JP4349528B2 - 基板搬送装置、基板制御方法、カラーフィルタ製造方法、電子回路製造方法 - Google Patents

基板搬送装置、基板制御方法、カラーフィルタ製造方法、電子回路製造方法 Download PDF

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Publication number
JP4349528B2
JP4349528B2 JP2005016586A JP2005016586A JP4349528B2 JP 4349528 B2 JP4349528 B2 JP 4349528B2 JP 2005016586 A JP2005016586 A JP 2005016586A JP 2005016586 A JP2005016586 A JP 2005016586A JP 4349528 B2 JP4349528 B2 JP 4349528B2
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Prior art keywords
substrate
unit
alignment
moving
control method
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Expired - Fee Related
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JP2005016586A
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Japanese (ja)
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JP2006210393A5 (enExample
JP2006210393A (ja
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英規 中村
祐幾 中西
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Dai Nippon Printing Co Ltd
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Dai Nippon Printing Co Ltd
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JP2005016586A 2005-01-25 2005-01-25 基板搬送装置、基板制御方法、カラーフィルタ製造方法、電子回路製造方法 Expired - Fee Related JP4349528B2 (ja)

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JP2005016586A JP4349528B2 (ja) 2005-01-25 2005-01-25 基板搬送装置、基板制御方法、カラーフィルタ製造方法、電子回路製造方法

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JP2005016586A JP4349528B2 (ja) 2005-01-25 2005-01-25 基板搬送装置、基板制御方法、カラーフィルタ製造方法、電子回路製造方法

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JP2006210393A JP2006210393A (ja) 2006-08-10
JP2006210393A5 JP2006210393A5 (enExample) 2006-12-21
JP4349528B2 true JP4349528B2 (ja) 2009-10-21

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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4842748B2 (ja) * 2006-09-22 2011-12-21 オリンパス株式会社 基板搬送システム
JP4652351B2 (ja) * 2007-02-02 2011-03-16 大日本印刷株式会社 基板支持装置、基板支持方法
JP4541396B2 (ja) * 2007-11-02 2010-09-08 東京エレクトロン株式会社 塗布膜形成装置、基板搬送方法及び記憶媒体
KR101296659B1 (ko) * 2008-11-14 2013-08-14 엘지디스플레이 주식회사 세정 장치
KR102172551B1 (ko) * 2010-02-17 2020-11-02 가부시키가이샤 니콘 반송 장치, 반송 방법, 노광 장치, 및 디바이스 제조 방법
JP2012099611A (ja) * 2010-11-01 2012-05-24 Olympus Corp 処理装置
JP5582021B2 (ja) * 2010-12-22 2014-09-03 村田機械株式会社 物品搬送装置
CN103472602A (zh) * 2013-09-06 2013-12-25 苏州凯欧机械科技有限公司 一种液晶制造设备定位工作台校准模块
CN107934431B (zh) * 2017-12-21 2024-04-05 苏州精濑光电有限公司 一种基板传送装置及基板检测装置
KR102699915B1 (ko) * 2021-10-29 2024-08-27 세메스 주식회사 기판 처리 장치 및 이를 이용한 기판 처리 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6436041A (en) * 1987-07-31 1989-02-07 Nec Corp Noncontact wafer transfer mechanism
JPH01278038A (ja) * 1988-04-28 1989-11-08 Hitachi Electron Eng Co Ltd ウエハ搬送装置
JPH02130849A (ja) * 1988-11-11 1990-05-18 Hitachi Ltd 搬送装置
JPH09169427A (ja) * 1995-12-22 1997-06-30 Kaijo Corp 浮揚装置及び該装置を具備した基板搬送装置
JP3759450B2 (ja) * 2001-12-19 2006-03-22 株式会社白井▲鉄▼工所 液晶パネルの折割装置
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
JP4069980B2 (ja) * 2004-02-24 2008-04-02 東京エレクトロン株式会社 塗布膜形成装置

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