JP3751538B2 - 気体流量計 - Google Patents

気体流量計 Download PDF

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Publication number
JP3751538B2
JP3751538B2 JP2001113324A JP2001113324A JP3751538B2 JP 3751538 B2 JP3751538 B2 JP 3751538B2 JP 2001113324 A JP2001113324 A JP 2001113324A JP 2001113324 A JP2001113324 A JP 2001113324A JP 3751538 B2 JP3751538 B2 JP 3751538B2
Authority
JP
Japan
Prior art keywords
circuit
voltage
adjustment
gas flow
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001113324A
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English (en)
Japanese (ja)
Other versions
JP2002310760A (ja
Inventor
隆史 松村
登 杉浦
健一 片岸
昌大 松本
恵二 半沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Automotive Systems Engineering Co Ltd
Original Assignee
Hitachi Ltd
Hitachi Car Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Car Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP2001113324A priority Critical patent/JP3751538B2/ja
Priority to EP08011490A priority patent/EP1972904A2/en
Priority to EP01119769A priority patent/EP1249688A3/en
Priority to US09/942,030 priority patent/US6810345B2/en
Publication of JP2002310760A publication Critical patent/JP2002310760A/ja
Priority to US10/848,166 priority patent/US6968283B2/en
Application granted granted Critical
Publication of JP3751538B2 publication Critical patent/JP3751538B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Combined Controls Of Internal Combustion Engines (AREA)
JP2001113324A 2001-04-11 2001-04-11 気体流量計 Expired - Fee Related JP3751538B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2001113324A JP3751538B2 (ja) 2001-04-11 2001-04-11 気体流量計
EP08011490A EP1972904A2 (en) 2001-04-11 2001-08-28 Gas flow meter
EP01119769A EP1249688A3 (en) 2001-04-11 2001-08-28 Gas flow meter
US09/942,030 US6810345B2 (en) 2001-04-11 2001-08-30 Gas flow meter
US10/848,166 US6968283B2 (en) 2001-04-11 2004-05-19 Gas flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001113324A JP3751538B2 (ja) 2001-04-11 2001-04-11 気体流量計

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005285755A Division JP2006038878A (ja) 2005-09-30 2005-09-30 気体流量計

Publications (2)

Publication Number Publication Date
JP2002310760A JP2002310760A (ja) 2002-10-23
JP3751538B2 true JP3751538B2 (ja) 2006-03-01

Family

ID=18964563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001113324A Expired - Fee Related JP3751538B2 (ja) 2001-04-11 2001-04-11 気体流量計

Country Status (3)

Country Link
US (2) US6810345B2 (US20040210410A1-20041021-M00002.png)
EP (2) EP1972904A2 (US20040210410A1-20041021-M00002.png)
JP (1) JP3751538B2 (US20040210410A1-20041021-M00002.png)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4429987B2 (ja) * 2005-07-29 2010-03-10 株式会社ジェイテクト 安全ｐｌｃ
JP4790405B2 (ja) * 2005-12-16 2011-10-12 三菱電機株式会社 熱式流量センサ
US7633259B2 (en) * 2006-07-31 2009-12-15 General Electric Company Method and apparatus for operating electrical machines
JP4197529B2 (ja) * 2006-09-21 2008-12-17 三菱電機株式会社 流量センサ
US7874208B2 (en) * 2007-10-10 2011-01-25 Brooks Instrument, Llc System for and method of providing a wide-range flow controller
FR2940453B1 (fr) 2008-12-19 2011-03-25 Commissariat Energie Atomique Sonde anemometrique a fils en "x" et son procede de realisation
FR2940434B1 (fr) * 2008-12-19 2011-01-21 Commissariat Energie Atomique Dispositif de regulation d'un anemometre a fil
JP5304766B2 (ja) * 2010-10-26 2013-10-02 株式会社デンソー 流量測定装置
US9441994B2 (en) * 2010-11-10 2016-09-13 Wai Global, Inc. Mass air flow sensor
JP5665703B2 (ja) * 2011-09-16 2015-02-04 三菱電機株式会社 車両用熱式流量センサ
DE102011089897A1 (de) 2011-12-23 2013-06-27 Continental Automotive Gmbh Sensorsystem
US8590361B1 (en) * 2012-01-27 2013-11-26 Onicon, Inc. Magnetic flow meters with automatic field maintenance
US9777637B2 (en) 2012-03-08 2017-10-03 General Electric Company Gas turbine fuel flow measurement using inert gas
JP5809095B2 (ja) * 2012-04-03 2015-11-10 日本特殊陶業株式会社 ガスセンサ回路装置
US9448579B2 (en) * 2013-12-20 2016-09-20 Analog Devices Global Low drift voltage reference
JP6106654B2 (ja) * 2014-12-05 2017-04-05 日立オートモティブシステムズ株式会社 気体流量測定装置
CN108956005B (zh) * 2018-08-08 2024-03-22 陈德连 压力传感器
JP7305987B2 (ja) * 2019-03-07 2023-07-11 富士電機株式会社 半導体集積回路

