JP4365927B2 - 干渉計測装置及び格子干渉式エンコーダ - Google Patents

干渉計測装置及び格子干渉式エンコーダ Download PDF

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Publication number
JP4365927B2
JP4365927B2 JP06679899A JP6679899A JP4365927B2 JP 4365927 B2 JP4365927 B2 JP 4365927B2 JP 06679899 A JP06679899 A JP 06679899A JP 6679899 A JP6679899 A JP 6679899A JP 4365927 B2 JP4365927 B2 JP 4365927B2
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Japan
Prior art keywords
light
light beam
interference
plate
transmitted
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Expired - Fee Related
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JP06679899A
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English (en)
Japanese (ja)
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JP2000258124A5 (enExample
JP2000258124A (ja
Inventor
公 石塚
成樹 加藤
秀次郎 門脇
孝幸 門島
泰 金田
榮 法隆
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Canon Inc
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Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP06679899A priority Critical patent/JP4365927B2/ja
Priority to US09/523,312 priority patent/US6657181B1/en
Priority to EP00105083A priority patent/EP1037019A3/en
Publication of JP2000258124A publication Critical patent/JP2000258124A/ja
Priority to US10/425,680 priority patent/US7034947B2/en
Priority to US11/335,565 priority patent/US7375820B2/en
Publication of JP2000258124A5 publication Critical patent/JP2000258124A5/ja
Application granted granted Critical
Publication of JP4365927B2 publication Critical patent/JP4365927B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/344—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP06679899A 1999-03-12 1999-03-12 干渉計測装置及び格子干渉式エンコーダ Expired - Fee Related JP4365927B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP06679899A JP4365927B2 (ja) 1999-03-12 1999-03-12 干渉計測装置及び格子干渉式エンコーダ
US09/523,312 US6657181B1 (en) 1999-03-12 2000-03-10 Optical element used in compact interference measuring apparatus detecting plurality of phase difference signals
EP00105083A EP1037019A3 (en) 1999-03-12 2000-03-10 Interference measuring apparatus
US10/425,680 US7034947B2 (en) 1999-03-12 2003-04-30 Compact interference measuring apparatus for detecting the magnitude and direction of positional deviation
US11/335,565 US7375820B2 (en) 1999-03-12 2006-01-20 Interference measuring apparatus for detecting a plurality of stable phase difference signals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06679899A JP4365927B2 (ja) 1999-03-12 1999-03-12 干渉計測装置及び格子干渉式エンコーダ

Publications (3)

Publication Number Publication Date
JP2000258124A JP2000258124A (ja) 2000-09-22
JP2000258124A5 JP2000258124A5 (enExample) 2006-04-27
JP4365927B2 true JP4365927B2 (ja) 2009-11-18

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP06679899A Expired - Fee Related JP4365927B2 (ja) 1999-03-12 1999-03-12 干渉計測装置及び格子干渉式エンコーダ

Country Status (3)

Country Link
US (3) US6657181B1 (enExample)
EP (1) EP1037019A3 (enExample)
JP (1) JP4365927B2 (enExample)

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JP4846909B2 (ja) * 2000-02-15 2011-12-28 キヤノン株式会社 光学式エンコーダ及び回折格子の変位測定方法
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US7230717B2 (en) * 2003-08-28 2007-06-12 4D Technology Corporation Pixelated phase-mask interferometer
JP2006163291A (ja) * 2004-12-10 2006-06-22 Canon Inc 光学素子及びその製造方法
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CN101479563A (zh) * 2006-04-28 2009-07-08 麦克罗尼克激光系统公司 用于记录图像以及表面研究的方法和装置
JP2008286518A (ja) * 2007-05-15 2008-11-27 Hitachi Ltd 変位計測方法とその装置
JP5523664B2 (ja) * 2007-11-06 2014-06-18 株式会社ミツトヨ 干渉計
JP5381371B2 (ja) * 2008-11-07 2014-01-08 株式会社リコー 偏光分離デバイス、光走査装置及び画像形成装置
JP5395603B2 (ja) 2009-10-05 2014-01-22 太陽誘電株式会社 回生ブレーキ装置及びこれを備えた電動アシスト車
WO2011043354A1 (ja) * 2009-10-05 2011-04-14 太陽誘電株式会社 変位計測方法及び変位計測装置
TWI417519B (zh) * 2009-12-10 2013-12-01 Ind Tech Res Inst 干涉相位差量測方法及其系統
JP5699105B2 (ja) * 2012-04-11 2015-04-08 株式会社日立製作所 表面計測方法とその装置
EP2792996A1 (en) * 2013-04-17 2014-10-22 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Interferometric distance sensing device and method
CN109238148B (zh) 2018-09-13 2020-10-27 清华大学 一种五自由度外差光栅干涉测量系统
CN112630879B (zh) * 2020-12-25 2022-09-30 中国工程物理研究院激光聚变研究中心 一种相位延迟元件及相位延迟装置

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Also Published As

Publication number Publication date
US7375820B2 (en) 2008-05-20
US6657181B1 (en) 2003-12-02
EP1037019A3 (en) 2001-11-07
US20030223075A1 (en) 2003-12-04
US20060114474A1 (en) 2006-06-01
JP2000258124A (ja) 2000-09-22
EP1037019A2 (en) 2000-09-20
US7034947B2 (en) 2006-04-25

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