AU2003271082A1 - Microresonator, microfilter, micro-oscillator, and wireless communication device - Google Patents

Microresonator, microfilter, micro-oscillator, and wireless communication device

Info

Publication number
AU2003271082A1
AU2003271082A1 AU2003271082A AU2003271082A AU2003271082A1 AU 2003271082 A1 AU2003271082 A1 AU 2003271082A1 AU 2003271082 A AU2003271082 A AU 2003271082A AU 2003271082 A AU2003271082 A AU 2003271082A AU 2003271082 A1 AU2003271082 A1 AU 2003271082A1
Authority
AU
Australia
Prior art keywords
microresonator
microfilter
oscillator
micro
wireless communication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003271082A
Inventor
Satoshi Morishita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of AU2003271082A1 publication Critical patent/AU2003271082A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
AU2003271082A 2002-10-03 2003-10-02 Microresonator, microfilter, micro-oscillator, and wireless communication device Abandoned AU2003271082A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002290779 2002-10-03
JP2002-290779 2002-10-03
PCT/JP2003/012665 WO2004032320A1 (en) 2002-10-03 2003-10-02 Microresonator, microfilter, micro-oscillator, and wireless communication device

Publications (1)

Publication Number Publication Date
AU2003271082A1 true AU2003271082A1 (en) 2004-04-23

Family

ID=32063821

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003271082A Abandoned AU2003271082A1 (en) 2002-10-03 2003-10-02 Microresonator, microfilter, micro-oscillator, and wireless communication device

Country Status (3)

Country Link
JP (1) JP4121502B2 (en)
AU (1) AU2003271082A1 (en)
WO (1) WO2004032320A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7424827B2 (en) * 2004-04-27 2008-09-16 Ngk Insulators, Ltd. Inspecting method of elastic body, inspecting apparatus thereof, and dimension predicting program thereof
CN100568720C (en) * 2005-01-13 2009-12-09 松下电器产业株式会社 Tortional resonator and the filter that adopts it
JP4645227B2 (en) * 2005-02-28 2011-03-09 セイコーエプソン株式会社 Vibrator structure and manufacturing method thereof
JP4728866B2 (en) * 2006-04-13 2011-07-20 株式会社東芝 Resonant circuit, filter circuit, and oscillation circuit
US7649671B2 (en) * 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
JP4977431B2 (en) * 2006-10-12 2012-07-18 三洋電機株式会社 Micromechanical resonator
JP4965962B2 (en) * 2006-10-13 2012-07-04 学校法人立命館 Micromechanical resonator
JP2009088854A (en) * 2007-09-28 2009-04-23 Sanyo Electric Co Ltd Micro mechanical resonator and its manufacturing method
JP5112819B2 (en) * 2007-10-31 2013-01-09 セイコーインスツル株式会社 Electrostatic vibrator and oscillator
JP5128296B2 (en) * 2008-01-21 2013-01-23 セイコーインスツル株式会社 Electrostatic vibrator and oscillator
JP2010162629A (en) * 2009-01-14 2010-07-29 Seiko Epson Corp Method of manufacturing mems device
US8430255B2 (en) * 2009-03-19 2013-04-30 Robert Bosch Gmbh Method of accurately spacing Z-axis electrode
WO2010143363A1 (en) 2009-06-09 2010-12-16 パナソニック株式会社 Resonator and oscillator using same
JP5290911B2 (en) * 2009-08-18 2013-09-18 日本電信電話株式会社 Microresonator and method for manufacturing the same
CN106664075B (en) * 2014-10-22 2019-06-18 株式会社村田制作所 Resonator and resonance device
JP6491170B2 (en) 2016-11-29 2019-03-27 Ｎｅｃプラットフォームズ株式会社 Braking device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61194325A (en) * 1985-02-25 1986-08-28 Shinko Denshi Kk Force converting mechanism
JPH05251977A (en) * 1992-03-03 1993-09-28 Fujitsu Ltd Piezoelectric device
US5550516A (en) * 1994-12-16 1996-08-27 Honeywell Inc. Integrated resonant microbeam sensor and transistor oscillator
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
FI108583B (en) * 1998-06-02 2002-02-15 Nokia Corp resonator structures
JP2004515089A (en) * 2000-04-20 2004-05-20 ザ　リージェンツ　オブ　ザ　ユニバーシティ　オブ　ミシガン Method and subsystem for processing a signal utilizing a plurality of vibrating micromechanical element arrays
JP2002094351A (en) * 2000-09-19 2002-03-29 Tdk Corp Piezoelectric resonance component

Also Published As

Publication number Publication date
JPWO2004032320A1 (en) 2006-02-02
WO2004032320A1 (en) 2004-04-15
JP4121502B2 (en) 2008-07-23

Similar Documents

Publication Publication Date Title
AU2003293695A1 (en) Wireless communication
AU2001267893A1 (en) Wireless communication device, and wireless communication method
AU2003228928A1 (en) Wireless communication using sound
AU2003285138A1 (en) Directed wireless communication
AU2003217395A1 (en) Wireless communication device operable on different types of communication networks
AU2003273036A1 (en) Wireless communication system
AU2003284586A1 (en) Radio communication device and radio communication method
AU2003207338A1 (en) Transmitter and wireless communication apparatus using the transmitter
AU2003289206A1 (en) Radio communication system, radio communication method, and radio communication device
AU2003271141A1 (en) Mobile communication device, mobile router, and mobile communication system
AU2003303627A1 (en) Medical device communication
AU2003290270A1 (en) Wireless antennas, networks, methods, software, and services
AU2003241809A1 (en) Wireless communication device and usage band determination method
EP1635517A4 (en) Radio packet communication method
AU2003280839A1 (en) Radio communication apparatus
AU2003271082A1 (en) Microresonator, microfilter, micro-oscillator, and wireless communication device
AU2003284414A1 (en) Radio communication system
AU2003297529A1 (en) Tags, wireless communication systems and wireless communications methods
AU2003904170A0 (en) Radio network communication system and protocol
AU2003297709A1 (en) Wireless network security
AU2003290859A1 (en) Wireless communication device having variable gain device and method therefor
AU2003224249A1 (en) Wireless communication terminals
AU2002311490A1 (en) Wireless communication device and method
AU2003255019A1 (en) Transmitting/receiving filter device and communication device
AU2003235331A1 (en) Communication device

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase