JP4183199B2 - 半導体パッケージ及びその製造方法 - Google Patents
半導体パッケージ及びその製造方法 Download PDFInfo
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- H05K2201/09—Shape and layout
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- H05K2203/0235—Laminating followed by cutting or slicing perpendicular to plane of the laminate; Embedding wires in an object and cutting or slicing the object perpendicular to direction of the wires
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
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Description
この半導体パッケージによれば、導電膜の端面が絶縁コアの平面の周囲にしか現れないので、寄生容量が小さくなり、高周波信号特性が改善される。したがって、高周波信号特性の劣化を抑えつつ、内部配線パターンの面積を大きく取ることができる。
12 多層プリント配線板
14 ICチップ
16,60,66,94 バンプ端子
20 絶縁基板
22 表面配線パターン
23,24,26,28,30 内部配線パターン
32 裏面配線パターン
34 クリアランスホール
36,38 ビア
40 平面
42,62,96 絶縁コア
44,64,68,98 導電膜
45 端面
50,56,58 ビアランド
52 接続パッド
70 バンプ端子成形型
72 凹部
74,76,92 銅膜
78 樹脂
90 絶縁棒
106 位置決め治具
108 貫通孔
Claims (8)
- プリント配線板と、
前記プリント配線板の表面上に実装された集積回路チップと、
前記プリント配線板の裏面上に実装された複数のバンプ端子とを備え、
前記バンプ端子の各々は、
前記プリント配線板の裏面に対向した平面を有する絶縁コアと、
前記絶縁コアの前記平面以外の表面上に形成された導電膜とを含み、
前記プリント配線板は、
絶縁基板と、
前記絶縁基板の裏面上に形成され、前記バンプ端子の前記平面周りに現れる前記導電膜の環状の端面と接合された環状の接続パッドと、
前記絶縁基板内に埋設され、前記絶縁コアの前記平面のサイズよりも小さいクリアランスホールを有する内部配線パターンと、
前記環状の接続パッド上又はその内側に配置され、前記環状の接続パッドと電気的に接続されたビアランドと、
前記ビアランド上に配置され、前記クリアランスホールを貫通するビアとを含む、ことを特徴とする半導体パッケージ。 - 複数のバンプ端子を備えたプリント配線板であって、
前記バンプ端子の各々は、
前記プリント配線板の裏面に対向した平面を有する絶縁コアと、
前記絶縁コアの前記平面以外の表面上に形成された導電膜とを含み、
前記プリント配線板は、
絶縁基板と、
前記絶縁基板の裏面上に形成され、前記バンプ端子の前記平面周りに現れる前記導電膜の環状の端面と接合された環状の接続パッドと、
前記絶縁基板内に埋設され、前記絶縁コアの前記平面のサイズよりも小さいクリアランスホールを有する内部配線パターンと、
前記環状の接続パッド上又はその内側に配置され、前記環状の接続パッドと電気的に接続されたビアランドと、
前記ビアランド上に配置され、前記クリアランスホールを貫通するビアとを含む、ことを特徴とするプリント配線板。 - プリント配線板と、前記プリント配線板の表面上に実装された集積回路チップとを備えた半導体パッケージの製造方法であって、
前記プリント配線板を準備する工程と、
各々が、前記プリント配線板の裏面に対向すべき平面を有する絶縁コアと、前記絶縁コアの前記平面以外の表面上に形成された導電膜とを含む複数のバンプ端子を準備する工程とを備え、
前記プリント配線板は、
絶縁基板と、
前記絶縁基板の裏面上に形成され、前記バンプ端子の前記平面周りに現れる前記導電膜の環状の端面と接合された環状の接続パッドと、
前記絶縁基板内に埋設され、前記絶縁コアの前記平面のサイズよりも小さいクリアランスホールを有する内部配線パターンと、
前記環状の接続パッド上又はその内側に配置され、前記環状の接続パッドと電気的に接続されたビアランドと、
前記ビアランド上に配置され、前記クリアランスホールを貫通するビアとを含み、
前記製造方法はさらに、
前記複数のバンプ端子の前記平面周りに現れる前記導電膜の環状の端面を前記環状の接続パッドに接合する工程とを備えたことを特徴とする半導体パッケージの製造方法。 - プリント配線板と、前記プリント配線板の表面上に実装された集積回路チップとを備えた半導体パッケージの製造方法であって、
前記プリント配線板を準備する工程と、
各々が、前記プリント配線板の裏面に対向すべき平面を有する絶縁コアと、前記絶縁コアの平面以外の表面上に形成された導電膜とを含む複数のバンプ端子を準備する工程と、
前記複数のバンプ端子を前記プリント配線板の裏面に実装する工程とを備え、
前記バンプ端子の準備工程は、
主面に複数の凹部が形成された型を準備する工程と、
前記凹部内側の表面上に導電膜を形成する工程と、
前記導電膜の形成後、前記凹部内に絶縁材料を充填する工程とを含むことを特徴とする半導体パッケージの製造方法。 - 請求項4に記載の半導体パッケージの製造方法であって、
前記バンプ端子の実装工程は、
前記プリント配線板の裏面及び前記絶縁コアの平面と同一平面上に現れる導電膜の端面のうち少なくとも一方にはんだを付着する工程と、
前記はんだの付着後、前記型の主面が前記プリント配線板の裏面に対向するように前記型と前記プリント配線板とを重ね合わせる工程と、
前記型と前記プリント配線板との重ね合わせ後、前記はんだを所定時間加熱する工程と、
前記加熱工程で溶融したはんだが固化した後、前記型を取り除く工程とを含むことを特徴とする半導体パッケージの製造方法。 - プリント配線板と、前記プリント配線板の表面上に実装された集積回路チップとを備えた半導体パッケージの製造方法であって、
前記プリント配線板を準備する工程と、
各々が、前記プリント配線板の裏面に対向すべき平面を有する絶縁コアと、前記絶縁コアの平面以外の表面上に形成された導電膜とを含む複数のバンプ端子を準備する工程と、
前記複数のバンプ端子を前記プリント配線板の裏面に実装する工程とを備え、
前記バンプ端子の準備工程は、
絶縁棒を準備する工程と、
前記絶縁棒の側面上に導電膜を形成する工程と、
前記導電膜の形成後、前記絶縁棒を切断する工程とを含むことを特徴とする半導体パッケージの製造方法。 - 請求項6に記載の半導体パッケージの製造方法であって、
前記バンプ端子の実装工程は、
前記プリント配線板の裏面及び前記絶縁棒の切断面と同一平面上に現れる導電膜の端面のうち少なくとも一方にはんだを付着する工程と、
前記はんだの付着後、前記絶縁棒の切断面が前記プリント配線板の裏面に対向するように前記バンプ端子を前記プリント配線板の裏面上に載置する工程と、
前記バンプ端子の載置後、前記はんだを所定時間加熱する工程とを含むことを特徴とする半導体パッケージの製造方法。 - 請求項7に記載の半導体パッケージの製造方法であってさらに、
複数の貫通孔が形成された治具を準備する工程を含み、
前記バンプ端子の載置工程は、
前記プリント配線板の裏面上に前記治具を載置する工程と、
前記治具の載置後、前記貫通孔内に前記バンプ端子を嵌め込む工程とを含み、
前記製造方法はさらに、
前記加熱工程で溶融したはんだが固化した後、前記治具を取り除く工程を含むことを特徴とする半導体パッケージの製造方法。
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JP2005378948A JP4183199B2 (ja) | 2005-12-28 | 2005-12-28 | 半導体パッケージ及びその製造方法 |
CNB2006101446706A CN100444372C (zh) | 2005-12-28 | 2006-11-14 | 半导体封装及其制造方法 |
US11/567,804 US7484293B2 (en) | 2005-12-28 | 2006-12-07 | Semiconductor package and manufacturing method therefor |
US12/250,420 US20090047755A1 (en) | 2005-12-28 | 2008-10-13 | Semiconductor package and manufacturing method therefor |
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JP2005378948A JP4183199B2 (ja) | 2005-12-28 | 2005-12-28 | 半導体パッケージ及びその製造方法 |
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CN101521842B (zh) * | 2008-02-29 | 2013-02-13 | 唐华西 | 扬声器磁路结构 |
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US20090047755A1 (en) | 2009-02-19 |
US20070145551A1 (en) | 2007-06-28 |
CN1992250A (zh) | 2007-07-04 |
CN100444372C (zh) | 2008-12-17 |
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