JP3973742B2 - 振動型ジャイロスコープ - Google Patents

振動型ジャイロスコープ Download PDF

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Publication number
JP3973742B2
JP3973742B2 JP31777497A JP31777497A JP3973742B2 JP 3973742 B2 JP3973742 B2 JP 3973742B2 JP 31777497 A JP31777497 A JP 31777497A JP 31777497 A JP31777497 A JP 31777497A JP 3973742 B2 JP3973742 B2 JP 3973742B2
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JP
Japan
Prior art keywords
vibrator
vibration
bending vibration
leg
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP31777497A
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English (en)
Japanese (ja)
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JPH1172333A5 (https=
JPH1172333A (ja
Inventor
菊池　　尊行
庄作 郷治
幸久 大杉
隆雄 相馬
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NGK Insulators Ltd
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NGK Insulators Ltd
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Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP31777497A priority Critical patent/JP3973742B2/ja
Priority to US09/108,500 priority patent/US6046531A/en
Publication of JPH1172333A publication Critical patent/JPH1172333A/ja
Publication of JPH1172333A5 publication Critical patent/JPH1172333A5/ja
Application granted granted Critical
Publication of JP3973742B2 publication Critical patent/JP3973742B2/ja
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Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP31777497A 1997-07-04 1997-11-05 振動型ジャイロスコープ Expired - Fee Related JP3973742B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP31777497A JP3973742B2 (ja) 1997-07-04 1997-11-05 振動型ジャイロスコープ
US09/108,500 US6046531A (en) 1997-07-04 1998-07-01 Vibrator, vibratory gyroscope, and linear accelerometer

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9-179705 1997-07-04
JP17970597 1997-07-04
JP31777497A JP3973742B2 (ja) 1997-07-04 1997-11-05 振動型ジャイロスコープ

Publications (3)

Publication Number Publication Date
JPH1172333A JPH1172333A (ja) 1999-03-16
JPH1172333A5 JPH1172333A5 (https=) 2004-12-16
JP3973742B2 true JP3973742B2 (ja) 2007-09-12

Family

ID=26499475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31777497A Expired - Fee Related JP3973742B2 (ja) 1997-07-04 1997-11-05 振動型ジャイロスコープ

Country Status (2)

Country Link
US (1) US6046531A (https=)
JP (1) JP3973742B2 (https=)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2789171B1 (fr) * 1999-02-01 2001-03-02 Onera (Off Nat Aerospatiale) Structure monolithique de gyrometre vibrant
JP4529203B2 (ja) * 1999-08-05 2010-08-25 パナソニック株式会社 角速度センサ
JP4058223B2 (ja) * 1999-10-01 2008-03-05 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP2001255152A (ja) * 2000-03-07 2001-09-21 Nec Corp 圧電振動ジャイロスコープおよびその周波数調整方法
WO2002069803A1 (en) * 2001-03-06 2002-09-12 Microstone Co., Ltd. Body motion detector
JP4015820B2 (ja) 2001-04-11 2007-11-28 日本碍子株式会社 配線基板及びその製造方法
JP2002340559A (ja) * 2001-05-11 2002-11-27 Piedekku Gijutsu Kenkyusho:Kk 水晶角速度センサ
JP2005249746A (ja) * 2004-03-08 2005-09-15 Ngk Insulators Ltd 振動子および物理量測定装置
US7106189B2 (en) * 2004-04-29 2006-09-12 Tracetech Incorporated Tracking system and methods thereof
JP2006058101A (ja) * 2004-08-19 2006-03-02 Seiko Epson Corp 振動片、振動子および応用機器
ATE374355T1 (de) * 2004-12-20 2007-10-15 Eta Sa Mft Horlogere Suisse Wandler zur winkelgeschwindigkeitsmessung
WO2006089260A2 (en) * 2005-02-19 2006-08-24 General Motors Global Technology Operations, Inc. Active material node based reconfigurable structures
CN101360968B (zh) 2006-01-24 2013-06-05 松下电器产业株式会社 惯性力传感器
JP4905921B2 (ja) * 2006-03-31 2012-03-28 京セラキンセキ株式会社 加速度センサ
JP2008145256A (ja) * 2006-12-08 2008-06-26 Tdk Corp 角速度センサ素子および角速度センサ装置
JP5023708B2 (ja) * 2007-01-17 2012-09-12 Ｔｄｋ株式会社 角速度センサ素子および角速度センサ装置
JP2008157810A (ja) * 2006-12-25 2008-07-10 Tdk Corp 角速度センサ素子および角速度センサ装置
JP5059399B2 (ja) * 2006-12-28 2012-10-24 日本電波工業株式会社 圧電振動片の製造方法、圧電振動片および圧電デバイス
JP4867865B2 (ja) * 2007-09-05 2012-02-01 セイコーエプソン株式会社 加速度センサ素子及び加速度センサ
JP2011209002A (ja) * 2010-03-29 2011-10-20 Seiko Epson Corp 振動片、角速度センサー、および電子機器
EP2515436A1 (en) * 2011-04-18 2012-10-24 Nxp B.V. MEMS resonator and method of controlling the same
CN102430098B (zh) * 2011-12-16 2013-12-04 青岛绿曼生物工程有限公司 一种治疗猪附链球菌病的复方蜂胶组合物及其制备方法
JP2015087262A (ja) * 2013-10-31 2015-05-07 セイコーエプソン株式会社 振動素子、振動子、電子機器および移動体
JP2015179933A (ja) 2014-03-19 2015-10-08 セイコーエプソン株式会社 振動素子、ジャイロセンサー素子、電子デバイス、電子機器および移動体
JP6906618B2 (ja) * 2017-08-29 2021-07-21 京セラ株式会社 センサ素子および角速度センサ
JP6474868B1 (ja) * 2017-08-29 2019-02-27 株式会社トライフォース・マネジメント 発電素子
JP7076546B2 (ja) * 2018-06-13 2022-05-27 京セラ株式会社 センサ素子および角速度センサ
WO2019240176A1 (ja) * 2018-06-13 2019-12-19 京セラ株式会社 センサ素子および角速度センサ
JP6647498B2 (ja) * 2018-10-17 2020-02-14 株式会社トライフォース・マネジメント 発電素子
JP2023065836A (ja) * 2021-10-28 2023-05-15 セイコーエプソン株式会社 振動素子の製造方法
JP2023082271A (ja) * 2021-12-02 2023-06-14 セイコーエプソン株式会社 振動素子の製造方法
JP2023085722A (ja) * 2021-12-09 2023-06-21 セイコーエプソン株式会社 振動素子の製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3206986A (en) * 1963-01-04 1965-09-21 Western Electric Co Apparatus for sensing selected movements of a body
US4654663A (en) * 1981-11-16 1987-03-31 Piezoelectric Technology Investors, Ltd. Angular rate sensor system
JPS62217115A (ja) * 1986-03-19 1987-09-24 Tokyo Keiki Co Ltd ジヤイロ装置
US5166571A (en) * 1987-08-28 1992-11-24 Nec Home Electronics, Ltd. Vibration gyro having an H-shaped vibrator
US4930351A (en) * 1988-03-24 1990-06-05 Wjm Corporation Vibratory linear acceleration and angular rate sensing system
CH683578A5 (fr) * 1990-03-08 1994-03-31 Suisse Electronique Microtech Résonateur piézoélectrique.
JPH07113645A (ja) * 1993-10-15 1995-05-02 Toyota Motor Corp 振動ジャイロ
JP3029001B2 (ja) * 1993-10-28 2000-04-04 トヨタ自動車株式会社 振動子
JP3326989B2 (ja) * 1994-08-25 2002-09-24 株式会社豊田中央研究所 振動子とその調整方法および角速度センサ
US5861705A (en) * 1994-11-01 1999-01-19 Fujitsu Limited Tuning-fork vibratory gyro and sensor system using the same
US5747107A (en) * 1995-10-26 1998-05-05 Minnesota Mining And Manufacturing Company Method of applying a hot melt coating
JPH09128833A (ja) * 1995-10-31 1997-05-16 Sony Corp 光ピックアップ装置
JPH09196680A (ja) * 1996-01-16 1997-07-31 Tokimec Inc ジャイロ装置及びその製造方法

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Publication number Publication date
US6046531A (en) 2000-04-04
JPH1172333A (ja) 1999-03-16

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