WO2002086191A1 - Use of fluorinated ketones as wet cleaning agents for vapor reactors - Google Patents

Use of fluorinated ketones as wet cleaning agents for vapor reactors Download PDF

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Publication number
WO2002086191A1
WO2002086191A1 PCT/US2002/004087 US0204087W WO02086191A1 WO 2002086191 A1 WO2002086191 A1 WO 2002086191A1 US 0204087 W US0204087 W US 0204087W WO 02086191 A1 WO02086191 A1 WO 02086191A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluorinated ketone
fluorinated
cleaning agent
reactor
ketone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2002/004087
Other languages
English (en)
French (fr)
Inventor
Susrut Kesari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Priority to KR10-2003-7013839A priority Critical patent/KR20030090784A/ko
Priority to JP2002583701A priority patent/JP4160403B2/ja
Priority to EP02764134A priority patent/EP1381709A1/en
Publication of WO2002086191A1 publication Critical patent/WO2002086191A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D11/00—Special methods for preparing compositions containing mixtures of detergents
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
    • C07C49/04—Saturated compounds containing keto groups bound to acyclic carbon atoms
    • C07C49/175—Saturated compounds containing keto groups bound to acyclic carbon atoms containing ether groups, groups, groups, or groups
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C45/00—Preparation of compounds having >C = O groups bound only to carbon or hydrogen atoms; Preparation of chelates of such compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C45/00—Preparation of compounds having >C = O groups bound only to carbon or hydrogen atoms; Preparation of chelates of such compounds
    • C07C45/78—Separation; Purification; Stabilisation; Use of additives
    • C07C45/85—Separation; Purification; Stabilisation; Use of additives by treatment giving rise to a chemical modification
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
    • C07C49/04—Saturated compounds containing keto groups bound to acyclic carbon atoms
    • C07C49/16—Saturated compounds containing keto groups bound to acyclic carbon atoms containing halogen
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
    • C07C49/04—Saturated compounds containing keto groups bound to acyclic carbon atoms
    • C07C49/16—Saturated compounds containing keto groups bound to acyclic carbon atoms containing halogen
    • C07C49/167—Saturated compounds containing keto groups bound to acyclic carbon atoms containing halogen containing only fluorine as halogen

Definitions

  • F is the radiative forcing per unit mass of a compound (the change in the flux of radiation through the atmosphere due to the IR absorbance of that compound)
  • C is the atmospheric concentration of a compound
  • ⁇ is the atmospheric lifetime of a compound
  • t is time
  • x is the compound of interest (i.e., Cox is the time 0 or initial concentration of compound x).

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Detergent Compositions (AREA)
  • Chemical Vapour Deposition (AREA)
PCT/US2002/004087 2001-04-24 2002-02-12 Use of fluorinated ketones as wet cleaning agents for vapor reactors Ceased WO2002086191A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR10-2003-7013839A KR20030090784A (ko) 2001-04-24 2002-02-12 플루오르화 케톤의 증기 반응기용 습식 세정제로서의 용도
JP2002583701A JP4160403B2 (ja) 2001-04-24 2002-02-12 気相反応器用湿式洗浄剤としてのフッ素化ケトンの使用法
EP02764134A EP1381709A1 (en) 2001-04-24 2002-02-12 Use of fluorinated ketones as wet cleaning agents for vapor reactors

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/841,340 US6394107B1 (en) 2001-04-24 2001-04-24 Use of fluorinated ketones as wet cleaning agents for vapor reactors and vapor reactor components
US09/841,340 2001-04-24

Publications (1)

Publication Number Publication Date
WO2002086191A1 true WO2002086191A1 (en) 2002-10-31

Family

ID=25284615

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/004087 Ceased WO2002086191A1 (en) 2001-04-24 2002-02-12 Use of fluorinated ketones as wet cleaning agents for vapor reactors

Country Status (6)

Country Link
US (1) US6394107B1 (enExample)
EP (1) EP1381709A1 (enExample)
JP (1) JP4160403B2 (enExample)
KR (1) KR20030090784A (enExample)
CN (1) CN1505693A (enExample)
WO (1) WO2002086191A1 (enExample)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007100886A3 (en) * 2006-02-28 2007-11-01 Du Pont Azeotropic compositions comprising fluorinated compounds for cleaning applications
WO2010142353A1 (en) * 2009-06-12 2010-12-16 Abb Technology Ag Encapsulated switchgear
WO2011048039A2 (en) 2009-10-19 2011-04-28 Abb Technology Ag Transformer
DE202009018239U1 (de) 2009-06-12 2011-06-01 Abb Technology Ag Schalteinrichtung mit dielektrischem Isolationsmedium
DE202009018213U1 (de) 2009-06-12 2011-06-09 Abb Technology Ag Dielektrisches Isolationsmedium
DE112009005222T5 (de) 2009-09-11 2012-08-30 Abb Research Ltd. Transformator mit einem Wärmerohr
US8709303B2 (en) 2010-12-14 2014-04-29 Abb Research Ltd. Dielectric insulation medium
US8822870B2 (en) 2010-12-14 2014-09-02 Abb Technology Ltd. Dielectric insulation medium
US8916059B2 (en) 2009-06-17 2014-12-23 Abb Technology Ag Fluorinated ketones as high-voltage insulating medium
US9172221B2 (en) 2011-12-13 2015-10-27 Abb Technology Ag Converter building
US9257213B2 (en) 2010-12-16 2016-02-09 Abb Technology Ag Dielectric insulation medium

