JP4044146B2 - マイクロリソグラフィ用投影露光装置のｒｅｍａ対物レンズ - Google Patents

マイクロリソグラフィ用投影露光装置のｒｅｍａ対物レンズ Download PDF

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Publication number
JP4044146B2
JP4044146B2 JP52829398A JP52829398A JP4044146B2 JP 4044146 B2 JP4044146 B2 JP 4044146B2 JP 52829398 A JP52829398 A JP 52829398A JP 52829398 A JP52829398 A JP 52829398A JP 4044146 B2 JP4044146 B2 JP 4044146B2
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Japan
Prior art keywords
lens
objective
rema
rema objective
plane
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JP52829398A
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Japanese (ja)
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JP2000505916A5 (enExample
JP2000505916A (ja
Inventor
シュルツ，イエルグ
ヴァングラー，ヨハンス
シュスター，カール・ハインツ
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カール・ツアイス・エスエムテイ・アーゲー
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70066—Size and form of the illuminated area in the mask plane, e.g. reticle masking blades or blinds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
    • G02B13/143—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation for use with ultraviolet radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Lenses (AREA)
JP52829398A 1996-12-21 1997-12-03 マイクロリソグラフィ用投影露光装置のｒｅｍａ対物レンズ Expired - Fee Related JP4044146B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19653983.8 1996-12-21
DE19653983A DE19653983A1 (de) 1996-12-21 1996-12-21 REMA-Objektiv für Mikrolithographie-Projektionsbelichtungsanlagen
PCT/EP1997/006760 WO1998028644A1 (de) 1996-12-21 1997-12-03 Rema-objektiv für mikrolithographie-projektionsbelichtungsanlagen

Publications (3)

Publication Number Publication Date
JP2000505916A JP2000505916A (ja) 2000-05-16
JP2000505916A5 JP2000505916A5 (enExample) 2005-08-11
JP4044146B2 true JP4044146B2 (ja) 2008-02-06

Family

ID=7815984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52829398A Expired - Fee Related JP4044146B2 (ja) 1996-12-21 1997-12-03 マイクロリソグラフィ用投影露光装置のｒｅｍａ対物レンズ

Country Status (7)

