TW412767B - Magnetic microswitch and method for the manufacture thereof - Google Patents
Magnetic microswitch and method for the manufacture thereof Download PDFInfo
- Publication number
- TW412767B TW412767B TW087104393A TW87104393A TW412767B TW 412767 B TW412767 B TW 412767B TW 087104393 A TW087104393 A TW 087104393A TW 87104393 A TW87104393 A TW 87104393A TW 412767 B TW412767 B TW 412767B
- Authority
- TW
- Taiwan
- Prior art keywords
- strip
- magnetic field
- strips
- patent application
- scope
- Prior art date
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims description 8
- 238000004519 manufacturing process Methods 0.000 title description 7
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 239000000696 magnetic material Substances 0.000 claims abstract description 6
- 210000003739 neck Anatomy 0.000 claims description 17
- 238000009713 electroplating Methods 0.000 claims description 12
- 229920002120 photoresistant polymer Polymers 0.000 claims description 9
- 230000002079 cooperative effect Effects 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 5
- 238000007747 plating Methods 0.000 claims description 5
- 238000005538 encapsulation Methods 0.000 claims 1
- 238000005452 bending Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 21
- 238000013461 design Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 235000014676 Phragmites communis Nutrition 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 239000003302 ferromagnetic material Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000007430 reference method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
- H01H2036/0093—Micromechanical switches actuated by a change of the magnetic field
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
- Manufacture Of Switches (AREA)
- Contacts (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH00919/97A CH691559A5 (fr) | 1997-04-21 | 1997-04-21 | Micro-contacteur magnétique et son procédé de fabrication. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW412767B true TW412767B (en) | 2000-11-21 |
Family
ID=4198229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW087104393A TW412767B (en) | 1997-04-21 | 1998-03-24 | Magnetic microswitch and method for the manufacture thereof |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6040748A (enExample) |
| JP (1) | JP4205202B2 (enExample) |
| KR (1) | KR100507950B1 (enExample) |
| CN (1) | CN1119826C (enExample) |
| CH (1) | CH691559A5 (enExample) |
| TW (1) | TW412767B (enExample) |
Families Citing this family (62)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US5732872A (en) * | 1994-06-17 | 1998-03-31 | Heartport, Inc. | Surgical stapling instrument |
| US5881943A (en) | 1994-06-17 | 1999-03-16 | Heartport, Inc. | Surgical anastomosis apparatus and method thereof |
| US6303986B1 (en) | 1998-07-29 | 2001-10-16 | Silicon Light Machines | Method of and apparatus for sealing an hermetic lid to a semiconductor die |
| US6872984B1 (en) | 1998-07-29 | 2005-03-29 | Silicon Light Machines Corporation | Method of sealing a hermetic lid to a semiconductor die at an angle |
| US6124650A (en) * | 1999-10-15 | 2000-09-26 | Lucent Technologies Inc. | Non-volatile MEMS micro-relays using magnetic actuators |
| DE10004393C1 (de) * | 2000-02-02 | 2002-02-14 | Infineon Technologies Ag | Mikrorelais |
| US6956878B1 (en) | 2000-02-07 | 2005-10-18 | Silicon Light Machines Corporation | Method and apparatus for reducing laser speckle using polarization averaging |
| JP2004509434A (ja) * | 2000-09-18 | 2004-03-25 | ミーダー・エレクトロニック | リード片を用いない表面実装用リードリレー |
| US7177081B2 (en) | 2001-03-08 | 2007-02-13 | Silicon Light Machines Corporation | High contrast grating light valve type device |
| JP2004535654A (ja) * | 2001-03-12 | 2004-11-25 | エイチアールエル ラボラトリーズ，エルエルシー | 電気機械スイッチのためのトーションバネおよびトーションバネを内蔵したカンチレバー型ｒｆマイクロ電気機械スイッチ |
| US6768403B2 (en) * | 2002-03-12 | 2004-07-27 | Hrl Laboratories, Llc | Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring |
| US6707591B2 (en) | 2001-04-10 | 2004-03-16 | Silicon Light Machines | Angled illumination for a single order light modulator based projection system |
| US20090163980A1 (en) * | 2007-12-21 | 2009-06-25 | Greatbatch Ltd. | Switch for turning off therapy delivery of an active implantable medical device during mri scans |
