JP4104924B2 - 光学的測定方法およびその装置 - Google Patents

光学的測定方法およびその装置 Download PDF

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Publication number
JP4104924B2
JP4104924B2 JP2002198074A JP2002198074A JP4104924B2 JP 4104924 B2 JP4104924 B2 JP 4104924B2 JP 2002198074 A JP2002198074 A JP 2002198074A JP 2002198074 A JP2002198074 A JP 2002198074A JP 4104924 B2 JP4104924 B2 JP 4104924B2
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JP
Japan
Prior art keywords
light
light receiving
transparent
measurement object
back surface
Prior art date
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Expired - Lifetime
Application number
JP2002198074A
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English (en)
Japanese (ja)
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JP2004037400A (ja
Inventor
淳一 松村
睦 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Engineering Co Ltd
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Toray Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Engineering Co Ltd filed Critical Toray Engineering Co Ltd
Priority to JP2002198074A priority Critical patent/JP4104924B2/ja
Priority to CNB038161745A priority patent/CN100570342C/zh
Priority to PCT/JP2003/008675 priority patent/WO2004005902A1/ja
Priority to KR1020057000344A priority patent/KR100876257B1/ko
Priority to TW092118645A priority patent/TW200409912A/zh
Publication of JP2004037400A publication Critical patent/JP2004037400A/ja
Application granted granted Critical
Publication of JP4104924B2 publication Critical patent/JP4104924B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8908—Strip illuminator, e.g. light tube

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2002198074A 2002-07-08 2002-07-08 光学的測定方法およびその装置 Expired - Lifetime JP4104924B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2002198074A JP4104924B2 (ja) 2002-07-08 2002-07-08 光学的測定方法およびその装置
CNB038161745A CN100570342C (zh) 2002-07-08 2003-07-08 光学测定方法及其装置
PCT/JP2003/008675 WO2004005902A1 (ja) 2002-07-08 2003-07-08 光学的測定方法およびその装置
KR1020057000344A KR100876257B1 (ko) 2002-07-08 2003-07-08 광학적 측정 방법 및 그 장치
TW092118645A TW200409912A (en) 2002-07-08 2003-07-08 Optical measuring method and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002198074A JP4104924B2 (ja) 2002-07-08 2002-07-08 光学的測定方法およびその装置

Publications (2)

Publication Number Publication Date
JP2004037400A JP2004037400A (ja) 2004-02-05
JP4104924B2 true JP4104924B2 (ja) 2008-06-18

Family

ID=30112417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002198074A Expired - Lifetime JP4104924B2 (ja) 2002-07-08 2002-07-08 光学的測定方法およびその装置

Country Status (5)

Country Link
JP (1) JP4104924B2 (enExample)
KR (1) KR100876257B1 (enExample)
CN (1) CN100570342C (enExample)
TW (1) TW200409912A (enExample)
WO (1) WO2004005902A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7200190B2 (en) * 2003-06-30 2007-04-03 Motorola, Inc. Unbiased signal to interference ratio in wireless communications devices and methods therefor
JP4417205B2 (ja) * 2004-08-27 2010-02-17 大日本スクリーン製造株式会社 基板処理装置
JP5082552B2 (ja) * 2007-04-05 2012-11-28 コニカミノルタホールディングス株式会社 光学的測定装置及び光学的測定方法
KR101209857B1 (ko) * 2009-02-20 2012-12-10 삼성코닝정밀소재 주식회사 유리 표면 이물 검사 장치 및 방법
US7929129B2 (en) 2009-05-22 2011-04-19 Corning Incorporated Inspection systems for glass sheets
TWI485392B (zh) * 2010-02-08 2015-05-21 Ygk Corp Foreign body inspection device and inspection method
KR101685703B1 (ko) * 2010-02-25 2016-12-12 가부시끼가이샤 야마나시 기쥬쯔 고오보오 이물질 검사 장치 및 검사 방법
DE102011103003A1 (de) * 2011-05-24 2012-11-29 Lufthansa Technik Ag Verfahren und Vorrichtung zur Rissprüfung eines Flugzeug- oder Gasturbinen-Bauteils
JP2013140061A (ja) * 2012-01-02 2013-07-18 Yamanashi Gijutsu Kobo:Kk 透明平板基板の表裏異物の検出方法及びその方法を用いた異物検査装置
KR20150056713A (ko) 2013-11-15 2015-05-27 삼성전자주식회사 영상표시장치의 비파괴 검사 시스템 및 방법과 이를 위한 비파괴 검사 장치
US10388028B2 (en) 2014-06-17 2019-08-20 Heraeus Quartz North America Llc Apparatus and method for measurement of transparent cylindrical articles
JP7183155B2 (ja) * 2016-11-02 2022-12-05 コーニング インコーポレイテッド 透明基板上の欠陥部検査方法および装置
JP2018128326A (ja) * 2017-02-07 2018-08-16 大塚電子株式会社 光学スペクトル測定装置および光学スペクトル測定方法
CN107764841B (zh) * 2017-11-17 2024-03-01 仝人智能科技(江苏)有限公司 一种检测并区分透明玻璃盖板上下表面缺陷的装置及方法
KR102580487B1 (ko) * 2018-06-18 2023-09-21 주식회사 케이씨텍 패드 모니터링 장치 및 이를 포함하는 패드 모니터링 시스템, 패드 모니터링 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52130381A (en) * 1976-04-26 1977-11-01 Hitachi Ltd Device for detecting faulty part on plate surface
CN1008003B (zh) * 1985-04-01 1990-05-16 欧文斯-伊利诺衣公司 透明物体中折光缺陷的检测系统
JPH06281418A (ja) * 1993-03-24 1994-10-07 Asahi Glass Co Ltd 凹凸を有する板状透明体の光学的厚さ測定方法
JP3480176B2 (ja) * 1996-03-18 2003-12-15 日立電子エンジニアリング株式会社 ガラス基板の表裏欠陥識別方法
JPH1048144A (ja) * 1996-07-31 1998-02-20 Dainippon Printing Co Ltd ガラス基板検査装置
JP2000074849A (ja) * 1998-08-31 2000-03-14 Toshiba Corp 異物検出方法およびその装置
US6396039B1 (en) * 1999-03-11 2002-05-28 Corning Incorporated Focusing filament for autofocus system
JP2001208702A (ja) * 2000-01-31 2001-08-03 Nippon Sheet Glass Co Ltd 欠点検査方法及び欠点検査装置
JP4599507B2 (ja) * 2000-08-23 2010-12-15 旭硝子株式会社 ガラス板の形状測定方法及び形状測定装置

Also Published As

Publication number Publication date
CN1666100A (zh) 2005-09-07
JP2004037400A (ja) 2004-02-05
TW200409912A (en) 2004-06-16
KR20050035243A (ko) 2005-04-15
KR100876257B1 (ko) 2008-12-26
CN100570342C (zh) 2009-12-16
WO2004005902A1 (ja) 2004-01-15
TWI320099B (enExample) 2010-02-01

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