Country Link
US (1) US6366410B1 (enExample)
EP (1) EP0888570A1 (enExample)
JP (1) JP4044146B2 (enExample)
KR (1) KR100524662B1 (enExample)
DE (1) DE19653983A1 (enExample)
TW (1) TW388798B (enExample)
WO (1) WO1998028644A1 (enExample)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7130129B2 (en) 1996-12-21 2006-10-31 Carl Zeiss Smt Ag Reticle-masking objective with aspherical lenses
US6680803B2 (en) * 1996-12-21 2004-01-20 Carl-Zeiss Smt Ag Partial objective in an illuminating systems
DE19829612A1 (de) * 1998-07-02 2000-01-05 Zeiss Carl Fa Beleuchtungssystem der Mikrolithographie mit Depolarisator
DE19942281A1 (de) 1999-05-14 2000-11-16 Zeiss Carl Fa Projektionsobjektiv
DE19855157A1 (de) * 1998-11-30 2000-05-31 Zeiss Carl Fa Projektionsobjektiv
WO2000033138A1 (de) * 1998-11-30 2000-06-08 Carl Zeiss Hochaperturiges projektionsobjektiv mit minimalem blendenfehler
DE19855108A1 (de) * 1998-11-30 2000-05-31 Zeiss Carl Fa Mikrolithographisches Reduktionsobjektiv, Projektionsbelichtungsanlage und -Verfahren
US6867922B1 (en) * 1999-06-14 2005-03-15 Canon Kabushiki Kaisha Projection optical system and projection exposure apparatus using the same
DE50000139D1 (de) * 2000-01-18 2002-05-16 Isco Optic Gmbh Projektionsobjektiv
DE10016176A1 (de) * 2000-03-31 2001-10-04 Zeiss Carl Mikrolithographisches Beleuchtungssystem und Mikrolithographische Projektionsbelichtungsanlage damit
JP2002055277A (ja) * 2000-08-11 2002-02-20 Nikon Corp リレー結像光学系、および該光学系を備えた照明光学装置並びに露光装置
TWI241458B (en) * 2001-02-23 2005-10-11 Zeiss Carl Smt Ag Illumination system with reduced energy loading
DE10113612A1 (de) * 2001-02-23 2002-09-05 Zeiss Carl Teilobjektiv in einem Beleuchtungssystem
US6683728B2 (en) 2001-03-20 2004-01-27 Carl-Zeiss-Stiftung Illumination system with reduced energy loading
DE10138847A1 (de) * 2001-08-15 2003-02-27 Zeiss Carl Blende für eine Integratoreinheit
US7289277B2 (en) * 2002-07-09 2007-10-30 Asml Holding N.V. Relay lens used in an illumination system of a lithography system
DE10329793A1 (de) * 2003-07-01 2005-01-27 Carl Zeiss Smt Ag Projektionsobjektiv für eine mikrolithographische Projektionsbelichtungsanlage
WO2005033800A1 (de) 2003-09-09 2005-04-14 Carl Zeiss Smt Ag Lithographie-objektiv und projektionsbelichtungsanlage mit mindestens einem solchen lithographie-objektiv
WO2006029796A2 (en) * 2004-09-13 2006-03-23 Carl Zeiss Smt Ag Microlithographic projection exposure apparatus
US20070285644A1 (en) * 2004-09-13 2007-12-13 Carl Zeiss Smt Ag Microlithographic Projection Exposure Apparatus
EP1875292A2 (en) * 2005-04-26 2008-01-09 Carl Zeiss SMT AG Illumination system for a microlithgraphic exposure apparatus
KR101235492B1 (ko) * 2006-07-03 2013-02-20 칼 짜이스 에스엠테 게엠베하 리소그래피 투사 대물렌즈 교정/수리 방법
EP1927890A1 (en) 2006-11-30 2008-06-04 Carl Zeiss SMT AG Method of manufacturing a projection objective and projection objective manufactured by that method
JP5559543B2 (ja) * 2006-11-30 2014-07-23 カール・ツァイス・エスエムティー・ゲーエムベーハー 投影対物器械を製造する方法及びこの方法によって製造される投影対物器械
WO2008064859A2 (en) * 2006-12-01 2008-06-05 Carl Zeiss Smt Ag Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
DE102007009867A1 (de) * 2007-02-28 2008-09-11 Carl Zeiss Smt Ag Abbildungsvorrichtung mit auswechselbaren Blenden sowie Verfahren hierzu
DE102008000790A1 (de) * 2007-03-20 2008-09-25 Carl Zeiss Smt Ag Verfahren zum Verbessern von Abbildungseigenschaften eines optischen Systems sowie derartiges optisches System
DE102013202757B4 (de) * 2013-02-20 2014-11-20 Carl Zeiss Smt Gmbh Lithographiebeleuchtungssysteme mit hohem Lichtleitwert und Faltspiegel
KR101704580B1 (ko) * 2015-08-31 2017-02-08 포항공과대학교 산학협력단 집광렌즈 및 이를 이용한 리소그래피 장치
DE102023200548A1 (de) 2023-01-24 2024-07-25 Carl Zeiss Smt Gmbh Chromatisch korrigierte abbildende Beleuchtungsoptik zum Einsatz in einer Projektionsbelichtungsanlage für die Lithografie

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474463A (en) * 1982-08-30 1984-10-02 Tre Semiconductor Equipment Corporation Mixer coupling lens subassembly for photolithographic system
JPS62266513A (ja) 1986-05-14 1987-11-19 Canon Inc 投影露光光学系
JPH01183818A (ja) * 1988-01-19 1989-07-21 Canon Inc 測光範囲可変の照明装置
JP3278896B2 (ja) 1992-03-31 2002-04-30 キヤノン株式会社 照明装置及びそれを用いた投影露光装置
DE4417489A1 (de) * 1994-05-19 1995-11-23 Zeiss Carl Fa Höchstaperturiges katadioptrisches Reduktionsobjektiv für die Miktrolithographie
DE19548805A1 (de) * 1995-12-27 1997-07-03 Zeiss Carl Fa REMA-Objektiv für Mikrolithographie-Projektionsbelichtungsanlagen

Also Published As

Publication number Publication date
EP0888570A1 (de) 1999-01-07
JP2000505916A (ja) 2000-05-16
DE19653983A1 (de) 1998-06-25
WO1998028644A1 (de) 1998-07-02
TW388798B (en) 2000-05-01
KR100524662B1 (ko) 2006-01-12
KR19990087107A (ko) 1999-12-15
US6366410B1 (en) 2002-04-02

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