JP3722598B2 - ２アーム方式の搬送用ロボット装置 - Google Patents

２アーム方式の搬送用ロボット装置 Download PDF

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Publication number
JP3722598B2
JP3722598B2 JP20863697A JP20863697A JP3722598B2 JP 3722598 B2 JP3722598 B2 JP 3722598B2 JP 20863697 A JP20863697 A JP 20863697A JP 20863697 A JP20863697 A JP 20863697A JP 3722598 B2 JP3722598 B2 JP 3722598B2
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JP
Japan
Prior art keywords
fulcrum
arm
rotation transmission
transmission member
link
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20863697A
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English (en)
Japanese (ja)
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JPH1133950A5 (https=
JPH1133950A (ja
Inventor
弘敬 小川
博和 依田
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Daihen Corp
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Daihen Corp
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Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP20863697A priority Critical patent/JP3722598B2/ja
Priority to US09/031,520 priority patent/US5975834A/en
Publication of JPH1133950A publication Critical patent/JPH1133950A/ja
Publication of JPH1133950A5 publication Critical patent/JPH1133950A5/ja
Application granted granted Critical
Publication of JP3722598B2 publication Critical patent/JP3722598B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0084—Program-controlled manipulators comprising a plurality of manipulators
    • B25J9/009—Program-controlled manipulators comprising a plurality of manipulators being mechanically linked with one another at their distal ends
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
JP20863697A 1997-07-16 1997-07-16 ２アーム方式の搬送用ロボット装置 Expired - Lifetime JP3722598B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP20863697A JP3722598B2 (ja) 1997-07-16 1997-07-16 ２アーム方式の搬送用ロボット装置
US09/031,520 US5975834A (en) 1997-07-16 1998-02-27 Two-armed transfer robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20863697A JP3722598B2 (ja) 1997-07-16 1997-07-16 ２アーム方式の搬送用ロボット装置

Publications (3)

Publication Number Publication Date
JPH1133950A JPH1133950A (ja) 1999-02-09
JPH1133950A5 JPH1133950A5 (https=) 2005-05-12
JP3722598B2 true JP3722598B2 (ja) 2005-11-30

Family

ID=16559526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20863697A Expired - Lifetime JP3722598B2 (ja) 1997-07-16 1997-07-16 ２アーム方式の搬送用ロボット装置

Country Status (2)

Country Link
US (1) US5975834A (https=)
JP (1) JP3722598B2 (https=)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR980008470A (ko) * 1996-07-15 1998-04-30 조셉 제이. 스위니 이중 평면 로봇
JPH10329069A (ja) * 1997-03-31 1998-12-15 Daihen Corp 搬送システムの制御方法
JPH11135600A (ja) * 1997-08-25 1999-05-21 Shibaura Mechatronics Corp ロボット装置および処理装置
US6164894A (en) * 1997-11-04 2000-12-26 Cheng; David Method and apparatus for integrated wafer handling and testing
WO1999028951A2 (en) * 1997-11-28 1999-06-10 Mattson Technology, Inc. Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing
JP4178534B2 (ja) * 1997-12-24 2008-11-12 株式会社安川電機 基板搬送用ロボット
JPH11300663A (ja) * 1998-04-24 1999-11-02 Mecs Corp 薄型基板搬送装置
JP3863671B2 (ja) * 1998-07-25 2006-12-27 株式会社ダイヘン 搬送用ロボット装置
US6258220B1 (en) 1998-11-30 2001-07-10 Applied Materials, Inc. Electro-chemical deposition system
JP2000174091A (ja) * 1998-12-01 2000-06-23 Fujitsu Ltd 搬送装置及び製造装置
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
US6662673B1 (en) 1999-04-08 2003-12-16 Applied Materials, Inc. Linear motion apparatus and associated method
US6557237B1 (en) 1999-04-08 2003-05-06 Applied Materials, Inc. Removable modular cell for electro-chemical plating and method
US6571657B1 (en) 1999-04-08 2003-06-03 Applied Materials Inc. Multiple blade robot adjustment apparatus and associated method
KR100407568B1 (ko) * 2001-06-01 2003-12-01 삼성전자주식회사 장치설치영역 내에 지지대를 갖는 반도체 제조 장치
JP4354675B2 (ja) * 2002-06-04 2009-10-28 ローツェ株式会社 薄板状電子部品クリーン移載装置および薄板状電子製品製造システム
JP2007005582A (ja) * 2005-06-24 2007-01-11 Asm Japan Kk 基板搬送装置及びそれを搭載した半導体基板製造装置
US7946800B2 (en) * 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
US8752449B2 (en) 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
JP5059729B2 (ja) * 2008-09-30 2012-10-31 株式会社日立ハイテクコントロールシステムズ ウェーハ搬送ロボット及びウェーハ搬送装置
CN102686367B (zh) * 2009-12-28 2015-05-20 株式会社爱发科 驱动装置及输送装置
KR101205364B1 (ko) 2010-05-13 2012-11-28 삼성중공업 주식회사 탈부착형 ４절 링크기구 구동장치를 갖는 산업용 로봇
JP5610952B2 (ja) * 2010-09-24 2014-10-22 日本電産サンキョー株式会社 産業用ロボット
US9149936B2 (en) * 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
US11691268B2 (en) 2015-03-12 2023-07-04 Persimmon Technologies Corporation Robot having a variable transmission ratio
US11183401B2 (en) 2015-05-15 2021-11-23 Suss Microtec Lithography Gmbh System and related techniques for handling aligned substrate pairs
US10825705B2 (en) * 2015-05-15 2020-11-03 Suss Microtec Lithography Gmbh Apparatus, system, and method for handling aligned wafer pairs
CN107825403A (zh) * 2017-12-08 2018-03-23 广西瑞克工业机器人有限公司 一种方便安装机器人手臂的基座
US12036680B2 (en) * 2018-07-06 2024-07-16 Kawasaki Jukogyo Kabushiki Kaisha Substrate transfer robot and method of controlling the same
WO2022197996A1 (en) * 2021-03-18 2022-09-22 Persimmon Technologies Corporation Distributed-architecture robot with multiple linkages
JP7568366B2 (ja) * 2021-03-24 2024-10-16 東京エレクトロン株式会社 基板搬送方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0825151B2 (ja) * 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
JP2808826B2 (ja) * 1990-05-25 1998-10-08 松下電器産業株式会社 基板の移し換え装置
KR0162102B1 (ko) * 1991-05-29 1999-02-01 이노우에 아키라 반도체 제조장치
JP3030667B2 (ja) * 1991-07-29 2000-04-10 東京エレクトロン株式会社 搬送装置
JPH06132380A (ja) * 1992-09-04 1994-05-13 Fujitsu Ltd 搬送装置
WO1994023911A1 (en) * 1993-04-16 1994-10-27 Brooks Automation, Inc. Articulated arm transfer device
JP3181455B2 (ja) * 1993-11-20 2001-07-03 東京エレクトロン株式会社 搬送アーム装置及びこれを用いた処理室集合装置
JP3264076B2 (ja) * 1994-01-31 2002-03-11 松下電器産業株式会社 真空処理装置
JPH07223180A (ja) * 1994-02-10 1995-08-22 Tescon:Kk 水平多関節ロボット
KR0129582B1 (ko) * 1994-06-23 1998-04-06 김주용 다중 기판 전달 장치
JPH0871965A (ja) * 1994-08-31 1996-03-19 Sony Corp 移載装置
US5765444A (en) * 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
US5647724A (en) * 1995-10-27 1997-07-15 Brooks Automation Inc. Substrate transport apparatus with dual substrate holders

Also Published As

Publication number Publication date
US5975834A (en) 1999-11-02
JPH1133950A (ja) 1999-02-09

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