JP2000258124A5 - - Google Patents

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Publication number
JP2000258124A5
JP2000258124A5 JP1999066798A JP6679899A JP2000258124A5 JP 2000258124 A5 JP2000258124 A5 JP 2000258124A5 JP 1999066798 A JP1999066798 A JP 1999066798A JP 6679899 A JP6679899 A JP 6679899A JP 2000258124 A5 JP2000258124 A5 JP 2000258124A5
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JP
Japan
Prior art keywords
light beam
light
polarizing plate
plate
linearly polarized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999066798A
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English (en)
Japanese (ja)
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JP4365927B2 (ja
JP2000258124A (ja
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Priority claimed from JP06679899A external-priority patent/JP4365927B2/ja
Priority to JP06679899A priority Critical patent/JP4365927B2/ja
Application filed filed Critical
Priority to US09/523,312 priority patent/US6657181B1/en
Priority to EP00105083A priority patent/EP1037019A3/en
Publication of JP2000258124A publication Critical patent/JP2000258124A/ja
Priority to US10/425,680 priority patent/US7034947B2/en
Priority to US11/335,565 priority patent/US7375820B2/en
Publication of JP2000258124A5 publication Critical patent/JP2000258124A5/ja
Publication of JP4365927B2 publication Critical patent/JP4365927B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP06679899A 1999-03-12 1999-03-12 干渉計測装置及び格子干渉式エンコーダ Expired - Fee Related JP4365927B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP06679899A JP4365927B2 (ja) 1999-03-12 1999-03-12 干渉計測装置及び格子干渉式エンコーダ
US09/523,312 US6657181B1 (en) 1999-03-12 2000-03-10 Optical element used in compact interference measuring apparatus detecting plurality of phase difference signals
EP00105083A EP1037019A3 (en) 1999-03-12 2000-03-10 Interference measuring apparatus
US10/425,680 US7034947B2 (en) 1999-03-12 2003-04-30 Compact interference measuring apparatus for detecting the magnitude and direction of positional deviation
US11/335,565 US7375820B2 (en) 1999-03-12 2006-01-20 Interference measuring apparatus for detecting a plurality of stable phase difference signals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06679899A JP4365927B2 (ja) 1999-03-12 1999-03-12 干渉計測装置及び格子干渉式エンコーダ

Publications (3)

Publication Number Publication Date
JP2000258124A JP2000258124A (ja) 2000-09-22
JP2000258124A5 true JP2000258124A5 (enExample) 2006-04-27
JP4365927B2 JP4365927B2 (ja) 2009-11-18

Family

ID=13326261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP06679899A Expired - Fee Related JP4365927B2 (ja) 1999-03-12 1999-03-12 干渉計測装置及び格子干渉式エンコーダ

Country Status (3)

Country Link
US (3) US6657181B1 (enExample)
EP (1) EP1037019A3 (enExample)
JP (1) JP4365927B2 (enExample)

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JP5381371B2 (ja) * 2008-11-07 2014-01-08 株式会社リコー 偏光分離デバイス、光走査装置及び画像形成装置
JP5395603B2 (ja) 2009-10-05 2014-01-22 太陽誘電株式会社 回生ブレーキ装置及びこれを備えた電動アシスト車
WO2011043354A1 (ja) * 2009-10-05 2011-04-14 太陽誘電株式会社 変位計測方法及び変位計測装置
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JP5699105B2 (ja) * 2012-04-11 2015-04-08 株式会社日立製作所 表面計測方法とその装置
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