| US6865346B1 (en) | 2001-06-05 | 2005-03-08 | Silicon Light Machines Corporation | Fiber optic transceiver |
| US6747781B2 (en) | 2001-06-25 | 2004-06-08 | Silicon Light Machines, Inc. | Method, apparatus, and diffuser for reducing laser speckle |
| US6782205B2 (en) | 2001-06-25 | 2004-08-24 | Silicon Light Machines | Method and apparatus for dynamic equalization in wavelength division multiplexing |
| US6829092B2 (en) | 2001-08-15 | 2004-12-07 | Silicon Light Machines, Inc. | Blazed grating light valve |
| US6930364B2 (en) | 2001-09-13 | 2005-08-16 | Silicon Light Machines Corporation | Microelectronic mechanical system and methods |
| US7301334B2 (en) * | 2001-09-17 | 2007-11-27 | Schneider Electric Industries Sas | Micro magnetic proximity sensor system |
| US6956995B1 (en) | 2001-11-09 | 2005-10-18 | Silicon Light Machines Corporation | Optical communication arrangement |
| US6800238B1 (en) | 2002-01-15 | 2004-10-05 | Silicon Light Machines, Inc. | Method for domain patterning in low coercive field ferroelectrics |
| US6728023B1 (en) | 2002-05-28 | 2004-04-27 | Silicon Light Machines | Optical device arrays with optimized image resolution |
| US6767751B2 (en) * | 2002-05-28 | 2004-07-27 | Silicon Light Machines, Inc. | Integrated driver process flow |
| US7054515B1 (en) | 2002-05-30 | 2006-05-30 | Silicon Light Machines Corporation | Diffractive light modulator-based dynamic equalizer with integrated spectral monitor |
| US6822797B1 (en) | 2002-05-31 | 2004-11-23 | Silicon Light Machines, Inc. | Light modulator structure for producing high-contrast operation using zero-order light |
| US6829258B1 (en) | 2002-06-26 | 2004-12-07 | Silicon Light Machines, Inc. | Rapidly tunable external cavity laser |
| US6908201B2 (en) | 2002-06-28 | 2005-06-21 | Silicon Light Machines Corporation | Micro-support structures |
| US6813059B2 (en) | 2002-06-28 | 2004-11-02 | Silicon Light Machines, Inc. | Reduced formation of asperities in contact micro-structures |
| US6714337B1 (en) | 2002-06-28 | 2004-03-30 | Silicon Light Machines | Method and device for modulating a light beam and having an improved gamma response |
| US7057795B2 (en) | 2002-08-20 | 2006-06-06 | Silicon Light Machines Corporation | Micro-structures with individually addressable ribbon pairs |
| US6801354B1 (en) | 2002-08-20 | 2004-10-05 | Silicon Light Machines, Inc. | 2-D diffraction grating for substantially eliminating polarization dependent losses |
| US6712480B1 (en) | 2002-09-27 | 2004-03-30 | Silicon Light Machines | Controlled curvature of stressed micro-structures |
| US6928207B1 (en) | 2002-12-12 | 2005-08-09 | Silicon Light Machines Corporation | Apparatus for selectively blocking WDM channels |
| US7057819B1 (en) | 2002-12-17 | 2006-06-06 | Silicon Light Machines Corporation | High contrast tilting ribbon blazed grating |
| US6987600B1 (en) | 2002-12-17 | 2006-01-17 | Silicon Light Machines Corporation | Arbitrary phase profile for better equalization in dynamic gain equalizer |
| US6934070B1 (en) | 2002-12-18 | 2005-08-23 | Silicon Light Machines Corporation | Chirped optical MEM device |
| US6927891B1 (en) | 2002-12-23 | 2005-08-09 | Silicon Light Machines Corporation | Tilt-able grating plane for improved crosstalk in 1×N blaze switches |
| US7068372B1 (en) | 2003-01-28 | 2006-06-27 | Silicon Light Machines Corporation | MEMS interferometer-based reconfigurable optical add-and-drop multiplexor |
| US7286764B1 (en) | 2003-02-03 | 2007-10-23 | Silicon Light Machines Corporation | Reconfigurable modulator-based optical add-and-drop multiplexer |
| US6947613B1 (en) | 2003-02-11 | 2005-09-20 | Silicon Light Machines Corporation | Wavelength selective switch and equalizer |
| US6922272B1 (en) | 2003-02-14 | 2005-07-26 | Silicon Light Machines Corporation | Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices |
| US7027202B1 (en) | 2003-02-28 | 2006-04-11 | Silicon Light Machines Corp | Silicon substrate as a light modulator sacrificial layer |
| US6806997B1 (en) | 2003-02-28 | 2004-10-19 | Silicon Light Machines, Inc. | Patterned diffractive light modulator ribbon for PDL reduction |
| US6922273B1 (en) | 2003-02-28 | 2005-07-26 | Silicon Light Machines Corporation | PDL mitigation structure for diffractive MEMS and gratings |
| US6829077B1 (en) | 2003-02-28 | 2004-12-07 | Silicon Light Machines, Inc. | Diffractive light modulator with dynamically rotatable diffraction plane |
| US7391973B1 (en) | 2003-02-28 | 2008-06-24 | Silicon Light Machines Corporation | Two-stage gain equalizer |
| US7042611B1 (en) | 2003-03-03 | 2006-05-09 | Silicon Light Machines Corporation | Pre-deflected bias ribbons |
| EP1533270A1 (fr) * | 2003-11-21 | 2005-05-25 | Asulab S.A. | Procédé de contrôle de l'herméticité d'une cavité close d'un composant micrométrique, et composant micrométrique pour sa mise en oeuvre |
| ITVI20040182A1 (it) * | 2004-07-23 | 2004-10-23 | Lacroix Electronique Srl | Termostato con modi di funzionamento modificabili e metodo per modificare tali modi di funzionamento |
| FR2883274B1 (fr) * | 2005-03-15 | 2007-06-22 | Schneider Electric Ind Sas | Microsysteme integrant un circuit magnetique reluctant |
| EP2269202A4 (en) * | 2008-03-20 | 2014-01-22 | Ht Microanalytical Inc | INTEGRATED REED SWITCH |
| US8665041B2 (en) * | 2008-03-20 | 2014-03-04 | Ht Microanalytical, Inc. | Integrated microminiature relay |
| US8581679B2 (en) * | 2010-02-26 | 2013-11-12 | Stmicroelectronics Asia Pacific Pte. Ltd. | Switch with increased magnetic sensitivity |
| KR101712628B1 (ko) * | 2010-05-03 | 2017-03-06 | 삼성전자 주식회사 | 가변 콘택을 포함한 반도체 소자 |
| FR2970111B1 (fr) * | 2011-01-03 | 2013-01-11 | Commissariat Energie Atomique | Procede de fabrication d'un micro-contacteur actionnable par un champ magnetique |
| FR2970596B1 (fr) | 2011-01-19 | 2013-02-08 | Commissariat Energie Atomique | Contacteur et interrupteur |
| US9972459B1 (en) | 2013-09-09 | 2018-05-15 | Apple Inc. | Tactile switch assembly in an electronic device |
| US10109432B1 (en) * | 2014-06-16 | 2018-10-23 | Apple Inc. | Switch assemblies |
| RU2629002C2 (ru) * | 2015-12-28 | 2017-08-24 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Рязанский государственный радиотехнический университет" | Способ увеличения чувствительности магнитоуправляемых коммутаторов |
| DE102016210485A1 (de) * | 2016-06-14 | 2017-12-14 | Siemens Aktiengesellschaft | Elektromechanisches Schutzschaltgerät mit einer Überlastauslöseeinrichtung |
| US10707032B1 (en) | 2016-12-02 | 2020-07-07 | Apple Inc. | Electronic device having travel-magnifying input/output structure |
| CN111915997A (zh) * | 2020-08-19 | 2020-11-10 | 深圳市奥拓电子股份有限公司 | 一种具有触摸功能的cob显示模组及led显示屏 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4357585A (en) * | 1979-12-10 | 1982-11-02 | W. H. Brady Co. | Laminated magnetic switch |
| US4570139A (en) * | 1984-12-14 | 1986-02-11 | Eaton Corporation | Thin-film magnetically operated micromechanical electric switching device |
| DE3809597A1 (de) * | 1988-03-22 | 1989-10-05 | Fraunhofer Ges Forschung | Mikromechanisches stellelement |
| DE69311277T2 (de) * | 1992-12-15 | 1998-01-15 | Asulab Sa | Schutzrohrschalter und Herstellungsverfahren für aufgehängte dreidimensionale metallische Mikrostrukturen |
| US5463233A (en) * | 1993-06-23 | 1995-10-31 | Alliedsignal Inc. | Micromachined thermal switch |
| FR2721435B1 (fr) * | 1994-06-17 | 1996-08-02 | Asulab Sa | Microcontacteur magnétique et son procédé de fabrication. |
| US5629918A (en) * | 1995-01-20 | 1997-05-13 | The Regents Of The University Of California | Electromagnetically actuated micromachined flap |
| US5726480A (en) * | 1995-01-27 | 1998-03-10 | The Regents Of The University Of California | Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same |
-
1997
- 1997-04-21 CH CH00919/97A patent/CH691559A5/fr not_active IP Right Cessation
-
1998
- 1998-03-24 TW TW087104393A patent/TW412767B/zh not_active IP Right Cessation
- 1998-04-10 US US09/058,303 patent/US6040748A/en not_active Expired - Lifetime
- 1998-04-20 CN CN98107465A patent/CN1119826C/zh not_active Expired - Fee Related
- 1998-04-20 KR KR10-1998-0013978A patent/KR100507950B1/ko not_active Expired - Fee Related
- 1998-04-21 JP JP11079698A patent/JP4205202B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP4205202B2 (ja) | 2009-01-07 |
| CN1119826C (zh) | 2003-08-27 |
| JPH10321102A (ja) | 1998-12-04 |
| CH691559A5 (fr) | 2001-08-15 |
| KR100507950B1 (ko) | 2005-11-08 |
| CN1198581A (zh) | 1998-11-11 |
| KR19980081539A (ko) | 1998-11-25 |
| US6040748A (en) | 2000-03-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |