JP4205202B2 - 磁気マイクロスイッチおよびその製造方法 - Google Patents

磁気マイクロスイッチおよびその製造方法 Download PDF

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Publication number
JP4205202B2
JP4205202B2 JP11079698A JP11079698A JP4205202B2 JP 4205202 B2 JP4205202 B2 JP 4205202B2 JP 11079698 A JP11079698 A JP 11079698A JP 11079698 A JP11079698 A JP 11079698A JP 4205202 B2 JP4205202 B2 JP 4205202B2
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Japan
Prior art keywords
magnetic
strip
conductive strip
magnetic field
length
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Expired - Fee Related
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JP11079698A
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Japanese (ja)
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JPH10321102A (ja
JPH10321102A5 (enExample
Inventor
ゲイサ フランソワ
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アスラブ ソシエテ アノニム
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Publication of JPH10321102A5 publication Critical patent/JPH10321102A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H01H2036/0093—Micromechanical switches actuated by a change of the magnetic field

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
  • Manufacture Of Switches (AREA)
  • Contacts (AREA)
  • Micromachines (AREA)
JP11079698A 1997-04-21 1998-04-21 磁気マイクロスイッチおよびその製造方法 Expired - Fee Related JP4205202B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH00919/97A CH691559A5 (fr) 1997-04-21 1997-04-21 Micro-contacteur magnétique et son procédé de fabrication.
CH19970919/97 1997-04-21

Publications (3)

Publication Number Publication Date
JPH10321102A JPH10321102A (ja) 1998-12-04
JPH10321102A5 JPH10321102A5 (enExample) 2005-08-25
JP4205202B2 true JP4205202B2 (ja) 2009-01-07

Family

ID=4198229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11079698A Expired - Fee Related JP4205202B2 (ja) 1997-04-21 1998-04-21 磁気マイクロスイッチおよびその製造方法

Country Status (6)

Country Link
US (1) US6040748A (enExample)
JP (1) JP4205202B2 (enExample)
KR (1) KR100507950B1 (enExample)
CN (1) CN1119826C (enExample)
CH (1) CH691559A5 (enExample)
TW (1) TW412767B (enExample)

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US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
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US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6767751B2 (en) * 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US7054515B1 (en) 2002-05-30 2006-05-30 Silicon Light Machines Corporation Diffractive light modulator-based dynamic equalizer with integrated spectral monitor
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US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6908201B2 (en) 2002-06-28 2005-06-21 Silicon Light Machines Corporation Micro-support structures
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US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US7057795B2 (en) 2002-08-20 2006-06-06 Silicon Light Machines Corporation Micro-structures with individually addressable ribbon pairs
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
US6928207B1 (en) 2002-12-12 2005-08-09 Silicon Light Machines Corporation Apparatus for selectively blocking WDM channels
US7057819B1 (en) 2002-12-17 2006-06-06 Silicon Light Machines Corporation High contrast tilting ribbon blazed grating
US6987600B1 (en) 2002-12-17 2006-01-17 Silicon Light Machines Corporation Arbitrary phase profile for better equalization in dynamic gain equalizer
US6934070B1 (en) 2002-12-18 2005-08-23 Silicon Light Machines Corporation Chirped optical MEM device
US6927891B1 (en) 2002-12-23 2005-08-09 Silicon Light Machines Corporation Tilt-able grating plane for improved crosstalk in 1×N blaze switches
US7068372B1 (en) 2003-01-28 2006-06-27 Silicon Light Machines Corporation MEMS interferometer-based reconfigurable optical add-and-drop multiplexor
US7286764B1 (en) 2003-02-03 2007-10-23 Silicon Light Machines Corporation Reconfigurable modulator-based optical add-and-drop multiplexer
US6947613B1 (en) 2003-02-11 2005-09-20 Silicon Light Machines Corporation Wavelength selective switch and equalizer
US6922272B1 (en) 2003-02-14 2005-07-26 Silicon Light Machines Corporation Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices
US7027202B1 (en) 2003-02-28 2006-04-11 Silicon Light Machines Corp Silicon substrate as a light modulator sacrificial layer
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
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EP2269202A4 (en) * 2008-03-20 2014-01-22 Ht Microanalytical Inc INTEGRATED REED SWITCH
US8665041B2 (en) * 2008-03-20 2014-03-04 Ht Microanalytical, Inc. Integrated microminiature relay
US8581679B2 (en) * 2010-02-26 2013-11-12 Stmicroelectronics Asia Pacific Pte. Ltd. Switch with increased magnetic sensitivity
KR101712628B1 (ko) * 2010-05-03 2017-03-06 삼성전자 주식회사 가변 콘택을 포함한 반도체 소자
FR2970111B1 (fr) * 2011-01-03 2013-01-11 Commissariat Energie Atomique Procede de fabrication d'un micro-contacteur actionnable par un champ magnetique
FR2970596B1 (fr) 2011-01-19 2013-02-08 Commissariat Energie Atomique Contacteur et interrupteur
US9972459B1 (en) 2013-09-09 2018-05-15 Apple Inc. Tactile switch assembly in an electronic device
US10109432B1 (en) * 2014-06-16 2018-10-23 Apple Inc. Switch assemblies
RU2629002C2 (ru) * 2015-12-28 2017-08-24 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Рязанский государственный радиотехнический университет" Способ увеличения чувствительности магнитоуправляемых коммутаторов
DE102016210485A1 (de) * 2016-06-14 2017-12-14 Siemens Aktiengesellschaft Elektromechanisches Schutzschaltgerät mit einer Überlastauslöseeinrichtung
US10707032B1 (en) 2016-12-02 2020-07-07 Apple Inc. Electronic device having travel-magnifying input/output structure
CN111915997A (zh) * 2020-08-19 2020-11-10 深圳市奥拓电子股份有限公司 一种具有触摸功能的cob显示模组及led显示屏

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US5726480A (en) * 1995-01-27 1998-03-10 The Regents Of The University Of California Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same

Also Published As

Publication number Publication date
CN1119826C (zh) 2003-08-27
JPH10321102A (ja) 1998-12-04
CH691559A5 (fr) 2001-08-15
KR100507950B1 (ko) 2005-11-08
CN1198581A (zh) 1998-11-11
TW412767B (en) 2000-11-21
KR19980081539A (ko) 1998-11-25
US6040748A (en) 2000-03-21

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