JP4400888B2 - レーザ照射装置及びレーザ熱転写法 - Google Patents
レーザ照射装置及びレーザ熱転写法 Download PDFInfo
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
- B23K26/0661—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks disposed on the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
- B41J2/475—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material for heating selectively by radiation or ultrasonic waves
- B41J2/4753—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material for heating selectively by radiation or ultrasonic waves using thermosensitive substrates, e.g. paper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used
- B41M5/382—Contact thermal transfer or sublimation processes
- B41M5/38207—Contact thermal transfer or sublimation processes characterised by aspects not provided for in groups B41M5/385 - B41M5/395
- B41M5/38221—Apparatus features
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
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- Optics & Photonics (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Toxicology (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
Description
まず,本発明の第1の実施形態にかかるレーザ照射装置及びレーザ熱転写法について説明する。図2A及び図2Bは,本発明の第1実施形態に係るレーザ照射装置及びレーザ熱転写法を説明する模式図である。
次に,本発明の第2の実施形態にかかるレーザ照射装置及びレーザ熱転写法について説明する。図3A及び図3Bは,本発明の第2実施形態に係るレーザ照射装置及びレーザ熱転写法を説明する模式図である。
151 ベース基板
152 光熱変換層
153 転写層
160 アクセプタ基板
200,300 レーザ照射装置
210,310 レーザ発生器
211,311 パターニング用レーザ発生器
212,312 予熱用レーザ発生器
220,320,325 マスク
230,330,335 プロジェクションレンズ
235 ビームシェイピング装置
240,245,340,345 レーザビーム
246,346 パターニング用レーザ発生器から発生するレーザビームと予熱用レーザ発生器から発生するレーザビームが互いに重なる領域
Claims (16)
- 転写パターンに対応してパターニングされたマスクを介してドナー基板の所定領域にレーザビームを照射し,前記ドナー基板の所定領域に位置する転写層を選択的に変形させる予熱用レーザ発生器と;
前記転写パターンがパターニングされたマスクを介して前記ドナー基板の所定領域にレーザビームを照射し,前記ドナー基板の所定領域に位置し,かつ,前記予熱用レーザ発生器のレーザビームにより選択的に変形された前記転写層を,前記ドナー基板からアクセプタ基板上に選択的に転写するパターニング用レーザ発生器と;
を備えることを特徴とする,レーザ照射装置。 - 前記予熱用レーザ発生器の下方に配置されるビームシェイピング装置をさらに備えることを特徴とする,請求項1に記載のレーザ照射装置。
- 前記パターニング用レーザ発生器及び前記予熱用レーザ発生器は,互いに異なる波長のレーザビームを発生させることを特徴とする,請求項1または2に記載のレーザ照射装置。
- 前記パターニング用レーザ発生器から発生するレーザビームは,前記予熱用レーザ発生器から発生するレーザビームよりさらに大きい強度を有することを特徴とする,請求項1〜3のいずれかに記載のレーザ照射装置。
- 前記パターニング用レーザ発生器及び前記予熱用レーザ発生器から各々発生するレーザビームは,照射される領域において互いに重なる部分を有することを特徴とする,請求項1〜4のいずれかに記載のレーザ照射装置。
- 予熱用レーザ発生器を用いて,転写パターンに対応してパターニングされたマスクを介してドナー基板の所定領域にレーザビームを照射し,前記ドナー基板の所定領域に位置する転写層を選択的に変形させる段階と;
パターニング用レーザ発生器を用いて,前記転写パターンがパターニングされたマスクを介して前記ドナー基板の所定領域にレーザビームを照射し,かつ,前記ドナー基板の所定領域に位置し,前記予熱用レーザ発生器のレーザビームにより選択的に変形された前記転写層を,前記ドナー基板からアクセプタ基板上に選択的に転写する段階と;
を含むことを特徴とする,レーザ熱転写法。 - 前記レーザ照射装置は,前記予熱用レーザ発生器の下方に配置されるビームシェイピング装置をさらに備えることを特徴とする,請求項6に記載のレーザ熱転写法。
- 前記パターニング用レーザ発生器及び前記予熱用レーザ発生器は,互いに異なる波長のレーザビームを発生させることを特徴とする,請求項6または7に記載のレーザ熱転写法。
- 前記パターニング用レーザ発生器から発生するレーザビームは,前記予熱用レーザ発生器から発生するレーザビームよりさらに大きい強度を有することを特徴とする,請求項6〜8のいずれかに記載のレーザ熱転写法。
- 前記パターニング用レーザ発生器及び前記予熱用レーザ発生器は,照射される領域において互いに重なる部分を有するように,前記レーザビームを各々発生させることを特徴とする,請求項6〜9のいずれかに記載のレーザ熱転写法。
- 前記ドナー基板は,前記ベース基板と,前記ベース基板上に位置する光熱変換層(LTHC)と,前記光熱変換層上に位置する前記転写層とを備えることを特徴とする,請求項6〜10に記載のレーザ熱転写法。
- 前記予熱用レーザ発生器から発生するレーザビームは,前記光熱変換層の温度を前記転写層のガラス転移温度(Tg)まで上昇させることを特徴とする,請求項11に記載のレーザ熱転写法。
- 前記ドナー基板は,前記光熱変換層と前記転写層との間に位置するバッファ層をさらに備えることを特徴とする,請求項11に記載のレーザ熱転写法。
- 前記予熱用レーザ発生器から発生するレーザビームは,前記バッファ層の温度を前記転写層のガラス転移温度(Tg)まで上昇させることを特徴とする,請求項13に記載のレーザ熱転写法。
- 前記アクセプタ基板上には,有機電界発光素子を構成する画素電極が設けられていることを特徴とする,請求項11〜14のいずれかに記載のレーザ熱転写法。
- 前記転写層は,有機物質よりなることを特徴とする,請求項15に記載のレーザ熱転写法。
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KR1020050014716A KR100700654B1 (ko) | 2005-02-22 | 2005-02-22 | 레이저 조사 장치 및 레이저 열 전사법 |
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JP2006231407A JP2006231407A (ja) | 2006-09-07 |
JP4400888B2 true JP4400888B2 (ja) | 2010-01-20 |
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US (1) | US9272364B2 (ja) |
JP (1) | JP4400888B2 (ja) |
KR (1) | KR100700654B1 (ja) |
CN (1) | CN1824518B (ja) |
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US7804759B2 (en) * | 2006-11-27 | 2010-09-28 | Toshiba Tec Kabushiki Kaisha | Contactless optical writing apparatus |
JP2008187056A (ja) * | 2007-01-30 | 2008-08-14 | Shinka Jitsugyo Kk | 半田付け方法及び装置 |
JP2008235010A (ja) * | 2007-03-20 | 2008-10-02 | Sony Corp | 表示装置の製造方法 |
KR101563237B1 (ko) | 2007-06-01 | 2015-10-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 제조장치 및 발광장치 제작방법 |
KR100887368B1 (ko) * | 2007-12-17 | 2009-03-06 | 주식회사 엠엠티 | Co₂및 다이오드 레이저를 이용한 평판 디스플레이패널의 실링방법 |
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KR101416921B1 (ko) * | 2013-03-19 | 2014-07-08 | 주식회사 창강화학 | 광학 마스크 및 이를 포함하는 레이저 열 전사 장치 |
KR20150003970A (ko) * | 2013-07-01 | 2015-01-12 | 삼성디스플레이 주식회사 | 도너 필름 및 이를 이용한 열 전사 방법 |
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KR100700654B1 (ko) | 2007-03-27 |
KR20060093615A (ko) | 2006-08-25 |
US20060188825A1 (en) | 2006-08-24 |
JP2006231407A (ja) | 2006-09-07 |
CN1824518B (zh) | 2012-05-23 |
US9272364B2 (en) | 2016-03-01 |
CN1824518A (zh) | 2006-08-30 |
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