Family Cites Families (27)

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US338193A (en) * 1886-03-16 Island
US2085724A (en) * 1935-11-30 1937-07-06 Electric Storage Battery Co Handling mechanism for storage battery containers
JPS57163822A (en) * 1981-04-01 1982-10-08 Nippon Soken Inc Measuring device for air flow rate
JPS58206028A (ja) 1982-05-26 1983-12-01 Hitachi Ltd 陰極線管の製造方法
GB2199711B (en) * 1987-01-08 1990-10-24 Schlumberger Electronics Converter calibration
DE3809110C2 (de) * 1988-03-18 1995-10-12 Wolfgang Dipl Ing Sass Einrichtung zur Gasmassenstrommessung
US4885943A (en) * 1988-05-11 1989-12-12 Hydro-Craft, Inc. Electronic flowmeter system and method
JPH0285724A (ja) 1988-09-21 1990-03-27 Aisan Ind Co Ltd 吸入空気量検出装置
US5223611A (en) * 1989-08-03 1993-06-29 Tadamitsu Kishimoto DNA encoding for human GP130 protein
JP2816758B2 (ja) * 1990-09-07 1998-10-27 株式会社日立製作所 ファジイ推論を用いた流量測定装置及び方法
JPH05203475A (ja) 1991-11-26 1993-08-10 Hitachi Ltd 熱式空気流量計
JP3073089B2 (ja) 1992-02-13 2000-08-07 株式会社日立製作所 空気流量計
US5263369A (en) * 1992-07-24 1993-11-23 Bear Medical Systems, Inc. Flow sensor system and method
US5299594A (en) * 1992-08-27 1994-04-05 C.A.P., Inc. Liquid flow rate detector
US5347843A (en) * 1992-09-23 1994-09-20 Korr Medical Technologies Inc. Differential pressure flowmeter with enhanced signal processing for respiratory flow measurement
JP3463757B2 (ja) * 1993-04-08 2003-11-05 株式会社日立製作所 エンジン制御装置及びこれに用いる空気流量計
JP3193241B2 (ja) 1994-08-22 2001-07-30 株式会社半導体エネルギー研究所 計測装置
JP2846613B2 (ja) 1996-02-28 1999-01-13 株式会社日立製作所 パルス出力型熱線式空気流量計
JPH09307361A (ja) 1996-05-15 1997-11-28 Nec Corp 過電圧保護回路
US5994892A (en) * 1996-07-31 1999-11-30 Sacramento Municipal Utility District Integrated circuit design automatic utility meter: apparatus & method
US5944048A (en) * 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
JP3363360B2 (ja) 1997-10-08 2003-01-08 株式会社日立製作所 センサ調整回路
DE19730580A1 (de) 1997-07-17 1999-01-21 Bosch Gmbh Robert Vorrichtung zur Bestimmung des Durchsatzes eines strömenden Mediums
JP2000338193A (ja) 1999-05-31 2000-12-08 Hitachi Ltd 集積回路及び物理量検出システム
US6343617B1 (en) * 1999-07-09 2002-02-05 Millipore Corporation System and method of operation of a digital mass flow controller
JP3557379B2 (ja) * 2000-01-24 2004-08-25 株式会社日立製作所 空気流量測定装置

Also Published As

Publication number Publication date
EP1249688A2 (en) 2002-10-16
JP2002310760A (ja) 2002-10-23
US6968283B2 (en) 2005-11-22
EP1249688A3 (en) 2006-04-19
US20040210410A1 (en) 2004-10-21
EP1972904A2 (en) 2008-09-24
US20030004666A1 (en) 2003-01-02
US6810345B2 (en) 2004-10-26

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