JP3898288B2 - チタン硬化部材及びその硬化処理方法 - Google Patents
チタン硬化部材及びその硬化処理方法 Download PDFInfo
- Publication number
- JP3898288B2 JP3898288B2 JP18530597A JP18530597A JP3898288B2 JP 3898288 B2 JP3898288 B2 JP 3898288B2 JP 18530597 A JP18530597 A JP 18530597A JP 18530597 A JP18530597 A JP 18530597A JP 3898288 B2 JP3898288 B2 JP 3898288B2
- Authority
- JP
- Japan
- Prior art keywords
- titanium
- argon
- curing
- oxygen
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title claims description 108
- 239000010936 titanium Substances 0.000 title claims description 107
- 229910052719 titanium Inorganic materials 0.000 title claims description 107
- 238000000034 method Methods 0.000 title claims description 64
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 98
- 239000007789 gas Substances 0.000 claims description 77
- 238000011282 treatment Methods 0.000 claims description 69
- 238000001723 curing Methods 0.000 claims description 63
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 60
- 239000001301 oxygen Substances 0.000 claims description 60
- 229910052760 oxygen Inorganic materials 0.000 claims description 60
- 229910052786 argon Inorganic materials 0.000 claims description 49
- 238000010438 heat treatment Methods 0.000 claims description 45
- 238000012545 processing Methods 0.000 claims description 43
- 238000001816 cooling Methods 0.000 claims description 21
- 239000001307 helium Substances 0.000 claims description 20
- 229910052734 helium Inorganic materials 0.000 claims description 20
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 19
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 12
- 239000001257 hydrogen Substances 0.000 claims description 12
- 229910052739 hydrogen Inorganic materials 0.000 claims description 12
- 230000008569 process Effects 0.000 description 43
- 230000003746 surface roughness Effects 0.000 description 39
- 239000011261 inert gas Substances 0.000 description 33
- 239000010410 layer Substances 0.000 description 32
- 239000013078 crystal Substances 0.000 description 30
- 150000001875 compounds Chemical class 0.000 description 20
- 230000003647 oxidation Effects 0.000 description 11
- 238000007254 oxidation reaction Methods 0.000 description 11
- 238000002845 discoloration Methods 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000012360 testing method Methods 0.000 description 8
- 238000004040 coloring Methods 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 7
- 230000009467 reduction Effects 0.000 description 7
- 238000005121 nitriding Methods 0.000 description 6
- 238000005498 polishing Methods 0.000 description 6
- 238000000921 elemental analysis Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 229910001069 Ti alloy Inorganic materials 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000006104 solid solution Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000004737 colorimetric analysis Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 238000002233 thin-film X-ray diffraction Methods 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000005255 carburizing Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000006356 dehydrogenation reaction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 201000005299 metal allergy Diseases 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 230000003678 scratch resistant effect Effects 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005480 shot peening Methods 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Adornments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18530597A JP3898288B2 (ja) | 1997-07-10 | 1997-07-10 | チタン硬化部材及びその硬化処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18530597A JP3898288B2 (ja) | 1997-07-10 | 1997-07-10 | チタン硬化部材及びその硬化処理方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH1129847A JPH1129847A (ja) | 1999-02-02 |
| JPH1129847A5 JPH1129847A5 (enExample) | 2005-08-18 |
| JP3898288B2 true JP3898288B2 (ja) | 2007-03-28 |
Family
ID=16168541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18530597A Expired - Fee Related JP3898288B2 (ja) | 1997-07-10 | 1997-07-10 | チタン硬化部材及びその硬化処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3898288B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3930420B2 (ja) | 2002-11-20 | 2007-06-13 | 愛三工業株式会社 | チタン部材の表面処理方法 |
| CA2597266A1 (en) | 2005-02-16 | 2006-08-24 | Mitsubishi Heavy Industries, Ltd. | Surface treatment method of titanium alloy member for aerospace equipment |
| JP2018162503A (ja) * | 2017-03-27 | 2018-10-18 | Ntn株式会社 | 機械部品及び表面処理方法 |
| JP6914688B2 (ja) * | 2017-03-27 | 2021-08-04 | Ntn株式会社 | 機械部品及びすべり軸受 |
| JP7051419B2 (ja) * | 2017-12-20 | 2022-04-11 | Ntn株式会社 | 機械部品の製造方法 |
| WO2019124265A1 (ja) * | 2017-12-20 | 2019-06-27 | Ntn株式会社 | 機械部品及び機械部品の製造方法 |
-
1997
- 1997-07-10 JP JP18530597A patent/JP3898288B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1129847A (ja) | 1999-02-02 |
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