与沉积反光层时相同(即SiCl4 100~1000ml/min,氧气300~2000 ml/min),经气体流量控制器7混合后通入沉积完毕反光层的石英管11内,其中氢气与所述混合气体体积比为0.1~10%,再经过与沉积反光层的旋转和加热及移动过程相同的步骤即可完成若干层的芯层沉积。停止所有气体的通入,再提高氢氧焰燃烧器10的火焰温度到1900~2000℃进行缩棒即制成本发明所述的预制棒。
本发明通过各气体通入量的调节可制备出具有多种羟基含量的适用不同波长(200~400nm)的高透过率紫外光纤,在308nm波长的透过率达90~95%,在254nm可达65~75%。

Claims (1)

1.一种紫外激光传能光纤预制棒的制造方法,通过对石英管的不断旋转、通入混合气体、移动加热、熔烧缩成,其特征在于,所述沉积反光层时的混合气体为SiCl4100~1000 ml/min、BBr3150~1500ml/min、氧气300~2000 ml/min、氟氯烷2~200 ml/min,沉积芯层时的混合气体为SiCl4100~1000 ml/min、氧气300~2000 ml/min、氢气5~300 ml/min、氦气100~500 ml/min,其中氢气与混合气体体积比为0.1~10%,所述移动加热的加热温度为1200~1500℃,从石英管一端加热移动到达另一端后快速返回初始端,所述高温熔烧的温度为1900~2000℃。
CN95102424A 1995-03-17 1995-03-17 紫外激光传能光纤预制棒制造方法 Expired - Fee Related CN1048700C (zh)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101556352B (zh) * 2009-04-14 2010-12-29 长春理工大学 一种抑制传能光纤包层模式传播的方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10218864C1 (de) * 2002-04-26 2003-10-23 Heraeus Tenevo Ag Verfahren zur Herstellung eines zylinderförmigen Quarzglaskörpers mit geringem OH-Gehalt
CN102120687A (zh) * 2010-10-13 2011-07-13 成都亨通光通信有限公司 光纤预制棒的制造方法
WO2019143647A1 (en) * 2018-01-16 2019-07-25 Corning Incorporated Illumination of light diffusing optical fibers, illumination of blue-violet light delivery systems, blue-violet light delivery systems, and methods for blue-violet light induced disinfection

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4826288A (en) * 1987-04-09 1989-05-02 Polaroid Corporation, Patent Department Method for fabricating optical fibers having cores with high rare earth content
US4932990A (en) * 1987-07-30 1990-06-12 At&T Bell Laboratories Methods of making optical fiber and products produced thereby

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4826288A (en) * 1987-04-09 1989-05-02 Polaroid Corporation, Patent Department Method for fabricating optical fibers having cores with high rare earth content
US4932990A (en) * 1987-07-30 1990-06-12 At&T Bell Laboratories Methods of making optical fiber and products produced thereby

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101556352B (zh) * 2009-04-14 2010-12-29 长春理工大学 一种抑制传能光纤包层模式传播的方法

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