JP4160403B2 - 気相反応器用湿式洗浄剤としてのフッ素化ケトンの使用法 - Google Patents
気相反応器用湿式洗浄剤としてのフッ素化ケトンの使用法 Download PDFInfo
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- JP4160403B2 JP4160403B2 JP2002583701A JP2002583701A JP4160403B2 JP 4160403 B2 JP4160403 B2 JP 4160403B2 JP 2002583701 A JP2002583701 A JP 2002583701A JP 2002583701 A JP2002583701 A JP 2002583701A JP 4160403 B2 JP4160403 B2 JP 4160403B2
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- JP
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- Prior art keywords
- reactor
- fluorinated
- cleaning agent
- hexafluoropropylene
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 150000002576 ketones Chemical class 0.000 title claims description 35
- 239000012459 cleaning agent Substances 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 21
- 239000007789 gas Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 125000004432 carbon atom Chemical group C* 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 8
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 6
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 239000010702 perfluoropolyether Substances 0.000 claims description 2
- OHMHBGPWCHTMQE-UHFFFAOYSA-N 2,2-dichloro-1,1,1-trifluoroethane Chemical compound FC(F)(F)C(Cl)Cl OHMHBGPWCHTMQE-UHFFFAOYSA-N 0.000 claims 1
- WTPUKBUYGDXTOF-UHFFFAOYSA-N F[C](Cl)Br Chemical class F[C](Cl)Br WTPUKBUYGDXTOF-UHFFFAOYSA-N 0.000 claims 1
- ZJCFOZHHYJVNNP-UHFFFAOYSA-N F[C]Br Chemical class F[C]Br ZJCFOZHHYJVNNP-UHFFFAOYSA-N 0.000 claims 1
- 150000001491 aromatic compounds Chemical class 0.000 claims 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical class F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 claims 1
- 239000012071 phase Substances 0.000 description 16
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 description 16
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 14
- 150000001875 compounds Chemical class 0.000 description 13
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 12
- IYRWEQXVUNLMAY-UHFFFAOYSA-N carbonyl fluoride Chemical compound FC(F)=O IYRWEQXVUNLMAY-UHFFFAOYSA-N 0.000 description 12
- 239000003599 detergent Substances 0.000 description 12
- 229910052731 fluorine Inorganic materials 0.000 description 11
- 239000011737 fluorine Substances 0.000 description 11
- -1 perfluorocarbons Chemical class 0.000 description 11
- 238000010792 warming Methods 0.000 description 10
- 238000009835 boiling Methods 0.000 description 9
- 229920002313 fluoropolymer Polymers 0.000 description 9
- 239000004811 fluoropolymer Substances 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 8
- 239000012298 atmosphere Substances 0.000 description 8
- 239000000460 chlorine Substances 0.000 description 8
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 8
- 238000004817 gas chromatography Methods 0.000 description 8
- 229930195733 hydrocarbon Natural products 0.000 description 8
- 150000002430 hydrocarbons Chemical class 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 8
- 235000003270 potassium fluoride Nutrition 0.000 description 8
