JP2005507954A5 - - Google Patents
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- Publication number
- JP2005507954A5 JP2005507954A5 JP2002583701A JP2002583701A JP2005507954A5 JP 2005507954 A5 JP2005507954 A5 JP 2005507954A5 JP 2002583701 A JP2002583701 A JP 2002583701A JP 2002583701 A JP2002583701 A JP 2002583701A JP 2005507954 A5 JP2005507954 A5 JP 2005507954A5
- Authority
- JP
- Japan
- Prior art keywords
- cleaning agent
- cleaning
- carbon
- hydrochlorofluoroether
- hydrobromofluorocarbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012459 cleaning agent Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 2
- OHMHBGPWCHTMQE-UHFFFAOYSA-N 2,2-dichloro-1,1,1-trifluoroethane Chemical compound FC(F)(F)C(Cl)Cl OHMHBGPWCHTMQE-UHFFFAOYSA-N 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- WTPUKBUYGDXTOF-UHFFFAOYSA-N F[C](Cl)Br Chemical class F[C](Cl)Br WTPUKBUYGDXTOF-UHFFFAOYSA-N 0.000 claims 1
- ZJCFOZHHYJVNNP-UHFFFAOYSA-N F[C]Br Chemical class F[C]Br ZJCFOZHHYJVNNP-UHFFFAOYSA-N 0.000 claims 1
- HMHHSXJDJHNSEF-UHFFFAOYSA-N F[C]I Chemical compound F[C]I HMHHSXJDJHNSEF-UHFFFAOYSA-N 0.000 claims 1
- 150000001491 aromatic compounds Chemical class 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 125000004432 carbon atom Chemical group C* 0.000 claims 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical class F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 1
- 150000002576 ketones Chemical class 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000010702 perfluoropolyether Substances 0.000 claims 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/841,340 US6394107B1 (en) | 2001-04-24 | 2001-04-24 | Use of fluorinated ketones as wet cleaning agents for vapor reactors and vapor reactor components |
| PCT/US2002/004087 WO2002086191A1 (en) | 2001-04-24 | 2002-02-12 | Use of fluorinated ketones as wet cleaning agents for vapor reactors |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005507954A JP2005507954A (ja) | 2005-03-24 |
| JP2005507954A5 true JP2005507954A5 (enExample) | 2005-12-22 |
| JP4160403B2 JP4160403B2 (ja) | 2008-10-01 |
Family
ID=25284615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002583701A Expired - Fee Related JP4160403B2 (ja) | 2001-04-24 | 2002-02-12 | 気相反応器用湿式洗浄剤としてのフッ素化ケトンの使用法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6394107B1 (enExample) |
| EP (1) | EP1381709A1 (enExample) |
| JP (1) | JP4160403B2 (enExample) |
| KR (1) | KR20030090784A (enExample) |
| CN (1) | CN1505693A (enExample) |
| WO (1) | WO2002086191A1 (enExample) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6540930B2 (en) * | 2001-04-24 | 2003-04-01 | 3M Innovative Properties Company | Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases |
| US6423673B1 (en) * | 2001-09-07 | 2002-07-23 | 3M Innovation Properties Company | Azeotrope-like compositions and their use |
| JP3958080B2 (ja) * | 2002-03-18 | 2007-08-15 | 東京エレクトロン株式会社 | プラズマ処理装置内の被洗浄部材の洗浄方法 |
| US6923278B2 (en) * | 2002-05-06 | 2005-08-02 | Pride Mobility Products Corporation | Adjustable anti-tip wheels for power wheelchair |
| US7250114B2 (en) * | 2003-05-30 | 2007-07-31 | Lam Research Corporation | Methods of finishing quartz glass surfaces and components made by the methods |
| US20050011859A1 (en) * | 2003-07-15 | 2005-01-20 | Bing Ji | Unsaturated oxygenated fluorocarbons for selective aniostropic etch applications |
| US20050161061A1 (en) * | 2003-09-17 | 2005-07-28 | Hong Shih | Methods for cleaning a set of structures comprising yttrium oxide in a plasma processing system |
| US7252780B2 (en) * | 2004-05-26 | 2007-08-07 | E.I. Du Pont De Nemours And Company | 1,1,1,2,2,4,5,5,5-nonafluoro-4-(trifluoromethyl)-3-pentanone refrigerant and heat transfer compositions comprising a fluoroether |
| US20100108094A1 (en) | 2005-07-29 | 2010-05-06 | Junichi Ishikawa | Solvent Composition for Removing Radioactive Substance and Removing Material, and Method for Removing Radioactive Substance |
| US7385089B2 (en) * | 2005-12-23 | 2008-06-10 | 3M Innovative Properties Company | Fluorochemical ketone compounds and processes for their use |
| KR20080114757A (ko) * | 2006-02-28 | 2008-12-31 | 이 아이 듀폰 디 네모아 앤드 캄파니 | 세정 분야를 위한 플루오르화 화합물을 포함하는 공비 조성물 |
| US8791254B2 (en) * | 2006-05-19 | 2014-07-29 | 3M Innovative Properties Company | Cyclic hydrofluoroether compounds and processes for their preparation and use |
