JP4436765B2 - 低応力半導体ダイ・アタッチ - Google Patents

低応力半導体ダイ・アタッチ Download PDF

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Publication number
JP4436765B2
JP4436765B2 JP2004564760A JP2004564760A JP4436765B2 JP 4436765 B2 JP4436765 B2 JP 4436765B2 JP 2004564760 A JP2004564760 A JP 2004564760A JP 2004564760 A JP2004564760 A JP 2004564760A JP 4436765 B2 JP4436765 B2 JP 4436765B2
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Japan
Prior art keywords
die
solder
dewetting
outer edge
die attach
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Expired - Fee Related
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JP2004564760A
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English (en)
Japanese (ja)
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JP2006512765A5 (enExample
JP2006512765A (ja
Inventor
ダブリュ. コンディ、ブライアン
ジェイ. ドゥラティ、デイビッド
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NXP USA Inc
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NXP USA Inc
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    • H01L2924/156Material
    • H01L2924/157Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2924/15738Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
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    • H01L2924/3511Warping

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Die Bonding (AREA)
JP2004564760A 2002-12-30 2003-09-30 低応力半導体ダイ・アタッチ Expired - Fee Related JP4436765B2 (ja)

Applications Claiming Priority (2)

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US10/334,042 US7042103B2 (en) 2002-12-30 2002-12-30 Low stress semiconductor die attach
PCT/US2003/030862 WO2004061936A1 (en) 2002-12-30 2003-09-30 Low stress semiconductor die attach

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Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7332414B2 (en) * 2005-06-22 2008-02-19 Freescale Semiconductor, Inc. Chemical die singulation technique
TW200820455A (en) * 2006-10-18 2008-05-01 Young Lighting Technology Corp LED package and manufacture method thereof
US8274162B2 (en) * 2007-01-20 2012-09-25 Triquint Semiconductor, Inc. Apparatus and method for reduced delamination of an integrated circuit module
WO2008132559A1 (en) * 2007-04-27 2008-11-06 Freescale Semiconductor, Inc. Semiconductor wafer processing
CN101295695A (zh) * 2007-04-29 2008-10-29 飞思卡尔半导体(中国)有限公司 具有焊料流动控制的引线框架
US8718720B1 (en) * 2010-07-30 2014-05-06 Triquint Semiconductor, Inc. Die including a groove extending from a via to an edge of the die
CN102255033B (zh) * 2011-07-14 2013-04-10 佛山市蓝箭电子股份有限公司 一种大功率led封装结构及其封装方法
US9177907B1 (en) 2012-04-03 2015-11-03 Rockwell Collins, Inc. High performance deposited die attach
US8962389B2 (en) 2013-05-30 2015-02-24 Freescale Semiconductor, Inc. Microelectronic packages including patterned die attach material and methods for the fabrication thereof
US9171786B1 (en) 2014-07-02 2015-10-27 Freescale Semiconductor, Inc. Integrated circuit with recess for die attachment
JP6430422B2 (ja) * 2016-02-29 2018-11-28 株式会社東芝 半導体装置
US11114387B2 (en) 2017-02-15 2021-09-07 Industrial Technology Research Institute Electronic packaging structure
US11488923B2 (en) 2019-05-24 2022-11-01 Wolfspeed, Inc. High reliability semiconductor devices and methods of fabricating the same
CN112038216A (zh) * 2020-09-08 2020-12-04 重庆邮电大学 一种p型非晶态半导体薄膜及其薄膜晶体管制备方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0023534A3 (en) * 1979-08-06 1982-04-28 Teccor Electronics, Inc. Semiconductor device mounting structure and method of mounting
US4918511A (en) 1985-02-01 1990-04-17 Advanced Micro Devices, Inc. Thermal expansion compensated metal lead frame for integrated circuit package
US4903118A (en) * 1988-03-30 1990-02-20 Director General, Agency Of Industrial Science And Technology Semiconductor device including a resilient bonding resin
US4952999A (en) 1988-04-26 1990-08-28 National Semiconductor Corporation Method and apparatus for reducing die stress
US5075254A (en) 1988-04-26 1991-12-24 National Semiconductor Corporation Method and apparatus for reducing die stress
US5261155A (en) * 1991-08-12 1993-11-16 International Business Machines Corporation Method for bonding flexible circuit to circuitized substrate to provide electrical connection therebetween using different solders
US5156998A (en) 1991-09-30 1992-10-20 Hughes Aircraft Company Bonding of integrated circuit chip to carrier using gold/tin eutectic alloy and refractory metal barrier layer to block migration of tin through via holes
US5350662A (en) 1992-03-26 1994-09-27 Hughes Aircraft Company Maskless process for forming refractory metal layer in via holes of GaAs chips
US5409863A (en) * 1993-02-19 1995-04-25 Lsi Logic Corporation Method and apparatus for controlling adhesive spreading when attaching an integrated circuit die
JP3350152B2 (ja) * 1993-06-24 2002-11-25 三菱電機株式会社 半導体装置およびその製造方法
JP3263288B2 (ja) * 1995-09-13 2002-03-04 株式会社東芝 半導体装置
SG46955A1 (en) 1995-10-28 1998-03-20 Inst Of Microelectronics Ic packaging lead frame for reducing chip stress and deformation
US5804880A (en) 1996-11-04 1998-09-08 National Semiconductor Corporation Solder isolating lead frame
US5825093A (en) * 1997-03-31 1998-10-20 Motorola, Inc. Attachment system and method therefor
US6169322B1 (en) 1998-03-06 2001-01-02 Cypress Semiconductor Corporation Die attach pad adapted to reduce delamination stress and method of using same
JP3274647B2 (ja) 1998-05-15 2002-04-15 日本電気株式会社 光半導体素子の実装構造
WO2001095375A1 (en) * 2000-06-06 2001-12-13 The Penn State Research Foundation An electro-fluidic assembly process for integration of electronic devices onto a substrate
US6672947B2 (en) * 2001-03-13 2004-01-06 Nptest, Llc Method for global die thinning and polishing of flip-chip packaged integrated circuits
US20020182385A1 (en) * 2001-05-29 2002-12-05 Rensselaer Polytechnic Institute Atomic layer passivation

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US20040124543A1 (en) 2004-07-01
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