TWI320099B - - Google Patents
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- Publication number
- TWI320099B TWI320099B TW092118645A TW92118645A TWI320099B TW I320099 B TWI320099 B TW I320099B TW 092118645 A TW092118645 A TW 092118645A TW 92118645 A TW92118645 A TW 92118645A TW I320099 B TWI320099 B TW I320099B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- transparent
- optical system
- foreign matter
- scattered light
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims description 61
- 238000003384 imaging method Methods 0.000 claims description 37
- 239000000758 substrate Substances 0.000 claims description 30
- 230000007246 mechanism Effects 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 11
- 238000009826 distribution Methods 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000012634 optical imaging Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 56
- 238000007689 inspection Methods 0.000 description 21
- 239000011521 glass Substances 0.000 description 19
- 230000008859 change Effects 0.000 description 6
- 238000004441 surface measurement Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000012798 spherical particle Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000002372 labelling Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
- G01N2021/8908—Strip illuminator, e.g. light tube
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002198074A JP4104924B2 (ja) | 2002-07-08 | 2002-07-08 | 光学的測定方法およびその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200409912A TW200409912A (en) | 2004-06-16 |
| TWI320099B true TWI320099B (enExample) | 2010-02-01 |
Family
ID=30112417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092118645A TW200409912A (en) | 2002-07-08 | 2003-07-08 | Optical measuring method and device therefor |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4104924B2 (enExample) |
| KR (1) | KR100876257B1 (enExample) |
| CN (1) | CN100570342C (enExample) |
| TW (1) | TW200409912A (enExample) |
| WO (1) | WO2004005902A1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7200190B2 (en) * | 2003-06-30 | 2007-04-03 | Motorola, Inc. | Unbiased signal to interference ratio in wireless communications devices and methods therefor |
| JP4417205B2 (ja) * | 2004-08-27 | 2010-02-17 | 大日本スクリーン製造株式会社 | 基板処理装置 |
| JP5082552B2 (ja) * | 2007-04-05 | 2012-11-28 | コニカミノルタホールディングス株式会社 | 光学的測定装置及び光学的測定方法 |
| KR101209857B1 (ko) * | 2009-02-20 | 2012-12-10 | 삼성코닝정밀소재 주식회사 | 유리 표면 이물 검사 장치 및 방법 |
| US7929129B2 (en) | 2009-05-22 | 2011-04-19 | Corning Incorporated | Inspection systems for glass sheets |
| TWI485392B (zh) * | 2010-02-08 | 2015-05-21 | Ygk Corp | Foreign body inspection device and inspection method |
| KR101685703B1 (ko) * | 2010-02-25 | 2016-12-12 | 가부시끼가이샤 야마나시 기쥬쯔 고오보오 | 이물질 검사 장치 및 검사 방법 |
| DE102011103003A1 (de) * | 2011-05-24 | 2012-11-29 | Lufthansa Technik Ag | Verfahren und Vorrichtung zur Rissprüfung eines Flugzeug- oder Gasturbinen-Bauteils |
| JP2013140061A (ja) * | 2012-01-02 | 2013-07-18 | Yamanashi Gijutsu Kobo:Kk | 透明平板基板の表裏異物の検出方法及びその方法を用いた異物検査装置 |
| KR20150056713A (ko) | 2013-11-15 | 2015-05-27 | 삼성전자주식회사 | 영상표시장치의 비파괴 검사 시스템 및 방법과 이를 위한 비파괴 검사 장치 |
| US10388028B2 (en) | 2014-06-17 | 2019-08-20 | Heraeus Quartz North America Llc | Apparatus and method for measurement of transparent cylindrical articles |
| JP7183155B2 (ja) * | 2016-11-02 | 2022-12-05 | コーニング インコーポレイテッド | 透明基板上の欠陥部検査方法および装置 |
| JP2018128326A (ja) * | 2017-02-07 | 2018-08-16 | 大塚電子株式会社 | 光学スペクトル測定装置および光学スペクトル測定方法 |
| CN107764841B (zh) * | 2017-11-17 | 2024-03-01 | 仝人智能科技(江苏)有限公司 | 一种检测并区分透明玻璃盖板上下表面缺陷的装置及方法 |
| KR102580487B1 (ko) * | 2018-06-18 | 2023-09-21 | 주식회사 케이씨텍 | 패드 모니터링 장치 및 이를 포함하는 패드 모니터링 시스템, 패드 모니터링 방법 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52130381A (en) * | 1976-04-26 | 1977-11-01 | Hitachi Ltd | Device for detecting faulty part on plate surface |
| CN1008003B (zh) * | 1985-04-01 | 1990-05-16 | 欧文斯-伊利诺衣公司 | 透明物体中折光缺陷的检测系统 |
| JPH06281418A (ja) * | 1993-03-24 | 1994-10-07 | Asahi Glass Co Ltd | 凹凸を有する板状透明体の光学的厚さ測定方法 |
| JP3480176B2 (ja) * | 1996-03-18 | 2003-12-15 | 日立電子エンジニアリング株式会社 | ガラス基板の表裏欠陥識別方法 |
| JPH1048144A (ja) * | 1996-07-31 | 1998-02-20 | Dainippon Printing Co Ltd | ガラス基板検査装置 |
| JP2000074849A (ja) * | 1998-08-31 | 2000-03-14 | Toshiba Corp | 異物検出方法およびその装置 |
| US6396039B1 (en) * | 1999-03-11 | 2002-05-28 | Corning Incorporated | Focusing filament for autofocus system |
| JP2001208702A (ja) * | 2000-01-31 | 2001-08-03 | Nippon Sheet Glass Co Ltd | 欠点検査方法及び欠点検査装置 |
| JP4599507B2 (ja) * | 2000-08-23 | 2010-12-15 | 旭硝子株式会社 | ガラス板の形状測定方法及び形状測定装置 |
-
2002
- 2002-07-08 JP JP2002198074A patent/JP4104924B2/ja not_active Expired - Lifetime
-
2003
- 2003-07-08 WO PCT/JP2003/008675 patent/WO2004005902A1/ja not_active Ceased
- 2003-07-08 CN CNB038161745A patent/CN100570342C/zh not_active Expired - Lifetime
- 2003-07-08 TW TW092118645A patent/TW200409912A/zh not_active IP Right Cessation
- 2003-07-08 KR KR1020057000344A patent/KR100876257B1/ko not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CN1666100A (zh) | 2005-09-07 |
| JP2004037400A (ja) | 2004-02-05 |
| TW200409912A (en) | 2004-06-16 |
| JP4104924B2 (ja) | 2008-06-18 |
| KR20050035243A (ko) | 2005-04-15 |
| KR100876257B1 (ko) | 2008-12-26 |
| CN100570342C (zh) | 2009-12-16 |
| WO2004005902A1 (ja) | 2004-01-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK4A | Expiration of patent term of an invention patent |