GB0518105D0 - Step-and-repeat laser ablation of electronic devices - Google Patents
Step-and-repeat laser ablation of electronic devicesInfo
- Publication number
- GB0518105D0 GB0518105D0 GBGB0518105.2A GB0518105A GB0518105D0 GB 0518105 D0 GB0518105 D0 GB 0518105D0 GB 0518105 A GB0518105 A GB 0518105A GB 0518105 D0 GB0518105 D0 GB 0518105D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- electronic devices
- laser ablation
- repeat laser
- repeat
- ablation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000000608 laser ablation Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/621—Providing a shape to conductive layers, e.g. patterning or selective deposition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
- B23K2103/166—Multilayered materials
- B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09672—Superposed layout, i.e. in different planes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Lasers (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0518105.2A GB0518105D0 (en) | 2005-09-06 | 2005-09-06 | Step-and-repeat laser ablation of electronic devices |
GBGB0523141.0A GB0523141D0 (en) | 2005-09-06 | 2005-11-14 | Laser ablation of electronic devices |
JP2008529697A JP5185118B2 (en) | 2005-09-06 | 2006-08-31 | Laser ablation of electronic devices |
US14/260,240 USRE45885E1 (en) | 2005-06-01 | 2006-08-31 | Laser ablation of electronic devices |
US12/065,722 US8062984B2 (en) | 2005-09-06 | 2006-08-31 | Laser ablation of electronic devices |
EP06779619.3A EP1922775B1 (en) | 2005-09-06 | 2006-08-31 | Laser ablation of electronic devices |
PCT/GB2006/050265 WO2007029028A1 (en) | 2005-09-06 | 2006-08-31 | Laser ablation of electronic devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0518105.2A GB0518105D0 (en) | 2005-09-06 | 2005-09-06 | Step-and-repeat laser ablation of electronic devices |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0518105D0 true GB0518105D0 (en) | 2005-10-12 |
Family
ID=35220929
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB0518105.2A Ceased GB0518105D0 (en) | 2005-06-01 | 2005-09-06 | Step-and-repeat laser ablation of electronic devices |
GBGB0523141.0A Ceased GB0523141D0 (en) | 2005-06-01 | 2005-11-14 | Laser ablation of electronic devices |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB0523141.0A Ceased GB0523141D0 (en) | 2005-06-01 | 2005-11-14 | Laser ablation of electronic devices |
Country Status (3)
Country | Link |
---|---|
US (1) | US8062984B2 (en) |
JP (1) | JP5185118B2 (en) |
GB (2) | GB0518105D0 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100700654B1 (en) | 2005-02-22 | 2007-03-27 | 삼성에스디아이 주식회사 | Laser Irradiation Device and Laser Induced Thermal Imaging |
CA2628100C (en) | 2005-11-02 | 2016-08-23 | Visualsonics Inc. | High frequency array ultrasound system |
US9173047B2 (en) | 2008-09-18 | 2015-10-27 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
EP3576137A1 (en) | 2008-09-18 | 2019-12-04 | FUJIFILM SonoSite, Inc. | Ultrasound transducers |
US9184369B2 (en) | 2008-09-18 | 2015-11-10 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
US8187795B2 (en) * | 2008-12-09 | 2012-05-29 | The Board Of Trustees Of The University Of Illinois | Patterning methods for stretchable structures |
US8809733B2 (en) * | 2009-10-16 | 2014-08-19 | Apple Inc. | Sub-surface marking of product housings |
KR102107871B1 (en) | 2013-02-18 | 2020-05-08 | 오르보테크 엘티디. | Two-step, direct-write laser metallization |
US10622244B2 (en) | 2013-02-18 | 2020-04-14 | Orbotech Ltd. | Pulsed-mode direct-write laser metallization |
US20220406601A1 (en) * | 2021-06-16 | 2022-12-22 | Monolithic Power Systems, Inc. | Laser induced semiconductor wafer patterning |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2864915B2 (en) | 1992-12-07 | 1999-03-08 | 株式会社日立製作所 | Method for manufacturing semiconductor device |
US5446521A (en) | 1993-06-30 | 1995-08-29 | Intel Corporation | Phase-shifted opaquing ring |
KR19990007929A (en) * | 1995-04-26 | 1999-01-25 | 데이빗로스클리블랜드 | Multi-faced repeated exposure method and apparatus |
JP3197484B2 (en) | 1995-05-31 | 2001-08-13 | シャープ株式会社 | Photomask and method of manufacturing the same |
KR100627210B1 (en) | 1995-08-04 | 2006-12-01 | 다이니폰 인사츠 가부시키가이샤 | Phase Shift Mask |
JP3402921B2 (en) * | 1996-04-26 | 2003-05-06 | 三洋電機株式会社 | Method for removing metal film, method for manufacturing solar cell, and solar cell |
EP0968537B1 (en) | 1997-08-22 | 2012-05-02 | Creator Technology B.V. | A method of manufacturing a field-effect transistor substantially consisting of organic materials |
JPH11320166A (en) * | 1998-05-21 | 1999-11-24 | Ricoh Microelectronics Co Ltd | Light processing device |
US6207472B1 (en) * | 1999-03-09 | 2001-03-27 | International Business Machines Corporation | Low temperature thin film transistor fabrication |
US6719916B2 (en) * | 2001-04-18 | 2004-04-13 | National Research Council Of Canada | Multilayer microstructures and laser based method for precision and reduced damage patterning of such structures |
JP2003258256A (en) * | 2002-02-27 | 2003-09-12 | Konica Corp | Organic tft device and its manufacturing method |
JP2004165068A (en) * | 2002-11-14 | 2004-06-10 | Sanyo Electric Co Ltd | Manufacturing method of organic electroluminescent panel |
GB0300105D0 (en) | 2003-01-03 | 2003-02-05 | Cambridge Display Tech Ltd | Ablation methods & apparatus |
JP4389447B2 (en) * | 2003-01-28 | 2009-12-24 | セイコーエプソン株式会社 | Manufacturing method of electro-optical device |
US6927108B2 (en) * | 2003-07-09 | 2005-08-09 | Hewlett-Packard Development Company, L.P. | Solution-processed thin film transistor formation method |
GB0426126D0 (en) | 2004-11-29 | 2004-12-29 | Plastic Logic Ltd | Distortion compensation for multiple head printing |
GB0511132D0 (en) | 2005-06-01 | 2005-07-06 | Plastic Logic Ltd | Layer-selective laser ablation patterning |
-
2005
- 2005-09-06 GB GBGB0518105.2A patent/GB0518105D0/en not_active Ceased
- 2005-11-14 GB GBGB0523141.0A patent/GB0523141D0/en not_active Ceased
-
2006
- 2006-08-31 US US12/065,722 patent/US8062984B2/en active Active
- 2006-08-31 JP JP2008529697A patent/JP5185118B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP5185118B2 (en) | 2013-04-17 |
US8062984B2 (en) | 2011-11-22 |
JP2009507388A (en) | 2009-02-19 |
GB0523141D0 (en) | 2005-12-21 |
US20090298299A1 (en) | 2009-12-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |