JP4364593B2 - アルミナ質セラミック板及びその製造方法 - Google Patents

アルミナ質セラミック板及びその製造方法 Download PDF

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Publication number
JP4364593B2
JP4364593B2 JP2003336790A JP2003336790A JP4364593B2 JP 4364593 B2 JP4364593 B2 JP 4364593B2 JP 2003336790 A JP2003336790 A JP 2003336790A JP 2003336790 A JP2003336790 A JP 2003336790A JP 4364593 B2 JP4364593 B2 JP 4364593B2
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Japan
Prior art keywords
ceramic plate
alumina ceramic
temperature
volume resistivity
titanium oxide
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Expired - Fee Related
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JP2003336790A
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Japanese (ja)
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JP2005104746A5 (enExample
JP2005104746A (ja
Inventor
崇 大沼
等 金子
雅史 小野
寛 米倉
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Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
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Priority to JP2003336790A priority Critical patent/JP4364593B2/ja
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Publication of JP2005104746A5 publication Critical patent/JP2005104746A5/ja
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Compositions Of Oxide Ceramics (AREA)
JP2003336790A 2003-09-29 2003-09-29 アルミナ質セラミック板及びその製造方法 Expired - Fee Related JP4364593B2 (ja)

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JP2003336790A JP4364593B2 (ja) 2003-09-29 2003-09-29 アルミナ質セラミック板及びその製造方法

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JP2003336790A JP4364593B2 (ja) 2003-09-29 2003-09-29 アルミナ質セラミック板及びその製造方法

Publications (3)

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JP2005104746A JP2005104746A (ja) 2005-04-21
JP2005104746A5 JP2005104746A5 (enExample) 2006-07-27
JP4364593B2 true JP4364593B2 (ja) 2009-11-18

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JP2003336790A Expired - Fee Related JP4364593B2 (ja) 2003-09-29 2003-09-29 アルミナ質セラミック板及びその製造方法

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5203313B2 (ja) * 2008-09-01 2013-06-05 日本碍子株式会社 酸化アルミニウム焼結体及びその製法
JP5872998B2 (ja) 2012-04-26 2016-03-01 日本特殊陶業株式会社 アルミナ焼結体、それを備える部材、および半導体製造装置
JP5775544B2 (ja) * 2013-05-09 2015-09-09 日本特殊陶業株式会社 点火プラグ用絶縁体及び点火プラグ
JP6088346B2 (ja) * 2013-05-09 2017-03-01 新光電気工業株式会社 静電チャック及び半導体製造装置

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JP2005104746A (ja) 2005-04-21

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