JP4342142B2 - 半導体受光素子 - Google Patents

半導体受光素子 Download PDF

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Publication number
JP4342142B2
JP4342142B2 JP2002081041A JP2002081041A JP4342142B2 JP 4342142 B2 JP4342142 B2 JP 4342142B2 JP 2002081041 A JP2002081041 A JP 2002081041A JP 2002081041 A JP2002081041 A JP 2002081041A JP 4342142 B2 JP4342142 B2 JP 4342142B2
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JP
Japan
Prior art keywords
region
impurity diffusion
layer
diffusion region
impurity
Prior art date
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Expired - Lifetime
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JP2002081041A
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English (en)
Japanese (ja)
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JP2003282848A5 (enExample
JP2003282848A (ja
Inventor
祐次 浅野
盛央 加藤
孝男 瀬戸山
稔彦 福島
和弘 夏秋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Fujitsu Semiconductor Ltd
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Sharp Corp
Fujitsu Semiconductor Ltd
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Publication date
Application filed by Sharp Corp, Fujitsu Semiconductor Ltd filed Critical Sharp Corp
Priority to JP2002081041A priority Critical patent/JP4342142B2/ja
Priority to TW092105956A priority patent/TW587333B/zh
Priority to CNB031209289A priority patent/CN1238906C/zh
Priority to US10/393,389 priority patent/US6828644B2/en
Priority to KR1020030017737A priority patent/KR100878543B1/ko
Publication of JP2003282848A publication Critical patent/JP2003282848A/ja
Publication of JP2003282848A5 publication Critical patent/JP2003282848A5/ja
Application granted granted Critical
Publication of JP4342142B2 publication Critical patent/JP4342142B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/95—Circuit arrangements
    • H10F77/953—Circuit arrangements for devices having potential barriers
    • H10F77/957—Circuit arrangements for devices having potential barriers for position-sensitive photodetectors, e.g. lateral-effect photodiodes or quadrant photodiodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/761—PN junctions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/763—Polycrystalline semiconductor regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/107—Integrated devices having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Light Receiving Elements (AREA)
  • Element Separation (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Bipolar Transistors (AREA)
JP2002081041A 2002-03-22 2002-03-22 半導体受光素子 Expired - Lifetime JP4342142B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2002081041A JP4342142B2 (ja) 2002-03-22 2002-03-22 半導体受光素子
TW092105956A TW587333B (en) 2002-03-22 2003-03-18 Semiconductor device with reduced parasitic capacitance between impurity diffusion regions
CNB031209289A CN1238906C (zh) 2002-03-22 2003-03-21 在杂质扩散区之间具有减小的寄生电容的半导体器件
US10/393,389 US6828644B2 (en) 2002-03-22 2003-03-21 Semiconductor device with reduced parasitic capacitance between impurity diffusion regions
KR1020030017737A KR100878543B1 (ko) 2002-03-22 2003-03-21 반도체 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002081041A JP4342142B2 (ja) 2002-03-22 2002-03-22 半導体受光素子

Publications (3)

Publication Number Publication Date
JP2003282848A JP2003282848A (ja) 2003-10-03
JP2003282848A5 JP2003282848A5 (enExample) 2005-09-02
JP4342142B2 true JP4342142B2 (ja) 2009-10-14

Family

ID=28449108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002081041A Expired - Lifetime JP4342142B2 (ja) 2002-03-22 2002-03-22 半導体受光素子

Country Status (5)

Country Link
US (1) US6828644B2 (enExample)
JP (1) JP4342142B2 (enExample)
KR (1) KR100878543B1 (enExample)
CN (1) CN1238906C (enExample)
TW (1) TW587333B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI244117B (en) * 2003-03-26 2005-11-21 Komatsu Denshi Kinzoku Kk Semiconductor epitaxy wafer
KR20060022709A (ko) * 2003-06-30 2006-03-10 로무 가부시키가이샤 이미지 센서 및 포토 다이오드의 분리 구조의 형성 방법
KR100555526B1 (ko) * 2003-11-12 2006-03-03 삼성전자주식회사 포토 다이오드 및 그 제조방법
JP4841834B2 (ja) * 2004-12-24 2011-12-21 浜松ホトニクス株式会社 ホトダイオードアレイ
US7307327B2 (en) * 2005-08-04 2007-12-11 Micron Technology, Inc. Reduced crosstalk CMOS image sensors
JP2008066446A (ja) * 2006-09-06 2008-03-21 Sony Corp 半導体積層構造および半導体素子
JP2010103221A (ja) * 2008-10-22 2010-05-06 Panasonic Corp 光半導体装置
EP2202795A1 (en) * 2008-12-24 2010-06-30 S.O.I. TEC Silicon Method for fabricating a semiconductor substrate and semiconductor substrate
DE102011009373B4 (de) * 2011-01-25 2017-08-03 Austriamicrosystems Ag Fotodiodenbauelement
DE102011056369A1 (de) * 2011-12-13 2013-06-13 Pmdtechnologies Gmbh Halbleiterbauelement mit trench gate
US9006833B2 (en) * 2013-07-02 2015-04-14 Texas Instruments Incorporated Bipolar transistor having sinker diffusion under a trench
TWI660490B (zh) * 2014-03-13 2019-05-21 日商半導體能源研究所股份有限公司 攝像裝置
KR102380829B1 (ko) * 2014-04-23 2022-03-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 촬상 장치
CN105448945B (zh) * 2015-12-29 2019-07-05 同方威视技术股份有限公司 同面电极光电二极管阵列及其制作方法
US10672934B2 (en) * 2017-10-31 2020-06-02 Taiwan Semiconductor Manufacturing Company Ltd. SPAD image sensor and associated fabricating method
US11296247B2 (en) * 2019-02-11 2022-04-05 Allegro Microsystems, Llc Photodetector with a buried layer
US11217718B2 (en) 2019-02-11 2022-01-04 Allegro Microsystems, Llc Photodetector with a buried layer

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0695571B2 (ja) * 1985-10-12 1994-11-24 新技術事業団 光電変換装置
JPH0389550A (ja) 1989-08-31 1991-04-15 Hamamatsu Photonics Kk バイポーラトランジスタの製造方法
JP2662062B2 (ja) * 1989-12-15 1997-10-08 キヤノン株式会社 光電変換装置
JPH0745912A (ja) 1993-07-30 1995-02-14 Sony Corp 半導体レーザ装置
US6054365A (en) * 1998-07-13 2000-04-25 International Rectifier Corp. Process for filling deep trenches with polysilicon and oxide
JP2000156521A (ja) 1998-11-19 2000-06-06 Mitsubishi Electric Corp 半導体装置及び半導体装置の製造方法

Also Published As

Publication number Publication date
KR20030082372A (ko) 2003-10-22
US6828644B2 (en) 2004-12-07
CN1238906C (zh) 2006-01-25
CN1447445A (zh) 2003-10-08
JP2003282848A (ja) 2003-10-03
TW587333B (en) 2004-05-11
KR100878543B1 (ko) 2009-01-14
US20030197190A1 (en) 2003-10-23
TW200305281A (en) 2003-10-16

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