| JP4884180B2 (ja) * | 2006-11-21 | 2012-02-29 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
| US8193397B2 (en) * | 2006-12-06 | 2012-06-05 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
| UA105668C2 (uk) * | 2009-06-12 | 2014-06-10 | Абб Текнолоджи Аг | Діелектричне ізоляційне середовище |
| DE202009018213U1 (de) | 2009-06-12 | 2011-06-09 | Abb Technology Ag | Dielektrisches Isolationsmedium |
| DE202009018239U1 (de) | 2009-06-12 | 2011-06-01 | Abb Technology Ag | Schalteinrichtung mit dielektrischem Isolationsmedium |
| DE202009009305U1 (de) | 2009-06-17 | 2009-11-05 | Ormazabal Gmbh | Schalteinrichtung für Mittel-, Hoch- oder Höchstspannung mit einem Füllmedium |
| WO2011029488A1 (en) | 2009-09-11 | 2011-03-17 | Abb Research Ltd | Transformer comprising a heat pipe |
| BR112012008890A2 (pt) | 2009-10-19 | 2018-05-08 | Abb Technology Ag | transformador |
| AR084275A1 (es) | 2010-12-14 | 2013-05-02 | Abb Technology Ag | Medio aislante dielectrico |
| BR112013014849A2 (pt) | 2010-12-14 | 2016-10-18 | Abb Research Ltd | "meio de isolamento dielétrico, uso de um monoéter fluorídrico, uso do meio de isolamento dielétrico e aparelho para a geração, distribuição e uso de energia elétrica". |
| CA2821158A1 (en) * | 2010-12-16 | 2012-06-21 | Abb Technology Ag | Dielectric insulation medium |
| FR2975820B1 (fr) * | 2011-05-24 | 2013-07-05 | Schneider Electric Ind Sas | Melange de decafluoro-2-methylbutan-3-one et d'un gaz vecteur comme milieu d'isolation electrique et/ou d'extinction des arcs electriques en moyenne tension |
| US8545639B2 (en) * | 2011-10-31 | 2013-10-01 | Lam Research Corporation | Method of cleaning aluminum plasma chamber parts |
| RU2472767C1 (ru) * | 2011-11-25 | 2013-01-20 | Федеральное государственное унитарное предприятие "Российский научный центр "Прикладная химия" | Способ получения перфторэтилизопропилкетона |
| CN103988382B (zh) | 2011-12-13 | 2018-02-16 | Abb 技术有限公司 | 转换器建筑物及运行或提供转换器建筑物的方法 |
| RU2607897C1 (ru) * | 2015-09-10 | 2017-01-11 | Федеральное государственное унитарное предприятие "Российский научный центр "Прикладная химия" | Способ получения перфторэтилизопропилкетона |
| US20170282220A1 (en) * | 2016-04-01 | 2017-10-05 | Tyco Fire & Security Gmbh | Method and System for Liquid Cleaning of Smoke Sensor Heads |
| EP3689980A1 (en) * | 2019-01-31 | 2020-08-05 | 3M Innovative Properties Company | Fluoropolymer compositions |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3185734A (en) * | 1960-10-25 | 1965-05-25 | Du Pont | Novel polyfluoro-substituted ketones and their preparation from polyfluoro acid fluorides |
| NL7711424A (nl) * | 1976-10-23 | 1978-04-25 | Hoechst Ag | Werkwijze voor de bereiding van fluor bevattende ketonen. |
| EP0609200A1 (en) * | 1988-12-02 | 1994-08-10 | Minnesota Mining And Manufacturing Company | Direct fluorination process for making perfluorinated organic substances |
| JP2763083B2 (ja) * | 1993-06-01 | 1998-06-11 | 工業技術院長 | フッ素系洗浄溶剤組成物 |
| US5466877A (en) * | 1994-03-15 | 1995-11-14 | Minnesota Mining And Manufacturing Company | Process for converting perfluorinated esters to perfluorinated acyl fluorides and/or ketones |
| JP2869432B2 (ja) * | 1996-10-04 | 1999-03-10 | 工業技術院長 | 溶剤及びそれを用いる物品表面の清浄化方法 |
| JP2952414B2 (ja) * | 1997-09-22 | 1999-09-27 | 工業技術院長 | 溶剤及びそれを用いる物品表面の清浄化方法 |
| US5998671A (en) * | 1998-05-15 | 1999-12-07 | Alliedsignal Inc. | Fluorinated ketones and method for making same |
| EP1083219B1 (en) * | 1998-05-26 | 2006-08-30 | Tokyo Electron Limited | Cleaning fluid and cleaning method for component of semiconductor-treating apparatus |
| JP3141325B2 (ja) * | 1999-01-14 | 2001-03-05 | 工業技術院長 | 溶剤およびそれを用いる物品表面の清浄化方法 |
| JP4322346B2 (ja) * | 1999-02-26 | 2009-08-26 | 東京エレクトロン株式会社 | 成膜装置のクリーニング方法 |
-
2001
- 2001-04-24 US US09/841,340 patent/US6394107B1/en not_active Expired - Fee Related
-
2002
- 2002-02-12 EP EP02764134A patent/EP1381709A1/en not_active Withdrawn
- 2002-02-12 KR KR10-2003-7013839A patent/KR20030090784A/ko not_active Withdrawn
- 2002-02-12 JP JP2002583701A patent/JP4160403B2/ja not_active Expired - Fee Related
- 2002-02-12 WO PCT/US2002/004087 patent/WO2002086191A1/en not_active Ceased
- 2002-02-12 CN CNA028087798A patent/CN1505693A/zh active Pending
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