- 239000011698 potassium fluoride Substances 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- PBVZTJDHQVIHFR-UHFFFAOYSA-N 1,1,2,3,3,3-hexafluoroprop-1-ene Chemical compound FC(F)=C(F)C(F)(F)F.FC(F)=C(F)C(F)(F)F PBVZTJDHQVIHFR-UHFFFAOYSA-N 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- JGZVUTYDEVUNMK-UHFFFAOYSA-N 5-carboxy-2',7'-dichlorofluorescein Chemical compound C12=CC(Cl)=C(O)C=C2OC2=CC(O)=C(Cl)C=C2C21OC(=O)C1=CC(C(=O)O)=CC=C21 JGZVUTYDEVUNMK-UHFFFAOYSA-N 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000007654 immersion Methods 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- 239000013638 trimer Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- GRVMOMUDALILLH-UHFFFAOYSA-N 1,1,1,2,4,5,5,5-octafluoro-2,4-bis(trifluoromethyl)pentan-3-one Chemical compound FC(F)(F)C(F)(C(F)(F)F)C(=O)C(F)(C(F)(F)F)C(F)(F)F GRVMOMUDALILLH-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 150000002222 fluorine compounds Chemical class 0.000 description 3
- 125000001153 fluoro group Chemical group F* 0.000 description 3
- 125000005842 heteroatom Chemical group 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- BRWSHOSLZPMKII-UHFFFAOYSA-N 2,3,3,3-tetrafluoro-2-(trifluoromethyl)propanoyl fluoride Chemical compound FC(=O)C(F)(C(F)(F)F)C(F)(F)F BRWSHOSLZPMKII-UHFFFAOYSA-N 0.000 description 2
- RXGUIWHIADMCFC-UHFFFAOYSA-N 2-Methylpropyl 2-methylpropionate Chemical compound CC(C)COC(=O)C(C)C RXGUIWHIADMCFC-UHFFFAOYSA-N 0.000 description 2
- HHBBIOLEJRWIGU-UHFFFAOYSA-N 4-ethoxy-1,1,1,2,2,3,3,4,5,6,6,6-dodecafluoro-5-(trifluoromethyl)hexane Chemical compound CCOC(F)(C(F)(C(F)(F)F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)F HHBBIOLEJRWIGU-UHFFFAOYSA-N 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 235000011089 carbon dioxide Nutrition 0.000 description 2
- ABDBNWQRPYOPDF-UHFFFAOYSA-N carbonofluoridic acid Chemical class OC(F)=O ABDBNWQRPYOPDF-UHFFFAOYSA-N 0.000 description 2
- 150000001733 carboxylic acid esters Chemical class 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000000539 dimer Substances 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000003682 fluorination reaction Methods 0.000 description 2
- 238000004508 fractional distillation Methods 0.000 description 2
- 238000005194 fractionation Methods 0.000 description 2
- 125000005843 halogen group Chemical group 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 239000011630 iodine Substances 0.000 description 2
- 238000004949 mass spectrometry Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000004810 partition chromatography Methods 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 239000012286 potassium permanganate Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 239000011541 reaction mixture Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- VBJIFLOSOQGDRZ-UHFFFAOYSA-N (2-chloro-2,2-difluoroacetyl) 2-chloro-2,2-difluoroacetate Chemical compound FC(F)(Cl)C(=O)OC(=O)C(F)(F)Cl VBJIFLOSOQGDRZ-UHFFFAOYSA-N 0.000 description 1
- GETTZEONDQJALK-UHFFFAOYSA-N (trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=CC=C1 GETTZEONDQJALK-UHFFFAOYSA-N 0.000 description 1
- KSOCRXJMFBYSFA-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4,5,6,6,6-tridecafluoro-5-(1,1,1,2,3,3,4,4,5,5,6,6,6-tridecafluorohexan-2-yloxy)hexane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(C(F)(F)F)OC(F)(C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F KSOCRXJMFBYSFA-UHFFFAOYSA-N 0.000 description 1
- MEMJZBFXKCSMSF-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4-nonafluoro-4-methoxybutane Chemical compound COC(F)(F)C(F)(F)C(F)(F)C(F)(F)F.COC(F)(F)C(F)(F)C(F)(F)C(F)(F)F MEMJZBFXKCSMSF-UHFFFAOYSA-N 0.000 description 1
- SIVXJSMXRSOFRR-UHFFFAOYSA-N 1,1,1,2,4,4,5,5,6,6,6-undecafluoro-2-(trifluoromethyl)hexan-3-one Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(=O)C(F)(C(F)(F)F)C(F)(F)F SIVXJSMXRSOFRR-UHFFFAOYSA-N 0.000 description 1
- RPSRMEXKOXQGKM-UHFFFAOYSA-N 1,1,1,2,4,4,5,5,6,6,7,7,8,8,9,9,9-heptadecafluoro-2-(trifluoromethyl)nonan-3-one Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(=O)C(F)(C(F)(F)F)C(F)(F)F RPSRMEXKOXQGKM-UHFFFAOYSA-N 0.000 description 1
- UDVYMKMTPUSSLP-UHFFFAOYSA-N 1,1,1,2,4,4,5,5-octafluoro-5-(trifluoromethoxy)-2-(trifluoromethyl)pentan-3-one Chemical compound FC(F)(F)OC(F)(F)C(F)(F)C(=O)C(F)(C(F)(F)F)C(F)(F)F UDVYMKMTPUSSLP-UHFFFAOYSA-N 0.000 description 1
- FLXHMXSWIMMEFD-UHFFFAOYSA-N 1,1,1,3,3,4,4,5,5,6,6,7,7,8,8,8-hexadecafluorooctan-2-one Chemical compound FC(F)(F)C(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F FLXHMXSWIMMEFD-UHFFFAOYSA-N 0.000 description 1
- ABQIAHFCJGVSDJ-UHFFFAOYSA-N 1,1,1,3,4,4,4-heptafluoro-3-(trifluoromethyl)butan-2-one Chemical compound FC(F)(F)C(=O)C(F)(C(F)(F)F)C(F)(F)F ABQIAHFCJGVSDJ-UHFFFAOYSA-N 0.000 description 1
- YBTCBNQUROAZJL-UHFFFAOYSA-N 1,1,1-trifluoropentan-3-one Chemical compound CCC(=O)CC(F)(F)F YBTCBNQUROAZJL-UHFFFAOYSA-N 0.000 description 1
- ZSXRVTIIXWUZDE-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,5,5,6,6,7,7,7-pentadecafluoroheptyl 2,2,2-trifluoroacetate Chemical compound FC(F)(F)C(=O)OC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ZSXRVTIIXWUZDE-UHFFFAOYSA-N 0.000 description 1
- WDHGLDKBPYJCLF-UHFFFAOYSA-N 1-chloro-1,1,3,4,4,4-hexafluoro-3-(trifluoromethyl)butan-2-one Chemical compound FC(F)(F)C(F)(C(F)(F)F)C(=O)C(F)(F)Cl WDHGLDKBPYJCLF-UHFFFAOYSA-N 0.000 description 1
- DFUYAWQUODQGFF-UHFFFAOYSA-N 1-ethoxy-1,1,2,2,3,3,4,4,4-nonafluorobutane Chemical compound CCOC(F)(F)C(F)(F)C(F)(F)C(F)(F)F DFUYAWQUODQGFF-UHFFFAOYSA-N 0.000 description 1
- WIHCZQVQWBCKOA-UHFFFAOYSA-N 2,2,3,3,4,4,5,5-octafluorocyclopentan-1-one Chemical compound FC1(F)C(=O)C(F)(F)C(F)(F)C1(F)F WIHCZQVQWBCKOA-UHFFFAOYSA-N 0.000 description 1
- PQMAKJUXOOVROI-UHFFFAOYSA-N 2,2,3,3,5,5,6,6-octafluoro-4-(trifluoromethyl)morpholine Chemical compound FC(F)(F)N1C(F)(F)C(F)(F)OC(F)(F)C1(F)F PQMAKJUXOOVROI-UHFFFAOYSA-N 0.000 description 1
- ZAKJNULOUJTZMO-UHFFFAOYSA-N 2,2,3,3-tetrafluoro-3-(trifluoromethoxy)propanoyl fluoride Chemical compound FC(=O)C(F)(F)C(F)(F)OC(F)(F)F ZAKJNULOUJTZMO-UHFFFAOYSA-N 0.000 description 1
- LKEYHSAKBVEOJQ-UHFFFAOYSA-N 6,6,6-trifluorohexan-3-one Chemical compound CCC(=O)CCC(F)(F)F LKEYHSAKBVEOJQ-UHFFFAOYSA-N 0.000 description 1
- WHQHUSWWAFAPSR-UHFFFAOYSA-N CC(C)CC(C)(C)C(OF)=O Chemical compound CC(C)CC(C)(C)C(OF)=O WHQHUSWWAFAPSR-UHFFFAOYSA-N 0.000 description 1
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 1
- 238000005481 NMR spectroscopy Methods 0.000 description 1
- 241000700159 Rattus Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ZCZSIDMEHXZRLG-UHFFFAOYSA-N acetic acid heptyl ester Natural products CCCCCCCOC(C)=O ZCZSIDMEHXZRLG-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000007059 acute toxicity Effects 0.000 description 1
- 231100000403 acute toxicity Toxicity 0.000 description 1
- 150000001266 acyl halides Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 1
- 239000000010 aprotic solvent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004177 carbon cycle Methods 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- LTVOKYUPTHZZQH-UHFFFAOYSA-N difluoromethane Chemical compound F[C]F LTVOKYUPTHZZQH-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- JPXGPRBLTIYFQG-UHFFFAOYSA-N heptan-4-yl acetate Chemical compound CCCC(CCC)OC(C)=O JPXGPRBLTIYFQG-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 231100000037 inhalation toxicity test Toxicity 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 231100000053 low toxicity Toxicity 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 230000000269 nucleophilic effect Effects 0.000 description 1
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 description 1
- 235000019407 octafluorocyclobutane Nutrition 0.000 description 1
- SJFUDWKNZGXSLV-UHFFFAOYSA-N octan-2-yl acetate Chemical compound CCCCCCC(C)OC(C)=O SJFUDWKNZGXSLV-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 150000004812 organic fluorine compounds Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N pentanoic acid group Chemical group C(CCCC)(=O)O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- FYJQJMIEZVMYSD-UHFFFAOYSA-N perfluoro-2-butyltetrahydrofuran Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C1(F)OC(F)(F)C(F)(F)C1(F)F FYJQJMIEZVMYSD-UHFFFAOYSA-N 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 238000006303 photolysis reaction Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000003380 propellant Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- KFUSEUYYWQURPO-OWOJBTEDSA-N trans-1,2-dichloroethene Chemical group Cl\C=C\Cl KFUSEUYYWQURPO-OWOJBTEDSA-N 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D11/00—Special methods for preparing compositions containing mixtures of detergents
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
- C07C49/04—Saturated compounds containing keto groups bound to acyclic carbon atoms
- C07C49/175—Saturated compounds containing keto groups bound to acyclic carbon atoms containing ether groups, groups, groups, or groups
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C45/00—Preparation of compounds having >C = O groups bound only to carbon or hydrogen atoms; Preparation of chelates of such compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C45/00—Preparation of compounds having >C = O groups bound only to carbon or hydrogen atoms; Preparation of chelates of such compounds
- C07C45/78—Separation; Purification; Stabilisation; Use of additives
- C07C45/85—Separation; Purification; Stabilisation; Use of additives by treatment giving rise to a chemical modification
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
- C07C49/04—Saturated compounds containing keto groups bound to acyclic carbon atoms
- C07C49/16—Saturated compounds containing keto groups bound to acyclic carbon atoms containing halogen
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
- C07C49/04—Saturated compounds containing keto groups bound to acyclic carbon atoms
- C07C49/16—Saturated compounds containing keto groups bound to acyclic carbon atoms containing halogen
- C07C49/167—Saturated compounds containing keto groups bound to acyclic carbon atoms containing halogen containing only fluorine as halogen
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Detergent Compositions (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/841,340 US6394107B1 (en) | 2001-04-24 | 2001-04-24 | Use of fluorinated ketones as wet cleaning agents for vapor reactors and vapor reactor components |
| PCT/US2002/004087 WO2002086191A1 (en) | 2001-04-24 | 2002-02-12 | Use of fluorinated ketones as wet cleaning agents for vapor reactors |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005507954A JP2005507954A (ja) | 2005-03-24 |
| JP2005507954A5 JP2005507954A5 (enExample) | 2005-12-22 |
| JP4160403B2 true JP4160403B2 (ja) | 2008-10-01 |
Family
ID=25284615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002583701A Expired - Fee Related JP4160403B2 (ja) | 2001-04-24 | 2002-02-12 | 気相反応器用湿式洗浄剤としてのフッ素化ケトンの使用法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6394107B1 (enExample) |
| EP (1) | EP1381709A1 (enExample) |
| JP (1) | JP4160403B2 (enExample) |
| KR (1) | KR20030090784A (enExample) |
| CN (1) | CN1505693A (enExample) |
| WO (1) | WO2002086191A1 (enExample) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6540930B2 (en) * | 2001-04-24 | 2003-04-01 | 3M Innovative Properties Company | Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases |
| US6423673B1 (en) * | 2001-09-07 | 2002-07-23 | 3M Innovation Properties Company | Azeotrope-like compositions and their use |
| JP3958080B2 (ja) * | 2002-03-18 | 2007-08-15 | 東京エレクトロン株式会社 | プラズマ処理装置内の被洗浄部材の洗浄方法 |
| US6923278B2 (en) * | 2002-05-06 | 2005-08-02 | Pride Mobility Products Corporation | Adjustable anti-tip wheels for power wheelchair |
| US7250114B2 (en) * | 2003-05-30 | 2007-07-31 | Lam Research Corporation | Methods of finishing quartz glass surfaces and components made by the methods |
| US20050011859A1 (en) * | 2003-07-15 | 2005-01-20 | Bing Ji | Unsaturated oxygenated fluorocarbons for selective aniostropic etch applications |
| US20050161061A1 (en) * | 2003-09-17 | 2005-07-28 | Hong Shih | Methods for cleaning a set of structures comprising yttrium oxide in a plasma processing system |
| US7252780B2 (en) * | 2004-05-26 | 2007-08-07 | E.I. Du Pont De Nemours And Company | 1,1,1,2,2,4,5,5,5-nonafluoro-4-(trifluoromethyl)-3-pentanone refrigerant and heat transfer compositions comprising a fluoroether |
| WO2007013169A1 (ja) * | 2005-07-29 | 2007-02-01 | Du Pont-Mitsui Fluorochemicals Co., Ltd. | 放射性物質の除染用溶剤組成物及び除染材、並びに放射性物質の除染方法 |
| US7385089B2 (en) * | 2005-12-23 | 2008-06-10 | 3M Innovative Properties Company | Fluorochemical ketone compounds and processes for their use |
| EP2530140B1 (en) * | 2006-02-28 | 2017-09-27 | The Chemours Company FC, LLC | Azeotropic compositions comprising fluorinated compounds for cleaning applications |
| US8791254B2 (en) * | 2006-05-19 | 2014-07-29 | 3M Innovative Properties Company | Cyclic hydrofluoroether compounds and processes for their preparation and use |
| JP4884180B2 (ja) * | 2006-11-21 | 2012-02-29 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
| US8193397B2 (en) * | 2006-12-06 | 2012-06-05 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
| DE202009018213U1 (de) | 2009-06-12 | 2011-06-09 | Abb Technology Ag | Dielektrisches Isolationsmedium |
| DE202009018239U1 (de) | 2009-06-12 | 2011-06-01 | Abb Technology Ag | Schalteinrichtung mit dielektrischem Isolationsmedium |
| BRPI0924862A2 (pt) * | 2009-06-12 | 2016-08-23 | Abb Technology Ag | meio de isolação dielétrica |
| DE202009009305U1 (de) | 2009-06-17 | 2009-11-05 | Ormazabal Gmbh | Schalteinrichtung für Mittel-, Hoch- oder Höchstspannung mit einem Füllmedium |
| DE112009005222B4 (de) | 2009-09-11 | 2022-12-29 | Hitachi Energy Switzerland Ag | Transformator mit einem Wärmerohr und Verfahren zur Herstellung eines Transformators |
| EP2490994B1 (en) | 2009-10-19 | 2015-03-04 | ABB Technology AG | Transformer |
| BR112013014849A2 (pt) | 2010-12-14 | 2016-10-18 | Abb Research Ltd | "meio de isolamento dielétrico, uso de um monoéter fluorídrico, uso do meio de isolamento dielétrico e aparelho para a geração, distribuição e uso de energia elétrica". |
| WO2012080246A1 (en) | 2010-12-14 | 2012-06-21 | Abb Technology Ag | Dielectric insulation medium |
| WO2012080269A1 (en) * | 2010-12-16 | 2012-06-21 | Abb Technology Ag | Dielectric insulation medium |
| FR2975820B1 (fr) * | 2011-05-24 | 2013-07-05 | Schneider Electric Ind Sas | Melange de decafluoro-2-methylbutan-3-one et d'un gaz vecteur comme milieu d'isolation electrique et/ou d'extinction des arcs electriques en moyenne tension |
| US8545639B2 (en) * | 2011-10-31 | 2013-10-01 | Lam Research Corporation | Method of cleaning aluminum plasma chamber parts |
| RU2472767C1 (ru) * | 2011-11-25 | 2013-01-20 | Федеральное государственное унитарное предприятие "Российский научный центр "Прикладная химия" | Способ получения перфторэтилизопропилкетона |
| WO2013087700A1 (en) | 2011-12-13 | 2013-06-20 | Abb Technology Ag | Sealed and gas insulated high voltage converter environment for offshore platforms |
| RU2607897C1 (ru) * | 2015-09-10 | 2017-01-11 | Федеральное государственное унитарное предприятие "Российский научный центр "Прикладная химия" | Способ получения перфторэтилизопропилкетона |
| US20170282220A1 (en) * | 2016-04-01 | 2017-10-05 | Tyco Fire & Security Gmbh | Method and System for Liquid Cleaning of Smoke Sensor Heads |
| EP3689980A1 (en) * | 2019-01-31 | 2020-08-05 | 3M Innovative Properties Company | Fluoropolymer compositions |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3185734A (en) * | 1960-10-25 | 1965-05-25 | Du Pont | Novel polyfluoro-substituted ketones and their preparation from polyfluoro acid fluorides |
| NL7711424A (nl) * | 1976-10-23 | 1978-04-25 | Hoechst Ag | Werkwijze voor de bereiding van fluor bevattende ketonen. |
| AU639220B2 (en) * | 1988-12-02 | 1993-07-22 | Exfluor Research Corporation | Direct fluorination process for making perfluorinated organic substances |
| JP2763083B2 (ja) * | 1993-06-01 | 1998-06-11 | 工業技術院長 | フッ素系洗浄溶剤組成物 |
| US5466877A (en) * | 1994-03-15 | 1995-11-14 | Minnesota Mining And Manufacturing Company | Process for converting perfluorinated esters to perfluorinated acyl fluorides and/or ketones |
| JP2869432B2 (ja) * | 1996-10-04 | 1999-03-10 | 工業技術院長 | 溶剤及びそれを用いる物品表面の清浄化方法 |
| JP2952414B2 (ja) * | 1997-09-22 | 1999-09-27 | 工業技術院長 | 溶剤及びそれを用いる物品表面の清浄化方法 |
| US5998671A (en) * | 1998-05-15 | 1999-12-07 | Alliedsignal Inc. | Fluorinated ketones and method for making same |
| KR100568381B1 (ko) * | 1998-05-26 | 2006-04-05 | 닛토 케미칼 인더스트리즈 리미티드 | 반도체 처리장치 부품용 세정액 및 세정방법 |
| JP3141325B2 (ja) * | 1999-01-14 | 2001-03-05 | 工業技術院長 | 溶剤およびそれを用いる物品表面の清浄化方法 |
| JP4322346B2 (ja) * | 1999-02-26 | 2009-08-26 | 東京エレクトロン株式会社 | 成膜装置のクリーニング方法 |
-
2001
- 2001-04-24 US US09/841,340 patent/US6394107B1/en not_active Expired - Fee Related
-
2002
- 2002-02-12 KR KR10-2003-7013839A patent/KR20030090784A/ko not_active Withdrawn
- 2002-02-12 CN CNA028087798A patent/CN1505693A/zh active Pending
- 2002-02-12 JP JP2002583701A patent/JP4160403B2/ja not_active Expired - Fee Related
- 2002-02-12 EP EP02764134A patent/EP1381709A1/en not_active Withdrawn
- 2002-02-12 WO PCT/US2002/004087 patent/WO2002086191A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2002086191A1 (en) | 2002-10-31 |
| EP1381709A1 (en) | 2004-01-21 |
| CN1505693A (zh) | 2004-06-16 |
| KR20030090784A (ko) | 2003-11-28 |
| US6394107B1 (en) | 2002-05-28 |
| JP2005507954A (ja) | 2005-03-24 |
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