JP4011617B2 - キャパシタンスに基づくチューニング可能な超小型機械共振器 - Google Patents

キャパシタンスに基づくチューニング可能な超小型機械共振器 Download PDF

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Publication number
JP4011617B2
JP4011617B2 JP50388997A JP50388997A JP4011617B2 JP 4011617 B2 JP4011617 B2 JP 4011617B2 JP 50388997 A JP50388997 A JP 50388997A JP 50388997 A JP50388997 A JP 50388997A JP 4011617 B2 JP4011617 B2 JP 4011617B2
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Prior art keywords
electrodes
actuator
resonator
finger
substrate
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Expired - Lifetime
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JP50388997A
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English (en)
Japanese (ja)
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JPH11508418A5 (enExample
JPH11508418A (ja
Inventor
アダムス，スコット・ジー
バーチュ，フレッド・エム
ショー，ケビン・エイ
マクドナルド，ノエル・シー
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Cornell Research Foundation Inc
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Cornell Research Foundation Inc
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02417—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor involving adjustment of the transducing gap
    • H03H9/02425—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor involving adjustment of the transducing gap by electrostatically pulling the beam
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02417—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor involving adjustment of the transducing gap
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measuring Fluid Pressure (AREA)
JP50388997A 1995-06-23 1996-06-20 キャパシタンスに基づくチューニング可能な超小型機械共振器 Expired - Lifetime JP4011617B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US494,024 1995-06-23
US08/494,024 US5640133A (en) 1995-06-23 1995-06-23 Capacitance based tunable micromechanical resonators
PCT/US1996/010479 WO1997001221A1 (en) 1995-06-23 1996-06-20 Capacitance based tunable micromechanical resonators

Publications (3)

Publication Number Publication Date
JPH11508418A JPH11508418A (ja) 1999-07-21
JPH11508418A5 JPH11508418A5 (enExample) 2004-08-05
JP4011617B2 true JP4011617B2 (ja) 2007-11-21

Family

ID=23962701

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Application Number Title Priority Date Filing Date
JP50388997A Expired - Lifetime JP4011617B2 (ja) 1995-06-23 1996-06-20 キャパシタンスに基づくチューニング可能な超小型機械共振器

Country Status (10)

Country Link
US (1) US5640133A (enExample)
EP (1) EP0834218B1 (enExample)
JP (1) JP4011617B2 (enExample)
AT (1) ATE425582T1 (enExample)
CA (1) CA2224402C (enExample)
DE (1) DE69637863D1 (enExample)
DK (1) DK0834218T3 (enExample)
ES (1) ES2321889T3 (enExample)
PT (1) PT834218E (enExample)
WO (1) WO1997001221A1 (enExample)

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EP0834218A1 (en) 1998-04-08
CA2224402A1 (en) 1997-01-09
US5640133A (en) 1997-06-17
DE69637863D1 (de) 2009-04-23
WO1997001221A1 (en) 1997-01-09
EP0834218B1 (en) 2009-03-11
PT834218E (pt) 2009-05-06
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EP0834218A4 (en) 2002-04-10
ATE425582T1 (de) 2009-03-15
DK0834218T3 (da) 2009-04-20

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