KR100524662B1 - 마이크로리소그래피투영노광장치용대물렌즈 - Google Patents

마이크로리소그래피투영노광장치용대물렌즈 Download PDF

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Publication number
KR100524662B1
KR100524662B1 KR1019980706495A KR19980706495A KR100524662B1 KR 100524662 B1 KR100524662 B1 KR 100524662B1 KR 1019980706495 A KR1019980706495 A KR 1019980706495A KR 19980706495 A KR19980706495 A KR 19980706495A KR 100524662 B1 KR100524662 B1 KR 100524662B1
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KR
South Korea
Prior art keywords
rema
objective
objective lens
plane
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019980706495A
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English (en)
Korean (ko)
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KR19990087107A (ko
Inventor
외르크 슐츠
요하네스 반클러
칼－하인츠 슈스터
Original Assignee
칼 짜이스 에스엠테 아게
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Publication of KR19990087107A publication Critical patent/KR19990087107A/ko
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Publication of KR100524662B1 publication Critical patent/KR100524662B1/ko
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70066—Size and form of the illuminated area in the mask plane, e.g. reticle masking blades or blinds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
    • G02B13/143—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation for use with ultraviolet radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Lenses (AREA)
KR1019980706495A 1996-12-21 1997-12-03 마이크로리소그래피투영노광장치용대물렌즈 Expired - Fee Related KR100524662B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19653983.8 1996-12-21
DE19653983A DE19653983A1 (de) 1996-12-21 1996-12-21 REMA-Objektiv für Mikrolithographie-Projektionsbelichtungsanlagen

Publications (2)

Publication Number Publication Date
KR19990087107A KR19990087107A (ko) 1999-12-15
KR100524662B1 true KR100524662B1 (ko) 2006-01-12

Family

ID=7815984

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980706495A Expired - Fee Related KR100524662B1 (ko) 1996-12-21 1997-12-03 마이크로리소그래피투영노광장치용대물렌즈

Country Status (7)

Country Link
US (1) US6366410B1 (enExample)
EP (1) EP0888570A1 (enExample)
JP (1) JP4044146B2 (enExample)
KR (1) KR100524662B1 (enExample)
DE (1) DE19653983A1 (enExample)
TW (1) TW388798B (enExample)
WO (1) WO1998028644A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101408483B1 (ko) * 2006-11-30 2014-06-17 칼 짜이스 에스엠티 게엠베하 투영 대물렌즈를 제조하는 방법 및 상기 방법으로 제조된 투영 대물렌즈
US9360775B2 (en) 2006-11-30 2016-06-07 Carl Zeiss Smt Gmbh Method of manufacturing a projection objective and projection objective

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7130129B2 (en) 1996-12-21 2006-10-31 Carl Zeiss Smt Ag Reticle-masking objective with aspherical lenses
US6680803B2 (en) * 1996-12-21 2004-01-20 Carl-Zeiss Smt Ag Partial objective in an illuminating systems
DE19829612A1 (de) * 1998-07-02 2000-01-05 Zeiss Carl Fa Beleuchtungssystem der Mikrolithographie mit Depolarisator
WO2000033138A1 (de) * 1998-11-30 2000-06-08 Carl Zeiss Hochaperturiges projektionsobjektiv mit minimalem blendenfehler
DE19942281A1 (de) 1999-05-14 2000-11-16 Zeiss Carl Fa Projektionsobjektiv
DE19855108A1 (de) * 1998-11-30 2000-05-31 Zeiss Carl Fa Mikrolithographisches Reduktionsobjektiv, Projektionsbelichtungsanlage und -Verfahren
DE19855157A1 (de) * 1998-11-30 2000-05-31 Zeiss Carl Fa Projektionsobjektiv
US6867922B1 (en) 1999-06-14 2005-03-15 Canon Kabushiki Kaisha Projection optical system and projection exposure apparatus using the same
EP1134606B1 (de) * 2000-01-18 2002-04-10 Isco-Optic Gmbh Projektionsobjektiv
DE10016176A1 (de) * 2000-03-31 2001-10-04 Zeiss Carl Mikrolithographisches Beleuchtungssystem und Mikrolithographische Projektionsbelichtungsanlage damit
JP2002055277A (ja) * 2000-08-11 2002-02-20 Nikon Corp リレー結像光学系、および該光学系を備えた照明光学装置並びに露光装置
DE10113612A1 (de) * 2001-02-23 2002-09-05 Zeiss Carl Teilobjektiv in einem Beleuchtungssystem
TWI241458B (en) * 2001-02-23 2005-10-11 Zeiss Carl Smt Ag Illumination system with reduced energy loading
US6683728B2 (en) 2001-03-20 2004-01-27 Carl-Zeiss-Stiftung Illumination system with reduced energy loading
DE10138847A1 (de) * 2001-08-15 2003-02-27 Zeiss Carl Blende für eine Integratoreinheit
US7289277B2 (en) * 2002-07-09 2007-10-30 Asml Holding N.V. Relay lens used in an illumination system of a lithography system
DE10329793A1 (de) * 2003-07-01 2005-01-27 Carl Zeiss Smt Ag Projektionsobjektiv für eine mikrolithographische Projektionsbelichtungsanlage
US7551361B2 (en) 2003-09-09 2009-06-23 Carl Zeiss Smt Ag Lithography lens system and projection exposure system provided with at least one lithography lens system of this type
US20070285644A1 (en) * 2004-09-13 2007-12-13 Carl Zeiss Smt Ag Microlithographic Projection Exposure Apparatus
WO2006029796A2 (en) * 2004-09-13 2006-03-23 Carl Zeiss Smt Ag Microlithographic projection exposure apparatus
JP5030944B2 (ja) 2005-04-26 2012-09-19 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ露光装置のための照明システム
CN101479667B (zh) * 2006-07-03 2011-12-07 卡尔蔡司Smt有限责任公司 修正/修复光刻投影物镜的方法
WO2008064859A2 (en) * 2006-12-01 2008-06-05 Carl Zeiss Smt Ag Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
DE102007009867A1 (de) * 2007-02-28 2008-09-11 Carl Zeiss Smt Ag Abbildungsvorrichtung mit auswechselbaren Blenden sowie Verfahren hierzu
DE102008000790A1 (de) * 2007-03-20 2008-09-25 Carl Zeiss Smt Ag Verfahren zum Verbessern von Abbildungseigenschaften eines optischen Systems sowie derartiges optisches System
DE102013202757B4 (de) * 2013-02-20 2014-11-20 Carl Zeiss Smt Gmbh Lithographiebeleuchtungssysteme mit hohem Lichtleitwert und Faltspiegel
KR101704580B1 (ko) * 2015-08-31 2017-02-08 포항공과대학교 산학협력단 집광렌즈 및 이를 이용한 리소그래피 장치
DE102023200548A1 (de) 2023-01-24 2024-07-25 Carl Zeiss Smt Gmbh Chromatisch korrigierte abbildende Beleuchtungsoptik zum Einsatz in einer Projektionsbelichtungsanlage für die Lithografie

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474463A (en) * 1982-08-30 1984-10-02 Tre Semiconductor Equipment Corporation Mixer coupling lens subassembly for photolithographic system
JPS62266513A (ja) * 1986-05-14 1987-11-19 Canon Inc 投影露光光学系
JPH01183818A (ja) * 1988-01-19 1989-07-21 Canon Inc 測光範囲可変の照明装置
JP3278896B2 (ja) 1992-03-31 2002-04-30 キヤノン株式会社 照明装置及びそれを用いた投影露光装置
DE4417489A1 (de) * 1994-05-19 1995-11-23 Zeiss Carl Fa Höchstaperturiges katadioptrisches Reduktionsobjektiv für die Miktrolithographie
DE19548805A1 (de) * 1995-12-27 1997-07-03 Zeiss Carl Fa REMA-Objektiv für Mikrolithographie-Projektionsbelichtungsanlagen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101408483B1 (ko) * 2006-11-30 2014-06-17 칼 짜이스 에스엠티 게엠베하 투영 대물렌즈를 제조하는 방법 및 상기 방법으로 제조된 투영 대물렌즈
US9360775B2 (en) 2006-11-30 2016-06-07 Carl Zeiss Smt Gmbh Method of manufacturing a projection objective and projection objective

Also Published As

Publication number Publication date
DE19653983A1 (de) 1998-06-25
TW388798B (en) 2000-05-01
JP2000505916A (ja) 2000-05-16
EP0888570A1 (de) 1999-01-07
KR19990087107A (ko) 1999-12-15
US6366410B1 (en) 2002-04-02
WO1998028644A1 (de) 1998-07-02
JP4044146B2 (ja) 2008-02-06

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