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6540930B2 (en) * 2001-04-24 2003-04-01 3M Innovative Properties Company Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases
US6423673B1 (en) * 2001-09-07 2002-07-23 3M Innovation Properties Company Azeotrope-like compositions and their use
JP3958080B2 (ja) * 2002-03-18 2007-08-15 東京エレクトロン株式会社 プラズマ処理装置内の被洗浄部材の洗浄方法
US6923278B2 (en) * 2002-05-06 2005-08-02 Pride Mobility Products Corporation Adjustable anti-tip wheels for power wheelchair
US7250114B2 (en) * 2003-05-30 2007-07-31 Lam Research Corporation Methods of finishing quartz glass surfaces and components made by the methods
US20050011859A1 (en) * 2003-07-15 2005-01-20 Bing Ji Unsaturated oxygenated fluorocarbons for selective aniostropic etch applications
US20050161061A1 (en) * 2003-09-17 2005-07-28 Hong Shih Methods for cleaning a set of structures comprising yttrium oxide in a plasma processing system
US7252780B2 (en) * 2004-05-26 2007-08-07 E.I. Du Pont De Nemours And Company 1,1,1,2,2,4,5,5,5-nonafluoro-4-(trifluoromethyl)-3-pentanone refrigerant and heat transfer compositions comprising a fluoroether
US20100108094A1 (en) 2005-07-29 2010-05-06 Junichi Ishikawa Solvent Composition for Removing Radioactive Substance and Removing Material, and Method for Removing Radioactive Substance
US7385089B2 (en) * 2005-12-23 2008-06-10 3M Innovative Properties Company Fluorochemical ketone compounds and processes for their use
US8791254B2 (en) * 2006-05-19 2014-07-29 3M Innovative Properties Company Cyclic hydrofluoroether compounds and processes for their preparation and use
JP4884180B2 (ja) * 2006-11-21 2012-02-29 東京エレクトロン株式会社 基板処理装置および基板処理方法
US8193397B2 (en) * 2006-12-06 2012-06-05 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
FR2975820B1 (fr) * 2011-05-24 2013-07-05 Schneider Electric Ind Sas Melange de decafluoro-2-methylbutan-3-one et d'un gaz vecteur comme milieu d'isolation electrique et/ou d'extinction des arcs electriques en moyenne tension
US8545639B2 (en) * 2011-10-31 2013-10-01 Lam Research Corporation Method of cleaning aluminum plasma chamber parts
RU2472767C1 (ru) * 2011-11-25 2013-01-20 Федеральное государственное унитарное предприятие "Российский научный центр "Прикладная химия" Способ получения перфторэтилизопропилкетона
RU2607897C1 (ru) * 2015-09-10 2017-01-11 Федеральное государственное унитарное предприятие "Российский научный центр "Прикладная химия" Способ получения перфторэтилизопропилкетона
US20170282220A1 (en) * 2016-04-01 2017-10-05 Tyco Fire & Security Gmbh Method and System for Liquid Cleaning of Smoke Sensor Heads
EP3689980A1 (en) * 2019-01-31 2020-08-05 3M Innovative Properties Company Fluoropolymer compositions

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06346095A (ja) * 1993-06-01 1994-12-20 Agency Of Ind Science & Technol フッ素系洗浄溶剤組成物
EP1083219A1 (en) * 1998-05-26 2001-03-14 Nittou Chemical Industries Ltd. Cleaning fluid and cleaning method for component of semiconductor-treating apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3185734A (en) * 1960-10-25 1965-05-25 Du Pont Novel polyfluoro-substituted ketones and their preparation from polyfluoro acid fluorides
NL7711424A (nl) * 1976-10-23 1978-04-25 Hoechst Ag Werkwijze voor de bereiding van fluor bevattende ketonen.
EP0609200A1 (en) * 1988-12-02 1994-08-10 Minnesota Mining And Manufacturing Company Direct fluorination process for making perfluorinated organic substances
US5466877A (en) * 1994-03-15 1995-11-14 Minnesota Mining And Manufacturing Company Process for converting perfluorinated esters to perfluorinated acyl fluorides and/or ketones
JP2869432B2 (ja) * 1996-10-04 1999-03-10 工業技術院長 溶剤及びそれを用いる物品表面の清浄化方法
JP2952414B2 (ja) * 1997-09-22 1999-09-27 工業技術院長 溶剤及びそれを用いる物品表面の清浄化方法
US5998671A (en) * 1998-05-15 1999-12-07 Alliedsignal Inc. Fluorinated ketones and method for making same
JP3141325B2 (ja) * 1999-01-14 2001-03-05 工業技術院長 溶剤およびそれを用いる物品表面の清浄化方法
JP4322346B2 (ja) * 1999-02-26 2009-08-26 東京エレクトロン株式会社 成膜装置のクリーニング方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06346095A (ja) * 1993-06-01 1994-12-20 Agency Of Ind Science & Technol フッ素系洗浄溶剤組成物
EP1083219A1 (en) * 1998-05-26 2001-03-14 Nittou Chemical Industries Ltd. Cleaning fluid and cleaning method for component of semiconductor-treating apparatus

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 03 28 April 1995 (1995-04-28) *
SEKIGUCHI A ET AL: "Reaction of copper oxide and beta -diketone for in situ cleaning of metal copper in a copper chemical vapor deposition reactor", JAPANESE JOURNAL OF APPLIED PHYSICS, PART 1 (REGULAR PAPERS, SHORT NOTES & REVIEW PAPERS), NOV. 2000, JAPAN SOC. APPL. PHYS, JAPAN, vol. 39, no. 11, pages 6478 - 6486, XP002205430, ISSN: 0021-4922 *

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007100886A3 (en) * 2006-02-28 2007-11-01 Du Pont Azeotropic compositions comprising fluorinated compounds for cleaning applications
US8680421B2 (en) 2009-06-12 2014-03-25 Abb Technology Ag Encapsulated switchgear
WO2010142346A1 (en) * 2009-06-12 2010-12-16 Abb Technology Ag Dielectric insulation medium
US9928973B2 (en) 2009-06-12 2018-03-27 Abb Technology Ag Dielectric insulation medium
DE202009018239U1 (de) 2009-06-12 2011-06-01 Abb Technology Ag Schalteinrichtung mit dielektrischem Isolationsmedium
DE202009018213U1 (de) 2009-06-12 2011-06-09 Abb Technology Ag Dielektrisches Isolationsmedium
DE112009002045T5 (de) 2009-06-12 2011-07-28 Abb Technology Ag Dielektrisches Isolationsmedium
DE202009018214U1 (de) 2009-06-12 2011-08-03 Abb Technology Ag Gekapselte Schaltanlage
DE112009004905T5 (de) 2009-06-12 2012-06-14 Abb Technology Ag Gekapselte Schaltanlage
WO2010142353A1 (en) * 2009-06-12 2010-12-16 Abb Technology Ag Encapsulated switchgear
US9196431B2 (en) 2009-06-12 2015-11-24 Abb Technology Ag Encapsulated switchgear
EA020226B1 (ru) * 2009-06-12 2014-09-30 Абб Текнолоджи Аг Диэлектрическая изоляционная среда
AP3244A (en) * 2009-06-12 2015-05-31 Abb Technology Ag Dielectric insulation medium
US8916059B2 (en) 2009-06-17 2014-12-23 Abb Technology Ag Fluorinated ketones as high-voltage insulating medium
DE112009005222T5 (de) 2009-09-11 2012-08-30 Abb Research Ltd. Transformator mit einem Wärmerohr
DE112009005222B4 (de) 2009-09-11 2022-12-29 Hitachi Energy Switzerland Ag Transformator mit einem Wärmerohr und Verfahren zur Herstellung eines Transformators
WO2011048039A2 (en) 2009-10-19 2011-04-28 Abb Technology Ag Transformer
US8709303B2 (en) 2010-12-14 2014-04-29 Abb Research Ltd. Dielectric insulation medium
US8822870B2 (en) 2010-12-14 2014-09-02 Abb Technology Ltd. Dielectric insulation medium
US9257213B2 (en) 2010-12-16 2016-02-09 Abb Technology Ag Dielectric insulation medium
US9172221B2 (en) 2011-12-13 2015-10-27 Abb Technology Ag Converter building

Also Published As

Publication number Publication date
KR20030090784A (ko) 2003-11-28
CN1505693A (zh) 2004-06-16
JP2005507954A (ja) 2005-03-24
EP1381709A1 (en) 2004-01-21
US6394107B1 (en) 2002-05-28
JP4160403B2 (ja) 2008-10-01

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